-fl Seies

NVVsFR4 _ 01C ---r--Series NVFB40O0 Manilold valve Plug.in type }Wlth mslti connector Symbol Mounting direction of connector Plug-in Type: With D-Sub Connector aWide range ol interchangeability (MlL Spec DIN type connector terminal 25 pin.) aQuick wiring perrnits ease ot installation NVVsFR4 01F 63D l*-n",'.

Sine Rodless Cylinder Series REBR Direct Mount Type

Model determination 61 Series REBR Model Selection 2 Design Parameters 1 Selection Method REBR25 REBR32 REBR15 500 400 300 200 300 200 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 40 50 20 30 40 50 30 20 20 Usable range 10 10 10 Usable

99

High Precision Filter for Liquids FGH Series Filtration efficiency: 99% or more FGD FGE HEPO2element Filtration accuracy: 2, 4, 6 or 13 m (Filtration efficiency 99%) FGG FGA FGC Membrane element Filtration accuracy: 0.2 or 0.4 m (Filtration efficiency 99.9%) FGF FGH FGH FQ1 FN EB ES 61 High Precision Filter for Liquids FGH Series Filtration efficiency: 99% or more Prevents particle generation

EXxx-OMZ0016

Gr ee Re Alternate Flashing In pairing mode. d n Fn is being used. Change the mode according to the application.

XL-OMV0002

J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154

type (with D sub-connector): ⑦ Type 01F with D sub-connector
Note) For the electrical connection of the DIN terminal type, refer to ①, ②, and ③.

type (with D sub-connector) ④ Type 01F with D sub-connector
Note) For the electrical connection of the DIN terminal type, refer to ①.

High Vacuum L Type Valve

D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMY0001 6. 200 []1 1.5 1 200 FKM 110Pa <> 13 XL-OMY0001 7 7-1. 2 2P5P6 14 XL-OMY0001 7-2 1 2 1 3 1 1 2 4 1 0.4MPa G 3 4 2 XLA

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance test conditions), 18 months after delivery or 12 months in service, whichever comes first.

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Series: 2 (VQZ200), Stations: 4 Stations, Port Size: 01F (G1/8)

Micro Mechanical Valve Series VM1000

VM830-01-00 180 280 300 276 VM830-01-13 VM830-01-14 VM-13F VM-14F VM830-01-01 VM-01F Actuator replacement is available. How to Order 01 01 3 0 VM8 Actuator type Port size Basic 00 01 Rc 1 8 Roller lever 01 NPT 1 8 G 1 8 N01 F01 Adjustable roller lever 13 Adjustable rod lever 14 Number of ports 3 3 port Application Movement is changeable. Roller can be mounted to inside of lever.

VS 8-2/VS 8-4

For Rc 1/8" AXT954-01 For Rc 1/4" AXT954-02 For Rc 3/8" AXT954-03 For Rc 1/2" AXT954-04 For NPTF 1/8" AXT954-01T For NPTF 1/4" AXT954-02T For NPTF 3/8" AXT954-03T For NPTF 1/2" AXT954-04T For G 1/8" AXT954-01F#1 For G 1/4" AXT954-02F#1 For G 3/8" AXT954-03F#1 For G 1/2" AXT954-04F#1 This is used to plug the cylinder ports when using as a 3-port valve, etc. 26 Series VS 8-2/VS 8-4 S R S R

This is a legacy product, and replaced byVT307-BDO1-01F-Q, VALVE, SOL, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, .30864 lb

This is a legacy product, and replaced byVT307-5DO1-01F-Q, VALVE, SOL, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, .36076 lb

This is a legacy product, and replaced byVT307-5DZ1-01F-Q, VT3 BASE MT 1/8, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, 0.42793 lb

V100

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

3 Port Solenoid Valve Series VQ100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.