Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

P, E port location U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Pilot type Internal pilot External pilot Nil R Valve stations Series 10-SV1000 Series 10-SV2000 P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins 02 02 02 02 2 stations 2 stations 2 stations 2 stations Double wiring

OMU0023

Data No.1 8 02 0106 sent. 9 01 02 004B 0001 01 02 01 Acquires the INP signal information.

HEC-OM-S008

31 32 35 30 30 03 3F 38 0D Answer 25.0 deg.C. 31 Temperature setting (without writing FRAM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38

Table of Contents

(Inlet air pressure: 0.7 MPa, Inlet air temperature: 20C) HA How to Order AT ID 20 02 0 ID AMG ID400 Option B Bracket Z Adsorbent for low dew point Basic size AFF 20 30 40 60 Port size AM ID200 02 B 04 06 1 4 B 1 2 B 3 4 Nil Rc Thread type Misc.

LEC-OM02704CN

C 1. ##0064 ## 00 01 1 02 2 03 3 62 62 63 63 64 64 2. $$$0255 3. ** 4.

With Factory Installed

AI Inlel pressure 0.7MPa /71 kgf/cm21 , outlel pressure 0.2MPa 1 2.0kgflcm21. flow rale 20 / min (ANR) AR2001-02 AR2001-02 0.25 -r-=:: lf~1 ~ "'" ~ :'.. ::;; 0.2 ~r. " 5 OJ> ~ o . 3k-1-j.-:=.

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'-02 ~2 06 6 (Application: Refer to ListO) i 08 ~8 U Flat type Material a With buffer 04 4 Pad type.

AC Servo Motor Driver (Pulse input type/Positioning type ）

PB45] 0 Notch depth Command notch filter setting frequency Depth Setting Setting Setting Setting Frequency Frequency Frequency [dB] [Hz] [Hz] [Hz] value value value value 0 1 2 3 4 5 6 7 8 9 -40.0 -24.1 -18.1 -14.5 -12.0 -10.1 00 01 02 03 Disabled 20 21 22 23 24 25 26 27 28 29 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55

AC Servo Motor Driver (Network card type ）

PB _ _ ] 02: [Pr. PC _ _ ] 03: [Pr. PD _ _ ] 04: [Pr. PE _ _ ] 05: [Pr. PF _ _ ] 06: Parameter for manufacturer setting 07: Parameter for manufacturer setting 08: Parameter for manufacturer setting 09: Parameter for manufacturer setting 0A: Parameter for manufacturer setting 0B: [Pr. PL _ _ ] 0C: [Pr. PT _ _ ] 0E: [Pr.

PFA/PFW

Panel adapter B ZS-22-02 Thread type Piping port size Rc NPT G Nil N F 01 02 1/8 1/4 Specifications PFA301-m PFA300-m Model Specifications Note 1) 1 to 10, 5 to 50l/min (0.04 to 0.35, 0.18 to 1.77SCFM) Flow rate range measurement & setting Minimum setting unit 1% of maximum flow rate range Model PFA510-m PFA550-m Real-time flow rate l/min, CFM x 10-2 Display units Measured fluids Dry air,

LEC-OM02904

B2B2 3 rev 1 (2) (1) 200 TM MR Configurator2 PC02 MBR (MBR)OFF(Tb) 0 ms 0 1000 PC03 *ENRS 0h 0 0 A B AB CCW CW A A 0 B B A A 1 B B 0 1 0 1 PC04 **COP1 C-1 0h 0 0 0 02 14 1()(16) 11.1.2 02 1: 4 116 11.1.2 5 21 5 No.

HRX-OM-T004

30 31 52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRS090 Series 5-14 HRX-OM-T004 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

HRX-OM-R028

30 31 52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRSH Series 5-14 HRX-OM-R028 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

AC Servo Motor Driver

For driver of 200 to 7kW, built-in regenerative resistor is used. 02: LEC-MR-RB-032 03: LEC-MR-RB-12 12 10 12. OPTIONS AND AUXILIARY EQUIPMENT (4) Connection of the regenerative option POINT For the sizes of wires used for wiring, refer to section 12.6. The regenerative option will cause a temperature rise of 100 relative to the ambient temperature.

HRX-OM-M091

30 31 52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRS Series 5-14 HRX-OM-M091 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

HRX-OM-Q033

30 31 52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRSH Series 5-14 HRX-OM-Q033 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

HRX-OM-S010

30 31 52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRS100/150 Series 5-14 HRX-OM-S010 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

Vacuum

:ti Statlons 02-2 stations System type. AEjectors B External Vacuum 'For plug (X) posirioning onty.

Vacuum

Reed switch: D-90, D-97 (With lamp) Solid state auto switch: D-FgN (3-wire type, NPN, W/LED D-FgP (3-wire type, PNP, MLED) D-FgB (2-wire type, w/LED) bing system for vacuum entry (Pad dia.: 02-o50) ) thread mounting> Cap porting The piston rod on the vacuum side is not projected externally. The vacuum entry tube does not move under operaticn of the piston.

Digital Flow Switches

VA-4D OMRON Corp. XN2A-1430 OMRON Corp. XS2 Yamatake Co.,Ltd. M12 4 PA5-4I Hirose Electric Co., Ltd. HR24 DKK Ltd. CM01-8DP4S Panel mounting Note Part no. Description Note Pin no.