SMC Pneumatic Clean Series Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Approx. 1.7 mm Colours Brown, White, Black, Blue Sheath Material Lead free heat and oil resistant PVC Finished O.D. 6 -66No.LV50***-OMQ0002-G Characteristics Chart Flow characteristics (pressure loss) LFE1 LFE2 0.02 0.02 P r essur r e l oss[ M P a] 0.015 0.015 P r essur e l oss[ M P a] 0.01 0.01 0.005 0.005 0 0 0 5 10 15 20 0 20 40 60 80 100 Fl ow r at e[ L/ m i n] Fl ow r at e[ L/ m i n]
[%F.S.] 2 1 0 OUT OUT OUT OUT 0 D 2D 3D 4D 5D IN IN IN IN 0 1 2 3 4 5 5 (5D) [] [] LFE13/8 inch 0.2 MPa LFE23/4 inch LFE31 inch (mm) D 5 D LFE1 11 55 LFE2 21 105 LFE3 27 135 68 No.LFE*-OMY0008 4.0 3.5 3.0 2.5 [%F.S.]
fl 110+559120+559 Differenl 1 5 90 100 1 1 0 Same 90 100 1 1 0 Ditterent 15+5d!
fl 110+559120+559 Differenl 1 5 90 100 1 1 0 Same 90 100 1 1 0 Ditterent 15+5d!
The straight piping length shall be 5 times (5D) or more of the piping size to satisfy and achieve the stable measurement.
3 w e q !1 r y o e t !2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 Built-in magnet Without magnet Single acting u i r y o e w i e u !
3r#0q u @9#2 e y!6#1@8t!2w#3!5 !7 !8 @1 @6 14A !9 @0 CJ1 CJP @7 i o CJ2 80, 100 CM2 C85 !0 !1 CG1 @2@3@4@5 14B MB Locking at rod end C95 CA1 CS1 Manual release non-locking style: L Material Note Component Parts Material Note Component Parts No. q w e r t y No. !7 !8 !
(b) 1) Vb[V] 2) (Ib) Ib = Vb R [A] 3) (E) L lb2 E = 2 [J] 4) (Vi) (Ib)(Vi)(E) (Vi)[V](Vs)[V]Vi ViVs 5) () () = E Vi lb [S] 6) ()N (Ip) (Ip)(Ib) Ip/IbN[] (4) 13 3 13. 13.1.2 ( ) () LE--B S5 S6 S7 S8 50W 100W 200W 400W (1) () (4) DC 24 V 0 -10% [W] at 20 6.3 7.9 (6) [] 91.0 73.0 (6) [H] 0.15 0.18 [N m] 0.32 1.3 (2) [s] 0.03 0.03 (2) [s] 0.01 0.02 1 [J] 5.6 22 [J] 56 220 (5
How to order L E C C G 1 L Cable length(L) K 0.3m L 0.5m 1 1m ii. Dimensions 70 - (3) Cable between branches (between the branch connectors) i. How to order L E C C G 2 L Cable length(L) K 0.3m L 0.5m 1 1m ii. Dimensions (4) Branch connector i. How to order L E C C G D Branch connector ii. Dimensions (5) Terminating resistor i. How to order L E C C G R ii. Dimensions 71 - 8.
How to Order VFN212 02 N 5 F D Z CE marking NAMUR Interface Nil Q CE marked product Voltage Thread type 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz Nil Rc (PT) F G (PF) N NPT Electrical entry Solenoid G Grommet E Grommet terminal T Conduit terminal D DIN terminal Nil Single solenoid D Double solenoid Manual
Flow Rate Characteristics Weight (g) Flow rate characteristics 12 (PA) 23 (AR) Model Weight VFN212N-5D-02F 240 VFN212N-5D-02F-D 380 C b Cv C b Cv 2-position Single solenoid 2.68 0.40 0.72 5.41 0.31 1.38 Double solenoid 2.68 0.40 0.72 5.41 0.31 1.38 189 A
Rod side mounting/Without auto switch Head side mounting/Without auto switch C D Mounting bolt Model C D Mounting bolt Model CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -
Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: None, Port Size: 10 (1), Thread: N (NPT), Passage: External Pilot (N.O/N.C), Option: Standard, CE Compliant: Q (CE Compliant)
Pilot: External Pilot, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 1, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Standard, CE Compliant: CE Compliant
Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: None, Port Size: 10 (1), Thread: N (NPT), Passage: External Pilot (N.O/N.C), Option: E (Continuous Duty)
Pilot: External Pilot, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 1, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases
PF-OMK0003CN-E PFMV5 [V] PFMV5 [V] -20No. PF-OMK0003CN-E PFMV505(F)-1 PFMV510(F)-1 [kPa] [kPa] [L/min] [L/min] PFMV530(F)-1 [kPa] [L/min] -21No. PF-OMK0003CN-E PFMV5 PFMV5 + L (ZS-36-A) 10n +24(n=15) 10n +14 L L L -22No.