Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: L (-48 kPa), SUP: N03 (Screw-in NPT 3/8), VAC: N03 (Screw-in NPT 3/8)

Nozzle Diameter: 15 (ø1.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N02 (Screw-in NPT 1/4), VAC: N03 (Screw-in NPT 3/8), EXH: N03 (Screw-in NPT 3/8), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 15 (ø1.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N02 (Screw-in NPT 1/4), VAC: N03 (Screw-in NPT 3/8), EXH: N03 (Screw-in NPT 3/8)

Part Number Description: HEAD HANDLE-VH400   Product Line: V   Product Line Description: VALVE   Family Code: 291   Family Description: VH HAND VALVE   Class Code: 21   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number

Part Number Description: BAR HANDLE-VH400   Product Line: V   Product Line Description: VALVE   Family Code: 291   Family Description: VH HAND VALVE   Class Code: 21   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number

Part Number Description: SLIDE RING SPRING (VH400-N04)   Product Line: V   Product Line Description: VALVE   Family Code: 291   Family Description: VH HAND VALVE   Class Code: F1   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number

② For the piping orientation, all side piping or all bottom piping can be selected for VH300 series and VH400 series valves. For VH200 series valves, you can select from all side piping or side piping to the P, A, and B ports with bottom piping to the R port. For VH600 series valves, only side piping to the P, A, and B ports with bottom piping to the R port can be selected.

Part Number Description: O RING FOR VH400-N0   Product Line: V   Product Line Description: VALVE   Family Code: 291   Family Description: VH HAND VALVE   Class Code: 21   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number

Part Number Description: O RING VH400)   Product Line: V   Product Line Description: VALVE   Family Code: 291   Family Description: VH HAND VALVE   Class Code: 21   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number

Table of Contents

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

70pvpump

Since the marked point is below the curve for 50 l/min (ANR), the maximum rate will be about 50 l/min (ANR).

q"s

*r-r-r --r| | | a High-speed | | | response time I I I specifications t t l | | t---{ Pressure display unit | | t--fMfi--l | | f--fkof/cm, l I I [s-f b "t| | I-+-fEr_--] | | tsT kp " ] t l t l I I Cable connector type I S I Straiqht tvpe 3 m I I L I Riqht anqle tvpe 3 m I I j N lWithout cable connector I l L-Bracket Model 7 . l00O tvoe v : 2000 tvoe Pressure [rPa 2 kqf/cm, 3 bar 4 PSI kPa

Precision Regulator

min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 11.5 L/min (ANR) or less Rc 1/4, 3/8, 1/2 Rc 1/8 (2 locations) Rc 1/4, 3/8, 1/2 Port size Pressure gauge port Rc 1/4 Rc 1/4 Rc 1/8 SRP Ambient and fluid temperature Weight (kg) 5 to 60C (No freezing) 0.64 0.71 0.35 0.30 0.14 SRF Note 1) With the condition of no flow on the output side.

IR1000/2000/3000

0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 300 0 100 200 1.0 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa 5 Series IR1000/2000/3000 Series IR2000 Flow rate characteristics Relief characteristics Pressure characteristics Testing methods conform to JIS B8372.

ITV

Flat bracket Dimensions L-bracket Description Part no.

ITV

min (ANR)) Flow rate (l/min (ANR)) Supply pressure (MPa) Series ITV305m Hysteresis Repeatability Linearity 1.0 1.0 0.9 1.0 0.8 Output deviation factor (%F.S.)

F

S H O W T O O R D E R (N)AS3500 L O C K I N G T Y P E D I M E N S I O N S (N)AS3500 AS3500-0214PT AS3500-0338PT T E C H N I C A L SPECIFICATIONS NAS3500-N02 14NPT NAS3500-N03 38NPT 1.5MPa / 220PSI Proof Pressure 1MPa / 145PSI Maximum Operating Pressure 0.5MPa / 8PSI Minimum Operating Pressure 5~60C / 40~140F Ambient and Fluid Temperature 8 Turns Number of Needle Rotations SPEED CONTROLLER

Process Pump <Fluororesin Type> Series PA3000

0.2 0.2 0.3MPa 0.3MPa 0.1 0.1 0.1 0.2MPa 0.2MPa 0.2MPa 00 5 10 00 5 10 00 5 10 15 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) PAP3313-T11: Flow rate characteristics (10Hz)* PAP3310-T11: Air consumption PAP3313-T11: Air consumption 0.4 15 200 Air consumption (l/min [ANR]) Discharge flow rate (l/min) Discharge pressure (MPa) SUP = 0.5MPa SUP = 0.5MPa 0.4MPa 0.3 150 0.4MPa 10 0.4MPa

tTV2000/3000

Note 3) The minimum unit for 1ry205 is l PSl I'relerre# i.rirfilri:: i'fiprafi: How to Order Model Pressure 0 Current WDe 4 to 2OmA Cunent type 0 to 20mA 2 Voltaoe tvpe 0 to SVDC 3 Voltaoe tvoe 0 to 1oVDC connector type S : l Straioht tvDe 3m L Right angle type 3m N Without cable connector d Preset input Monitor output Option (bracket) Thread type Port size 2 114 (2OOO,3000 type) 3 3/8 (2000