Table of Contents C D E F Dimensions Part no.
Fig. 3 Fig. 3-A Fig. 6 ZK2 Combination Manifold Station number indicated on the connector Joint Use caution regarding the direction. Fig. 6 Tapping screw (Tightening torque: 0.32 Nm) Fittings, Replacement Parts, Tools U side Manifold Options Specific Product Precautions D side !
Refer to Fig. 8-6 to mount the plug to the piping of the product.
Temporary piping for DI filter(CH2) Fig. 8-5 Temporary pipe installation for DI filter For CH1 For CH2 Fig. 8-6 Temporary pipe installation for DI filter(For option D1) 6.
Refer to Fig. 8-6 Plug to the piping of the product to mount the plug to the piping of the product. Fig. 8-6 Plug to the piping of the product Connection to the drain (ball valve) When connecting piping to the drain (ball valve), fix the ball valve with a spanner.
OF F Screw Fig. 6-1: Removal of the front panel of the electrical unit 3. Hold the handle and pull up the front panel of the electrical unit, and remove it. Handle Grip View A Fig. 6-2: Removal of the front panel of the electrical unit 6.3 Troubleshooting HRSH Series 6-8 HRX-OM-Q026 Chapter 6 Alarm Notification and Troubleshooting 4. Check if the fan breaker has tripped.
Output Power Current Load Load Current Applicable voltage consumption voltage current leakage load drop D-M9N D-M9NV D-M9NW D-M9NWV NPN DC28V type or less At 10mA DC512 0.8V or 100A or Relay 10mA 40mA less less at PLC 24V or less or less IC circuit D-M9P D-M9PV D-M9PW D-M9PWV DC24V (4.5 to 28V) At 40mA 2V or less PNP type D-M9B D-M9BV D-M9BW D-M9BWV DC24V DC24V 2.5 to 4V 0.8mA or less (DC10
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRL Series 3.3 Installation 3-27 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.
Refer to Fig. (6) (for the meter-out mode). RS Q G RS H A RZQ MI W S CEP1 Fig. (4) CE1 CE2 Fig. (5) Fig. (6)
Hysteresis range: d The range is between the position where the auto switch turns ON as the magnet inside the auto switch unit moves rotationally and the position where the auto switch turns OFF as the magnet moves rotationally in the opposite direction. Fig. 3-1 -9 d 1015 170 20 2030 100 15 40 86 10 -/()()/ -/// d 1015 110 10 2030 90 40 52 8 6 No.
Fig.4 Fig.4 Gasket Fig. 1 Vacuum pump spacer1 (Part no.: ZK2-SS1-A) End plate D assembly Fig.3 U side Fig.3-A Clip 5 Clip 4 3 2 1 D side Assembled unit Square hole Mark tube Fig. 4 (Station number indication) * 1 When adding a vacuum pump system, the vacuum pump spacer for extra station is required separately. o Connector housing assembly K Plug (For One-touch fitting) (Purchasing order
Model A Model A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U C ZPT16 U C 19.5 6.2 8 6 3.3 32 6.5 40 43 18.5 10 12 1.7 12 3 27 21 21 33 7.5 3.8 50 53 6.2 12 5 8 8 6 13 15 1.8 12.5 3.5 27.5 21.5 21.5 16 18 1.2 Deep Deep 1 8 B C D D E Y F: M6 x 1 F: M8 x 1.25 D F: Rc Model A 1 8 D G F: Rc Y B C E D G E D G F: M5 x 0.8 F: M6 x 1 E Model A ZPT40D 40 43 29 6 8 6.2 17 42.5 ZPT10D ZPT16D 10
) Rc1/8 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) 20 29.5 25 6 6 60.5 25 6 6 4 x M5 x 12 59.5 70 F (G) 19 28.5 F (G) 50 Y X Y X 4 x M4 x 10 30 30 E B A D 34 4 E B A D 40 4 Dimensions Dimensions B 65 83 ZP2-TF63HB ZP2-TF80HB Model D 46 58 A 63 80 E 68 85 F 31.5 37 G 91 96.5 X 40.6 46.1 Y 21 27.5 B 103 129 ZP2-TF100HB ZP2-TF125HB Model D 69 89 A 100 125 E
Fig. 6-1 Remove the front panel for the electrical unit 3. Hold the grip and put up the front panel of the electrical unit and remove it. Fig. 6-2 Remove the front panel of the electrical unit 6.3 Troubleshooting HRS Series 6-8 HRX-OM-S004 Chapter 6 Alarm Notification and Troubleshooting 4. Confirm if the thermal relay or the circuit protector are tripped.
D-C7/C80 50 + 45 (n 2) 50 10 15 15 + 45 ( ) n 2 2 D-H7/H7W D-H7NF 60 + 45 (n 2) 60 10 15 (n = 2, 4, 6) 15 + 50 ( ) (n = 2, 4, 6) n 2 2 D-C73C/C80C D-H7C D-B5 D-B64 D-G5NTL 65 10 15 65 + 50 (n 2) 15 + 50 ( ) (n = 2, 4, 6) n 2 2 Precautions 75 10 15 Warning 75 + 55 (n 2) 20 + 50 ( ) (n = 2, 4, 6) n 2 2 D-B59W 75 15 20 1. Do not rotate the cover.
D-C7/C80 50 + 45 (n 2) 50 15 10 15 + 45 ( ) n 2 2 D-H7/H7W D-H7NF 60 + 45 (n 2) 15 60 10 (n = 2, 4, 6) 15 + 50 ( ) (n = 2, 4, 6) n 2 2 D-C73C/C80C D-H7C D-B5 D-B64 D-G5NTL 15 65 10 65 + 50 (n 2) 15 + 50 ( ) (n = 2, 4, 6) n 2 2 Precautions 15 75 10 Warning 75 + 55 (n 2) 20 + 50 ( ) (n = 2, 4, 6) n 2 2 D-B59W 20 75 15 1. Do not rotate the cover.
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.
VXZ VXS EPDM specification With bracket/Special electrical entry direction Electrical entry direction VXB VXD2 3 A to VXD2 6 D VXD2 3 A to VXD2 6 D 90 Symbol Symbol Specifications Symbol VXE Bracket Electrical entry direction Standard 90 180 270 Standard 90 180 270 Standard Nil D A E Nil A B C D E F G IN OUT IN OUT VXP None 180 270 VXR B F C G IN OUT IN OUT With bracket1 VXH VXF 1 Not
(See page 15, Table 8.) < Applicable Auto switches > Solid state auto switch D-M9N(V)-900M9P(V)-900M9B(V)-900 D-M9NW(V)-900M9PW(V)-900M9BW(V)-900 Reed auto switch D-A90-900 Fig 4. How to Mount and Move the Auto Switch Fig 4.