15

FG 25ASize 32: NM2 Size: 63 LEC 4 x FA thread depth FB Motor mounting surface LEC S 2 x FA thread depth FB LEC SS-T LEC Y FD+0.3 +0.1 FD FC Motorless Motorless FC LAT FE FG FF FF FG FC LZ LC3F2 Dimensions [mm] Size Motor type FA FB FC FD FE FF FG M1 T1 M2 T2 PD PP NZ M4 x 0.7 7.5 46 30 3.7 11 42 M2.5 x 10 1.0 M3 x 8 0.63 8 7.5 NY M3 x 0.5 5.5 45 30 5 11 42 M2.5 x 10 1.0 M3 x 8 0.63 8 7.5

VK3000

VK VZ ( ) ( ) VF 2n1Rc1/8 (A,Bport) VFR VP4 VZS VFS ~ = ~ = VS4 VQ7 L Dimension EVS n: Stations n L 1 50 27 2 69 46 3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 VFN L2 Body ported (Top ported) Type 21 Manifold Grommet: G DIN terminal: D VV5K3-21Station

EX120/121/122

0 11 Connector (BUS IN) Dimensions 10.7 55.2 47 106 11.5 56.4 22.1 26 Series EX600 How to Order Digital Input Unit EX600 DX N D Digital Input Unit Input type P N PNP NPN Connector, number of inputs, and open circuit detection Connector Symbol Number of inputs Open circuit detection B C C1 D No No Yes No 8 inputs 8 inputs 8 inputs 16 inputs 4 x M12 (5 pins) 8 x M8 (3 pins) 8 x M8 (3 pins)

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 KE N AS-FG AS-FG AS-FP Note) For applicable tubing O.D. selection, refer to the Model on page 680. Use 1/8" tube.

VS 8-2/VS 8-4

8 Manifold Block Assembly Standard 18 mm and 26 mm sizes mixed MBS8020 01 D M MBS80 0 01 D 2 With/Without tie-rod Size 2 4 Size 18 mm Size 26 mm With/Without tie-rod Cylinder port size 01 01B Side ported 1/8 Bottom ported 1/8 Nil Nil -1 Included None 1 Included None Thread type Wiring specifications D S Double wiring Single wiring Rc NPTF G Note) Nil T F Note) Conforms to ISO1179-1 Thread

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

tubing O.D. d D3 D1 AS-F TMH L4 L3 M ASD AS D2 AS-FE L5 A KE AS-FG AS-FG H T AS-FP L1 L2 AS-FM AS-D Metric Size [mm] AS-T Model d T H D1 D2 D3 L1 L2 L3 L4 L5 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS13l1FG-M5-23A 3.2 ASP 7.2 11.6 19.7 AS13l1FG-U10/32-23A AS13l1FG-M5-04A 4 8.2 17.5 33.8 ASN M5 x 0.8 10/32UNF 8 20.1 AS13l1FG-U10/32-04A AS13l1FG-M5-06A 6 10.4 21.2 20.4

Table of Contents

Applicable tubing O.D. d AK ASS ASR ASF L4 A Note) M1 Weight (g) 4 6 6 8 6 8 8 10 10 12 Applicable tubing O.D. d T L3 L2 H D1 D2 L1 Model Max.

LEC-OM071xx

13 7 8 9 10 11 ON OFF H P-OT 0 1 2 3 4 5 6 Forward Run Prohibited Pn50A.3 7 8 L /P-OT 9 A B C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS

2

6 7 3/8 KQ2T11-00A 15.4 20.4 28.1 15.6 9.9 8 4.2 28.8 23.8 7 10.2 1/2 KQ2T13-00A 19.3 23.4 33 17 11.8 8 4.2 64.6 50.6 9.6 16.9 Q Q 2 x O 2 x N M Q L1 L2 Q D D L1 M L1 M Note) D is maximum diameter.

AS-FG/ASD-FG

Steel Series AS-FG Dimensions/Elbow Type M5 type U10/32 type Metric size Inch size Model d T Weight g H D1 D2 L1 L2 L3 L4 A Model d T Weight g H D1 D2 L1 L2 L3 L4 A Max.

SQ1000/2000

compatible Mitsubishi Electric corporation: CC-LINK System compatible 1 to 8 (16) 1 to 4 (8) S D side 1 to 8 (16) 1 to 4 (8) 1 to 8 (16) Note 1) Separately order the cable assembly for type 20P P kit.

Manifold Specifications

connector (Station n)(Station 1) VQ7 (mm) EVS 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 VFN U D VV4Z1-25FUStation -00C (2 to 10 stations) VV4Z1-25F Station B-00C (2 to 10 stations) VV4Z1-25F Station -00C (11 to 20 stations) U D D side

LEC-OM069xx

13 7 8 9 10 11 ON OFF H P-OT 0 1 2 3 4 5 6 Forward Run Prohibited Pn50A.3 7 8 L /P-OT 9 A B C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS

e

Auto Switch Proper Mounting Position at Stroke End Detection LJ1 LJ1 LG1 LG1 LTF LTF LC1 LC1 LC7 LC7 LC8 LC8 LXF LXF LXP LXP A LXS LXS LC6m LC6m (mm) D-M9, D-M9mV D-M9mW, D-M9mWV (mm) D-A9, D-A9mV LZm LZm Operating range Operating range Nominal size Nominal size A A Model Model E-MY2C E-MY2H E-MY2HT E-MY2C E-MY2H E-MY2HT 4 8 LC3F2 LC3F2 6 16 16 6 10 30 34 Xm Xm 8.5 E-MY2C E-MY2H E-MY2HT E-MY2C

A_HEC-OM-K001

/8 3/4x5/8 1/2x3/8 3/4x5/8 Recirculating fluid (Note 6,7,8) Pure water, Hydrofluoric acid, Ammonia hydrogen peroxide solution etc.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Metric size Inch size ASD 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 23 04 06 08 10 12 3.2 4 6 8 10 12 With One-touch fittings AS Stainless steel specifications (Stainless steel 303) AS-FE KE AS-FG AS-FG Use 1/8" tube. Made to Order AS-FP AS-FM Grease-free (Seal: Fluorine Coated) + Throttle Valve (Without Check Valve) X21 Lubricant: Vaseline X12 AS-D AS-T Ex.)

Table of Contents

/Z80 D-C73C/C80C RS H A 8 10 9 10 10 11 D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65

SY

D side D B M C8 8 One-touch fitting 2 to 16 stations FU1 Fuji Electric Co., Ltd.

Metal Seal/Rubber Seal Series VQ Body Ported

1 2 3 Stations D side U side Blocking indication label 3 m D side U side D-sub connector cable AXT100 DS25030 C8: One-touch fitting for 8 VVQ2000-R-4-C8 Built-in silencer, direct exhaust [-S] Port plug VVQ1000-58A Individual EXH spacer Individual EXH spacer port size CB (SUP) port One-touch fitting for 8 F kit (D-sub connector) Manifold base (8 stations) VV5Q2408FU2D D side U side EXH outlet

SX

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM