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Piping Figure 8 and Table 9 show locations and sizes of piping ports. Ports can be selected from two sides. Plug the ports that are not used. Table 9 Port size Size Port size Size Port size A1, B1 A2, B2 10 M5x0.8 10 20 20 A1 30 Rc1/8 30 50 50 M5x0.8 B2 B1 G1/8 70 70 NPT1/8 100 100 Fig. 8 NPTF1/8 200 200 Rotary table ports and plate have a fixed orifice.

Fig. 8-1 Removal of the dustproof filter HRS Series 8.2 Inspection and Cleaning 8-3 HRX-OM-R005 Chapter 8 Control, Inspection and Cleaning Cleaning of filter Use a long bristled brush or air gun to clean the condenser. Fig. 8-2 Cleaning of filter Mounting of dustproof filter Insert the collar in reverse order of removal, then mount the dustproof filter.

Temporary piping for DI filter(CH2) Fig. 8-5 Temporary pipe installation for DI filter For CH1 For CH2 Fig. 8-6 Temporary pipe installation for DI filter(For option D1) 6.

Minimum Stroke for Auto Switch Mounting (mm) Auto switch Applicable auto switch model No. of auto switches mounted D-Z7, D-Z8 D-Y7W, D-Y7WV D-Y59, D-Y69 D-Y7P, D-Y7PV 5 10 5 10 10 15 1 pc. 2 pcs.

Air-cooled type only For HRSH--40 For HRSH--20-S Fig. 8-20: Positions of danger warning label Fig. 8-21: Positions of danger warning label HRSH Series 8.6 Types of Hazard Labels (HRSH***-**-40-**,HRSH***-**-20-S) 8-21 HRX-OM-Q026 Chapter 8 Documents 8.7 Standards This product complies with the standards shown below: Table 8-8 Standards Standard Model CE Mark EMC Directive Machinery Directive

Documents HRL Series 8-2 HRX-OM-Y098 Chapter 8 Documents 8.2 Dimensions 8.2.1 HRL100-A-20 A Dimensions for the positions of the anchor bolts (View A) Fig. 8-1 Dimensions HRL Series Documents 8-3 HRX-OM-Y098 Chapter 8 Documents 8.2.2 HRL200-A-20 A Dimensions for the positions of the anchor bolts (View A) Fig. 8-2 Dimensions Documents HRL Series 8-4 HRX-OM-Y098 Chapter 8 Documents 8.2.3 HRL300

Fig. 8-13 Positions of danger warning label Fig. 8-14 Positions of danger warning label 8.6 Types of Hazard Labels HRL Series 8-12 HRX-OM-W060 Chapter 8 Documents 8.7 Standards This product complies with the standards shown below.

(See page 15, Table 8.) < Applicable Auto switches > Solid state auto switch D-M9N(V)-900M9P(V)-900M9B(V)-900 D-M9NW(V)-900M9PW(V)-900M9BW(V)-900 Reed auto switch D-A90-900 Fig 4. How to Mount and Move the Auto Switch Fig 4.

(V2) (U2) E C 32 VX2 25 T B VXK G1/2 R VXD VXD A VXZ IN OUT N SMC 8 x 18 VXS VXB F S D Q VXE VXP Conduit C E U 280 VXR VXH 23 B G1/2 VXF R T VX3 A IN OUT N SMC VXA 8 x 18 F S Q D Flat terminal C E U 11 R T B A IN OUT N SMC 8 x 18 S Q D F (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Applicable flange A B C E F N Q R S D T T U U U 84 (92) V T 90 (98) 179.5 (187.5) 92.5

Hysteresis range: d The range is between the position where the auto switch turns ON as the magnet inside the auto switch unit moves rotationally and the position where the auto switch turns OFF as the magnet moves rotationally in the opposite direction. Fig. 3-1 -9 d 1015 170 20 2030 100 15 40 86 10 -/()()/ -/// d 1015 110 10 2030 90 40 52 8 6 No.

diagram (2/2) HRR Series 8.5 Electrical schematic diagram 8-17 HRX-OM-X071 Chapter 8 Control, Inspection, Exchange and Cleaning 8.5.2 HRR050-A*-40-* Fig. 8-7 Electrical schematic diagram 8.5 Electrical schematic diagram HRR Series 8-18 HRX-OM-X071 Chapter 8 Control, Inspection, Exchange and Cleaning 8.5.3 HRR050-W*-40-* Fig. 8-8 Electrical schematic diagram HRR Series 8.5 Electrical schematic

Air cooled type only Fig. 8-10 Positions of danger warning label Fig. 8-11 Positions of danger warning label 8.6 Types of Hazard Labels (HRS -40/46) HRS Series 8-16 HRX-OM-S004 Chapter 8 Documents 8.7 Standards This product complies with the standards shown below: Table 8-7 Standards Standard Model CE Mark EMC Directive 2014/30/EU HRS--40HRS--46Machinery Directive 2006/42/EC NRTL E112803(

Model A Model A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U C ZPT16 U C 19.5 6.2 8 6 3.3 32 6.5 40 43 18.5 10 12 1.7 12 3 27 21 21 33 7.5 3.8 50 53 6.2 12 5 8 8 6 13 15 1.8 12.5 3.5 27.5 21.5 21.5 16 18 1.2 Deep Deep 1 8 B C D D E Y F: M6 x 1 F: M8 x 1.25 D F: Rc Model A 1 8 D G F: Rc Y B C E D G E D G F: M5 x 0.8 F: M6 x 1 E Model A ZPT40D 40 43 29 6 8 6.2 17 42.5 ZPT10D ZPT16D 10

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

Applicable Pad List 8 8 8 8 8 8 8 8 Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Lateral A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 ZP3-Y015U:J3-B3 ZP3-Y015U:J6-B3 ZP3-Y015U:

D-Y7P/Y7PV D-Y7W D-Y7WV D-G5W D-K59W D-G59F D-G5 D-K59 D-G5NTL Auto switch model D-F5 D-J5 D-F5W D-J59W D-F59F D-A5, D-A6 D-A3/A3C D-A44/A44C D-G39/G39C D-K39/K39C D-A59W D-F5NTL D-B5/B64 Bore size (mm) A A A A A A A B B B B B B B 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 3.5 (6.5) 3.5 (6.5) 5.5 (9) 8.5 (12.5) 10.5 (14) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 (11.5)

D-Y7P/Y7PV D-Y7W D-Y7WV D-G5W D-K59W D-G59F D-G5 D-K59 D-G5NTL Auto switch model D-F5 D-J5 D-F5W D-J59W D-F59F D-A5, D-A6 D-A3/A3C D-A44/A44C D-G39/G39C D-K39/K39C D-A59W D-F5NTL D-B5/B64 Bore size (mm) A A A A A A A B B B B B B B 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 3.5 (6.5) 3.5 (6.5) 5.5 (9) 8.5 (12.5) 10.5 (14) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 (11.5)

Applicable bore size B (C) (D) d H NT-02 20 13 (15.0) 12.5 M8 x 1.25 5 NT-03 25, 32 17 (19.6) 16.5 M10 x 1.25 6 NT-04 40 22 (25.4) 21.0 M14 x 1.5 8 Part no.

Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: Double, Status at Power Off: Self-Retaining, Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: -, Port Size: -, Pressure Rating(MPa): 0.15~1, Driving Type

Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: Double, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 3-Position Closed Center, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: -, Port Size: -, Pressure Rating(MPa):