Valve Single Unit

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

SYJ300/500/700

V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC With light/surge voltage suppressor With surge voltage suppressor (Non-polar type) DOZ is not available.

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Modular Design with Uniform Body Style

V V V V + Nil Polycarbonate bowl V V V V V 2 Metal bowl V V V V V 6 Nylon bowl V V V V V c Bowl*5 8 Metal bowl with level gauge V V V V C With bowl guard V *6 *6 *6 *6 6C With bowl guard (Nylon bowl) V *7 *7 *7 *7 + d Indicator Nil Without indicator V V V V V Semi-standard L With element service indicator*14 V V V*12 V V + t e Drain port*8 Nil With drain cock V V V V V J*9 Drain guide 1

EXxx-OMO0027

USINT 2 80x9:01 Channel 0 / User set lower limit value UINT 0 to 65535 80x9:02 Channel 1 / User set lower limit value 80xA:0 Slot x: Filter USINT 2 0=None 1=2 value average 2=4 value average 3=8 value average 80xA:01 Channel 0 / Analogue average filter Enum0803 80xA:02 Channel 1 / Analogue average filter 80xB:0 Slot x: Range USINT 2 0=-10+10 V 1=-5+5 V 2=-20+20 mA 3=010 V 4=05 V 5=15 V 6

Modular F.R.L. Unit

N.C. 0.2MPa Note 2) AD38 AD38NNote 6) AD38 AD38NNote 6) AD48 AD48NNote 6) AD48 AD48NNote 6) Note 3) AD37 AD37NNote 6) AD37 AD37NNote 6) AD47 AD47NNote 6) AD47 AD47NNote 6) Float type auto drain Y300 IS1000M-30 Y300 IS1000M-30 Y400 IS1000M-40 Y500 IS1000M-50 Spacer Pressure switch Note 5) Note 4) Note 5) 01 (02) Y310(01) 02 Y510(02) 03 Y310(01) 02 Y410(02) 03 T-interface Y210Note 5) 02 03

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ1000 VQZ2000 VQZ3000 Port size One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 M5 thread Rc(PT)1/8 Rc(PT)1/4 Mixture of port sizes Symbol C3 C4 C6 C8 C10 M5 01 02 CM v v v v v v Kit v v v C Connector v v v v (1) v v Note 1) When ordering port mixture and/or with port plug, suffix it in manifold specifications

Fieldbus system EtherCAT compatible SI Unit

Analogue input unit (EX600-AX#) (continued) Index Name (Meaning) Type Value 40xA:0 Range UNSIGNED8 Number of Channels 0=-10+10 V 1=-5+5 V 2=-20+20 mA 3= 010 V 4= 05 V 5= 15 V 6= 020 mA 7= 420 mA Enum080D (AXA) 40xA:01 40xA:02 Channel 0 Channel 1 (Analogue range) 3= 010 V 4= 05 V 5= 15 V 6= 020 mA 7= 420 mA Enum080E (AXB) 1: x = Unit No.

/

-02 VXE2230-02 VXE2330-02 VXE2240-02 VXE2340-02 VXE2250-02 VXE2350-02 VXE2260-02 VXE2360-02 VXE2220-03 VXE2320-03 VXE2230-03 VXE2330-03 VXE2240-03 VXE2340-03 VXE2250-03 VXE2350-03 VXE2260-03 VXE2360-03 VXE2260-04 VXE2360-04 1/8 (6A) 300 0.33 7.9 470 620 300 470 620 470 620 560 700 560 700 470 620 470 620 470 620 560 700 560 700 560 700 3 3.0 0.61 15.0 4.5 1/4 (8A) 1.10 6 26.0 1.60 8 38.0

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

For lead wire length 2000 mm VFR2210-5MO-02 3 pcs. DXT170-80-4A-20 6 pcs. Nil Sockets (2 pcs.) only Without lead wire For 100 VAC For 200 V AC Other VAC Nil 6 10 15 20 25 30 300 600 1 2 3 Blue (2 pcs.) Red (2 pcs.)

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Symbol 02 Stations 2 stations Note Double wiring Note 1) A, B port size (Metric) 09 02 9 stations 2 stations P, E port Applicable series Specifications Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M Specified layout Note 2) 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch fitting 8 One-touch

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Thread Manifold series Stations Rc (PT) 02 2 stations 3 SY3000 5 SY5000 G (PF) NPTF N NPT T ... ... 20 stations 20 7 SY7000 F A/B port size Symbol Port size 1/8 Applicable series 01 4 One-touch fitting C4 SY3000 6 One-touch fitting C6 1/4 02 6 One-touch fitting C6 8 One-touch fitting C8 SY5000 1/4 02 SY7000 10 One-touch fitting C10 Protective class class I (Mark: ).

Secondary Batteries

*Order part numbers for auto switches alone are D-M9BW(V)L-900, D-M9BW(V)SDPC-900, D-Y7BW(V)L-900, D-Y7BW(V)SDPC-900 and D-Z80L-900. *The auto switch is shipped together but not assembled.

reduces flow setting time

Model AS1ll1FS-M5l AS2ll1FS-01 AS2ll1FS-02 AS3ll1FS AS4ll1FS Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

(Example) 10-SYJ3120-5M-M3 VJ3000-13-1 DC AC (50/60 Hz) CE-compliant CE-compliant 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type W, only DC voltage is available. Note) CE-compliant: For DC only.

Series SV

M12 52 l M12 M12 48 6 6 32.3 28.3 16 M12 31.3 31.3 l 14.9 Terminal no.

Modular F.R.L. Units

Outlet pressure MPa Existing model New Conditions AR20-02-A AR20-02-A AR20-02 New New 0.3 Inlet pressure: 0.5 MPa Outlet pressure: 0.3 MPa Flow rate: 500 L/min (ANR) New New AR20-02-A AR20-02 500 Flow rate L/min (ANR) Replacement in hand!

Modular/F.R.L. Units Series AC

AD48 AD47 AD38 AD37 Y300 AKM3000-(01) 02 IS1000M-30 Y310-(01) 02 Float type auto drain Y400 AKM4000-(02) 03 IS1000M-40 Y410-(02) 03 02 VHS40-03 04 02 E400-03 04 06 02 IS1000E-4003 04 06 Y44-02 03 Y500 Y600 Spacer Check valve Note 6) Note 7) Pressure switch Note 7) IS1000M-60 IS1000M-50 Y510-(02) 03 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 VHS50-06 10 VHS20-01 02 VHS30

CG5-S

(mm) 4 Connection threads Model -01 R 1/8 -02 R 1/4 KGD06-M5 M5 x 0.8 KGLU04-M5 M5 x 0.8 -01 R 1/8 4 -01 R 1/8 6 -02 R 1/4 -02 R 1/4 -03 R 3/8 KGLU06-M5 M5 x 0.8 KGD08-01 R 1/8 -01 R 1/8 6 8 -02 R 1/4 -02 R 1/4 -03 R 3/8 -03 R 3/8 KGD10-02 R 1/4 KGLU08-01 R 1/8 10 -03 R 3/8 -02 R 1/4 8 -04 R 1/2 -03 R 3/8 KGD12-02 R 1/4 KGLU10-02 R 1/4 -03 12 10 R 3/8 -03 R 3/