LEC-OM02904

(10V/10pulse) CCW CCW 10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] 10[V] 10[V] CW CW A (124) (10V/1Mpulse) B (124) (10V/10Mpulse) CCW CCW 10[V] 10[V] 1M[pulse] 10M[pulse] 0 0 1M[pulse] 10M[pulse] 10[V] 10[V] CW CW 5 25 5 C (124) (10V/100Mpulse) D (3) CCW 10[V] 8[V] 100M[pulse] 0 100M[pulse] 400[V] 0 10[V] CW E 2(45) CCW 8[V] 0 8[V] CW 1. 2. () 3. 400V8V/800V 4. 5.

AS

Metric size Inch size 3.2 01 03 05 07 09 11 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 23 04 06 08 10 Control type 4 0 1 Meter-out Meter-in 6 8 10 Use 1/8" tube.

Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

AC Servo Motor Driver (CC-Link Type ）

OPERATION 5 1 to 5 -60 5.1 Switching power on for the first time . 5 2 5.1.1 Startup procedure . 5 2 5.1.2 Wiring check . 5 3 5.1.3 Surrounding environment . 5 4 5.2 Startup . 5 5 5.2.1 Power on and off procedures . 5 5 5.2.2 Stop . 5 5 5.2.3 Test operation. 5 6 5.2.4 Parameter setting . 5 7 5.2.5 Point table setting . 5 8 5.2.6 Actual operation . 5 8 5.3 Driver display . 5 9 5.4 Automatic

AC Servo Motor Driver (CC-Link Type ）

OPERATION 5 1 to 5 -60 5.1 Switching power on for the first time . 5 2 5.1.1 Startup procedure . 5 2 5.1.2 Wiring check . 5 3 5.1.3 Surrounding environment . 5 4 5.2 Startup . 5 5 5.2.1 Power on and off procedures . 5 5 5.2.2 Stop . 5 5 5.2.3 Test operation. 5 6 5.2.4 Parameter setting . 5 7 5.2.5 Point table setting . 5 8 5.2.6 Actual operation . 5 8 5.3 Driver display . 5 9 5.4 Automatic

7ND9071en

and Profibus PA Certificate Approval Electrical values ATEX ND_X VTT 09 ATEX 033X VTT 09 ATEX 034X Ui 24 V, Ii 380 mA, Pi 5.32 W, Ci 5 nF, Li 10 H.

EXxx-OMS0026CN

Enable 1 Disable -10..10 V -5..5 V -20..20 mA 0..10 V 2 -10..10 V 0..5 V 1..5 V 0..20 mA 4..20 mA Offset binary 3 PLC Sign & Magnitude 2s complement 2 None 2AVG 2 4 4AVG 4 8AVG 8 Enable 0.5 5 Disable Enable 0.5 6 Disable Enable 7 Disable Enable 8 Disable 1 -49No.EX-OMS0026CN -10..+10 V -10.50+10.45 V -10.45+10.50 V -5..+5 V -5.25+5.22 V -5.22+5.25 V -20..+20 mA

EXxx-OMN0029CN

TM(DeviceNet TM2) -48No.EX-OMN0029CN-D (Range) (Lwr_Lmt) (Upr_Lmt) -10..10 V -10.50+10.45 V -10.45+10.50 V -5..5 V -5.25+5.22 V -5.22+5.25 V -20..20 mA -21.00+20.90 mA -20.90+21.00 mA 0..10 V 0.00+10.45 V +0.05+10.50 V 0..5 V 0.00+5.22 V +0.03+5.25 V 1..5 V +0.75+5.22 V +0.78+5.25 V 0..20 mA 0.00+20.90 mA +0.10+21.00 mA 4..20 mA +3.00+20.90 mA +3.10+21.00 mA -49No.EX-OMN0029CN-D (1) No.

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

KQ2

(inch) Mass (g) Applicable tubing D1 L M Model KQ2C03-00 KQ2C07-00 KQ2C09-00 KQ2C11-00 5 32 1 4 5 16 3 8 17 18 1 2 3 6 10.4 13.2 15.2 17.9 16 17 18.5 21 20.5 22.5 Plug: KQ2P, KQP Applicable fitting size d (inch) Mass (g) D L A Model Note) KQ2P-01 KQ2P-03 KQ2P-05 KQ2P-07 KQ2P-09 KQ2P-11 KQ2P-13 KQP-01 KQP-03 KQP-05 KQP-07 KQP-09 KQP-11 KQP-13 1 8 5 32 3 16 1 4 5 16 3 8 1 2 1 1 1 1 2 3.5 5

LEC-OM071xx

Positioning completed n.09 Speed feedforward 1 V/1000 min-1 n.0A Torque feedforward 1 V/100% rated torque n.0B Active gain *1 1st gain: 1 V 2nd gain: 2 V Gain type indicated by output voltage. n.0C Completion of position reference Completed: 5 V Not completed: 0 V Completion indicated by output voltage. n.0D External encoder speed 1 V/1000 min-1 Value at motor shaft 1.

AC Servo Motor Driver

0 Max. torque Max. torque 0 CCW direction 4 Current command 5 Command pulse frequency 10[V] CCW direction 8[V] Max. current command (Max. torque command) 1M[kpps] 0 0 1M[kpps] Max. current command (Max. torque command) -8[V] CW direction -10[V] CW direction 5 44 5.

JXCx-OMT0062

Red 4 Lock B-1 Black 5 Lock A-1 Brown 1 Sensor B-3 Blue 2 Sensor A-3 Electric Actuator side Controller side 11 - (5) Communication plug connector -5 4 Correspondence network Type 3 2 CC-Link MJ Straight type S 1 T T-Branched Straight type type 5 No.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

0 Max. torque Max. torque 0 CCW direction 4 Current command 5 Speed command 8[V] CCW direction 8[V] Max. current command (Max. torque command) Max. speed 0 0 Max. speed Max. current command (Max. torque command) -8[V] CW direction -8[V] CW direction 5 23 5.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

12 V 100 V 200 V 110 V 220 V Part no.

Compact Manifold Regulator Series ARM5

ARM Fitting size 18.5 C4 C6 N3 N7 4 6 5/32 1/4 ARP 8.5 14 IR IRV Straight type VEX1 SRH SRP V SRF ARX20 Elbow type VCHR ITV IC W X PVQ Y VEF VEP VER One-touch fittings for regulator VEA Fitting size Straight V Elbow W Elbow X Elbow Y VY2 4, 5/32 2.5 6 11 35.5 6 3 6.5 11 36 VBA VBAT 1/4 6.5 6 11.5 38.5 8, 5/16 AP100 Note) The O-ring is attached.

CNG

Connector Grommet Diagnostic indication (2-color indication) 12 V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector Relay, PLC 24 V 3-wire (PNP) 3-wire (NPN) IC circuit Yes 5 V, 12 V Diagnostic indication (2-color indication) Grommet 2-wire 12 V Water resistant (2-color indication) 4-wire (NPN) 5 V, 12 V IC circuit With diagnostic output (2-color indication

E-P HYREG ® Series VY1

) 0.6 0.6 0.6 0.4 0.4 0.4 0.2 0.2 0.2 VY130-5 VY140-5 VY150-5 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 V V V VY130-6 VY140-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2 2 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15 20 3 3 3 mA mA mA Command signal Command signal Command signal

13

Vacuum pressure Suction flow rate 13-5-5 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS-