HRX-OM-S004

. 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main Display . 5-7 5.3.1 Main Display . 5-7 5.3.2 Items on the main display . 5-7 5.4 Alarm Menu . 5-8 5.4.1 Alarm menu . 5-8 5.4.2 Items shown on the alarm menu display . 5-8 5.5 Check monitor menu . 5-9 5.5.1 Check monitor menu . 5-9 5.5.2 Checking with the Inspection monitor menu . 5-9 5.6 Key-lock .

Table of Contents

-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 19 47 57.5 17 10 19 47 57.5 10 24 50 69.3 12 24 50 69.3 12 Rc Rc3 8 Rc1 2 Rc1 2 17 22 22 13-5-8 9 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Example of Application Circuit Caution Handling of application circuits 1.

Table of Contents

2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

Battery-less

Operating temperature range [C] 5 to 50 Operating humidity range [%RH] 90 or less (No condensation) Weight [g] 350 (Except cable) I/O cable Controller side PLC side (Terminal no.) LEC CN5 1 (8.9) B1 A1 A1 Cable length (L) [m] (22.4) A13 1 1.5 3 3 5 5 B1 (14.4) L B13 B13 A13 Connector pin no.

Table of Contents

Applicable tubing size ASF 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 Can be mounted on the panel.

CM2

NT-02 NT-03 NT-04 13 5 15.0 12.5 M8 x 1.25 17 6 19.6 16.5 M10 x 1.25 22 8 25.4 21.0 M14 x 1.5 Mounting Nut Applicable pin part no. Part no.

Air Cylinder

D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) CM2 CM3 D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) CG1 CG1 D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) CG3 D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) JMB D-C7 D-C80 5 15

Series SV

Cable core wire colors 7 1 8 3 2 8 7 1 8 1 7 3 2 8 2 3 2 3 1 7 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 4 5 6 6 5 4 4 5 6 6 5 4 Connections Connections Socket connector pin arrangement Plug connector pin arrangement Socket connector pin arrangement Plug connector pin arrangement

CL

5 !6 !7 !8 !

ASR

6 ASR530F-02 type ASR630F-03 type ASR530F-02 type ASR630F-03 type !8 u o !3 !8 u o !3 !7 !7 !9 !9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

CL

5 !6 !7 !8 !

CL

(#1+#5+#11) CLAC50SCLA50, #5 (#1+#5+#11) CLAC63SCLA63, #5 (#1+#5+#11) CLAC80SCLA80, #5 (#1+#5+#11) CLAC100SCLA100, #5 (#1+#5+#11) 3.1-40 Fine Lock Cylinder/Double Acting Single Rod Series CLA Double Clevis/CLAD CL MLGC CNA CB CV/MVG (mm) Stroke range (mm) Bore (mm) B B1 BN CX BP A BQ C GB CD GC CZ GD D GL E GR F H1 GA AL CXW W/o rod boot W/ rod boot +0.3 +0.1 40 50 63 80 100 60 70 86 102

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Series ANB1 38 dB (A) 30 m Page 5-10-9 Exhaust cleaner Ensures clean plant air, reduces noise pollution by over 35 dB (A), and removes over 99.9% of all oil mist. 99.9% Series AMC Page 5-10-11 35 dB (A) 0.3 m Page 5-10-13 Precautions/Specific Product Precautions Exhaust Cleaner for Vaccum (Series AMV) Exhaust Cleaner for Clean Room (Series AMP) Page 5-10-15 Related Products 5-10-1 2 Silencer

CG5-S

Applicable bore size (mm) C B1 d H1 JM-025-SUS 20 12.4 11.0 1/4 -28 4.0 JM-03-SUS 25 14.2 12.6 5/16 -24 4.8 JM-045-SUS 32, 40 19.6 17.3 7/16 -20 6.4 JM-05-SUS 50, 63 21.4 18.8 1/2 -20 7.9 JM-08-SUS 80 27.4 23.9 5/8 -18 9.7 JM-10-SUS 100 33 28.7 3/4-16 10.7 14 Series CJ5-S/CG5-S Auto Switch Specifications Auto Switch Common Specifications Lead Wire Length The standard lead wire length for

CY1F

115.5 D-F9, D-F9V (mm) Mounting patternq Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 B1 A1 Operating range B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 Mounting patternw B2 A2 D-F9W, D-F9WV (mm) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 Operating range B1 B2 B3 (mm) 10 15 25

HRX-OM-Q026

Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main Display . 5-7 5.3.1 Main display . 5-7 5.3.2 Items on the main display . 5-7 5.4 Alarm Menu . 5-8 5.4.1 Alarm menu . 5-8 5.4.2 Items shown on the alarm menu display . 5-8 5.5 Check Monitor Menu . 5-9 5.5.1 Check monitor menu . 5-9

CM2

CM2G20SCM220A, #11 SCM220A, #11, #5 SCM220A, #11, #5, #19 CM2G25SCM225A, #11 SCM225A, #11, #5 SCM225A, #11, #5, #19 CM2G32SCM232A, #11 SCM232A, #11, #5 SCM232A, #11, #5, #19 CM2G40SCM240A, #11 SCM240A, #11, #5 SCM240A, #11, #5, #19 1.4-42 Series CM2 Single Clevis (C) CM2C Bore size Stroke S T (mm) N P Bore U E CD I RR A NA CI K AL NN CX L B1 D MM F G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1

CNG

For details, refer to page 9-15-66. 9-5-22

CG1

5 !6 !7 !8 !

Cylinder with Lock Series CNG

Applicable bore size (mm) B1 C D d H1 Applicable bore size (mm) Part No.