2/3 Port Valve

Thread T F N Orifice size 2 3 4 5 6 Rc(PT) NPTF G(PF) NPT 3mm 4.5mm 6mm 8mm 10mm Refer to table q for configuration. Port size 01 02 03 04 1 8 1 4 Valve/Body 0 2 Normally closed (N.C.)/single unit Normally open (N.O)/single unit 3 8 1 2 Refer to table q for configuration.

A

17 14.5 5 28 5 14 6 12 6h9 -0.03-0 3 Part No P Q R SA SB SC TB UA UB VA VB WA MHS3-16D M3x0.5 6 25 3.4 6.5 8 5 M3x0.5 4.5 2H9 0~0.025 2 17H9 0~0.043 MHS3-20D M5x0.8 7 29 3.4 6.5 9.5 6 M3x0.5 6 2H9 0~0.025 2 21H9 0~0.052 MHS3-25D M5x0.8 8 34 4.5 8 10 6 M4x0.7 6 3H9 0~0.025 3 26H9 0~0.052 Part No XA XB MHS3-16D 2H9 0~0.025 2 MHS3-20D 2H9 0~0.025 2 MHS3-25D 3H9 0~0.025 3 (mm) Courtesy of Steven

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

SY3000-54-2C(-Q) SY3000-54-1C(-Q) SY5000-54-1C(-Q) SY7000-54-1C(-Q) Assembly part no.

KJ

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

42

Valve + Interface regulator (ARBQ5000-00 A B C -1 5) q AXT632-25-6 (M4 x 114) 4 w AXT632-66-1 (M4 x 64) 2 Not necessary when mounting the sub-plate. q AXT632-25-4 (M4 x 50) 4 q w Blanking plate Blanking plate (Top) + SUP stop valve (Bottom) For manifold Spacer w AXT632-25-10 (M4 x 34) 2 + Individual EXH (Bottom) (Top) Valve + Individual SUP (Top) (Bottom) q AXT632-25-6 (M4 x 114) 4 For manifold

SY

Specification Standard/Internal pilot Internal pilot/Built-in silencer Symbol Nil Applicable tube size SY5000 SY3000 4 4 4 6 6 4 6 6 8 4 8 Mixed 6 Mounting position Applicable stations Symbol U Symbol The type of lead wire assemblies included is different.

VFR

0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly !0 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

VFS

03 04 q Description No.

Modular F.R.L. Unit

) T-interface Note 6) (02) 02 02 03 03 (04) 04 Y61004 02 VHS40-06 02 04 VHS50-(10) pressure release 02 02 06 3-port valve for residual Note 6) 03 VHS2001 VHS3003 VHS3003 VHS4002 03 01 02 02 06 06 06 Piping adapter Note 6) E200-02 E30003 E300-03 E40004 E500-06 E600-10 E60010 E60010 E100-M5 03 04 04 06 02 01 02 02 Pressure switch Note 6) 03 IS1000E-20 02 IS1000E-3003 IS1000E-3003 IS1000E

Air Fittings & Tubing

N FA FB L1 L3 L4 L5 L6 P Q1 Q2 MA MB L2 65 40 61.5 47 73 55 86 19 26 29 39 41 57 KM11-04-08-6 6 10 18 29.5 19.5 27 12 16 18.5 6 10.6 8 4 KM11-04-08-10 10 86 KM11-06-10-6 6 76 KM11-06-10-10 10 102 10 19.5 31.5 21.5 31 13.5 17 21 7.5 13 10 6 KM11-08-12-6 6 85 KM11-08-12-10 10 116 11.5 22.5 35.5 24 34.5 14.7 18.5 22 9 15.5 12 8 SKM, #1 to #6 KM12 Thread Rc(PT) T Part No. N H (Hex.)

Modular Design with Uniform Body Style

Example) AL30-03B-3RW-D q w e r t q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Rc V V V V V N NPT V V V V V F G V V V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V V 10 1 V V e Port size + r Option (Mounting) Nil Without mounting option V V V V V B*1 With bracket V V V V V + Nil Polycarbonate bowl V V V V V 2 Metal bowl V V V V V 6 Nylon

smcmaintenancepartslist

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Proposals for Energy Saving

3.5 4 6 4 6 4 6 4 4 6 6 6 8 8 10 10 10 10 10 12 12 12 16 16 20 20 10 10 12 12 12 14 14 14 14 14 14 14 17 17 17 22 22 26 26 10 10 12 12 12 14 14 17 17 17 17 17 19 19 19 24 24 27 27 27 27.7 30.1 30.8 31.5 33.8 34.6 35.6 36.3 37.1 29.5 27.7 40.4 41.3 31.2 40.1 38.4 45.6 43.9 15 15 16 16 16 16 16 17 17 17 17 17 17 17 17 17 17 17 17 KN-04-100 KN-04-150 KN-06-100 KN-06-

V100

r e w q r e w q VG VP S070 VQ VKF N.C.

Table of Contents

5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

SYJ7000-22-1(-Q) SYJ7000-22-2(-Q) V111(T)No. 1 2 3 4 5 6 Aluminum die-casted 1/8 1/4 Body Piston plate End cover Piston Spool valve assembly Spool spring Sub-plate Note) 7 8 Pilot valve Note) Add suffix -Q for the CE-compliant product.

ZP

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08

Modular F.R.L. Unit

-20 IS1000M-30 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS40-06 02 03 04 E600VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) 06 10 06 10 E60006 10 E600E100-M5 02 03 04

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

F

-08-6 6 65 40 22 4 8 10 18 29.5 19.5 27 10.6 12 16 18.5 6 KM11-04-08-10 10 86 61.5 30 KM11-06-10-6 6 76 47 32 6 10 10 19.5 31.5 21.5 31 13 13.5 17 21 7.5 KM11-06-10-10 10 102 73 44 KM11-08-12-6 6 85 55 44 8 12 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 22 9 KM11-08-12-10 10 116 86 62 L5 FB N L1 L2 L3 L4 L6 P Q1 Q2 MA MB FA B Port Min Weight Model Inside Dia (g) (Inch Size) 19.5 6 10.6 5/16 65