M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 1 2 Flow characteristics 2 3 V100 Valve model C[dm3/(sbar)] 0.037 0.076 0.054 0.099 C[dm3/(sbar)] 0.054 0.099 0.037 0.076 b 0.11 0.070 0.35 0.23 b 0.35 0.23 0.11 0.070 Cv 0.0080 0.016 0.015 0.024
90 elbow M5 female x M5 female Material: Nylon66 GF30% M-5L M-5GH 6/4 x R M-01H-6 P. 56 1 8 P. 59 P. 58 Gaskets are prepared for other items than the above, too.
<M5, M6> <M5, M6> Weight (g) H (Hex.) Part No.
8.5 13 3 M5 x 0.8 Hose Elbow: M-5HLH-4/-6 Weight (g) Effective area (mm2) 1.4 4.5 6.6 2.4 Width across flats 7 Model A B C D E F G H I M M 12 13.5 8.5 9.5 7 8 1.8 2.5 6.5 8.5 5.5 6 15 16 7 8 5 6 15.5 17.5 M-5HLH-4 M-5HLH-6 M5 x 0.8 Elbow: M-5L Tee: M-5T M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Weight: 3.5 g Weight: 4.2 g Universal Elbow: M-5UL Universal Tee: M-5UT Width across flats
for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector
M5 female -M5 female M-5L M-5GH M-01H-6 P. 90 6/4 P. 93 P. 92 89 Series M Miniature Fittings M3, R(PT) 1/8, M5 Series M3 Barb fitting for soft tube: M-3AU-3 Barb fitting for soft tube: M-3AU-4 Effective orifice: 0.9mm 2 Weight: 0.7g Effective orifice: 0.9mm 2 Weight: 0.6g Barb elbow for soft tube: M-ALU-4 Barb elbow for soft tube: M-3ALU-3 Effective orifice: 0.6mm 2 Weight: 0.8g Effective
) P=10.5 13.5 (L3) 3 L2 6 .5 L1 2 1 16 .5 Station 5.5 D side 2.3 2-M5 X 0.8 External pilot port (Only external pilot style(R)) 7.8(C3, C4, C6) 21.6 (M5: 5.7) 35 5.5 53 300 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 (Top piping) 39.5 7.8 42.5 P R 1 3 15 8 2-M5 X 0.8 PE port 13.4 2-Rc(PT)1/8 R(EXH) port 16.3 The broken line indicates DIN rail mounted style [-D]. 41.2 2-Rc(PT)1/8 P(SUP)
/min 5l/pulse Accumulated pulse flow rate exchange value (Pluse width: 50ms) l/min, CFM x 10-2 l/min, CFM x 10-1 Real-time flow rate Accumulated flow Display units Note 1, 2) l, ft3 x 10-1 Operating fluid temperature Linearity Repeatability Temperature characteristics Current consumption (No load) Weight Note 3) Port size (Rc, NPT, G) Detection type Indicator light Operating pressure range
To be arranged by the user. 6.3 Option L [Large capacity tank] 6.3.1 Option L [Large capacity tank] Large capacity tank provide you extra space volume for fluid collection of approximately 5L above high level.
Mounting with brackets Mount a bracket to the using two M3 x 5L mounting screws and install on piping with a hexagon socket cap screws. The switch can be installed horizontally depending on the installation location. Mounting screw M3 x 5L Atmospheric release port To a safe place with no water or dust The tightening torque for bracket mounting screw should be 0.98Nm or less.
Mounting with brackets Mount a bracket to the using two M3 x 5L mounting screws and install on piping with a hexagon socket cap screws. The switch can be installed horizontally depending on the installation location. Mounting screw M3 x 5L Atmospheric release port To a safe place with no water or dust The tightening torque for bracket mounting screw should be 0.98 Nm or less.
x 0.8 73 87 87 102.5 M5 x 0.8 depth 7.5 M6 x 1 depth 12 7 8 9 9 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37 38.5 43 2.5 0 0 6 5 5.5 7 8 36 40 45 53 6 7 8 11 54 68 86 104 26 42 54 64 5 to 300 5 to 300 5 to 300 5 to 300 MLUB25 MLUB32 MLUB40 MLUB50 Rc, NPT, 1/8 Rc, NPT, 1/8 M8 x 1.25 depth 13 M8 x 1.25 depth 11 Rc, NPT, 1
x 0.8 73 87 87 102.5 M5 x 0.8 depth 7.5 M6 x 1 depth 12 7 8 9 9 54 68 86 104 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37 38.5 43 2.5 0 0 6 5 5.5 7 8 36 40 45 53 6 7 8 11 26 42 54 64 5 to 300 5 to 300 5 to 300 5 to 300 Rc, NPT, 1/8 Rc, NPT, 1/8 M8 x 1.25 depth 13 M8 x 1.25 depth 11 Rc, NPT, 1/8 M10 x 1.5 depth 14.5 M10
x 0.8 73 87 87 102.5 M5 x 0.8 depth 7.5 M6 x 1 depth 12 7 8 9 9 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37 38.5 43 2.5 0 0 6 5 5.5 7 8 36 40 45 53 6 7 8 11 54 68 86 104 26 42 54 64 5 to 300 5 to 300 5 to 300 5 to 300 Rc, NPT, 1/8 Rc, NPT, 1/8 M8 x 1.25 depth 13 M8 x 1.25 depth 11 Rc, NPT, 1/8 M10 x 1.5 depth 15 M10 x
Sensors (R) (P) 7.4 3 (13) M plug connector (M) L plug connector: 10-VQD1151-L-M5 M plug connector: 10-VQD1151-M-M5 5 5 5.5 2(B) 4(A) Direct manual override Lead wire length 300 mm 27 Indicator light 17.6 11.2 3 3(R) 9 0.3 3.8 10.9 3.5 5.5 9.1 2 x mounting hole 33.5 28.5 37 38 1(P) 1(P) 5.5 12 4-M5 x 0.8 13 L plug connector (L) (P, A, B, R port) 49 50.5 M plug connector (M) 598 4 Port Direct
(The SI unit type is provided for use in Japan.) *4 Fixed unit: Instantaneous flow: L/min Accumulated flow: L XY 2 outputs (NPN/PNP switching type) + Copy function Sensor connector C *1 Can switch between 1 to 5 V and 0 to 10 V *2 Can be switched to external input or copy function Option 1 Option 2 Symbol Description Nil Without lead wire Symbol Description Nil None ZS-46-5L ZS-46-A1 A1
F G H [Tightening torque] No.LZ-OM00401 B (1/3) Electric Cylinder LZC series L[]ZC[]3[] 1.5 8 M4 x 0.7 x 6 deep [0.75Nm ] L[]ZC[]5[] 3 13 M5 x 0.8 x 8 deep [1.5Nm ] L[]ZC[]3[] M4 screw 0.75Nm M4 screw 0.75Nm L[]ZC[]3[] 4.5 8 2 7.5 11.5 12 L[]ZC[]5[] 6.5 13 3.2 10.7 16.7 15 L[]ZC[]5[] M5 screw 1.5Nm M6 screw 2.6Nm Model no.
Body: 5 (Base Mounted), Valve Option: Standard, Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Connector, w/Lead Wire)