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/min (ANR) (Supply pressure: 0.6MPa) 6l/min (ANR) (Supply pressure: 0.6MPa) Maximum flow rate 24VDC 10%, 12 to 15VDC Voltage Current consumption Power supply Power supply voltage 24VDC type: 0.12A or less Power supply voltage 12 to 15VDC type: 0.18A or less Voltage type 0 to 5VDC, 0 to 10VDC Input signal Current type 4 to 20mADC, 0 to 20mADC Voltage type Approx. 10k Input impedance Current

T 4 6 3 l b s ( 2 1 k 9 ) P T 0 216 in (5 5mm) O T 0 039 in (1mm) T T 0 256 in (6 5mm) 0 216 in. (5 5mm) 0 039 in (1mm) .75 PSIG (5 Kg7cm2) A B c D E F G H J K A B c D E F G H J 2.81 171 5) 1.95 i4e.5) 0.96 '24.5\o.87 t22l 0.06 (1.5) 0.12 (3) 1 . 5 7 (40) 0.96 (24.5) 1.20 :30.5) 0.24 (61 f3(t 5l o.24 /61 Millimeters in Parentheses f4q 5l 1.20 fi5) 0.12 /3) 1.54 lAt\ 1.28 '"2 5l 0.96 'tL 6l

How to Mount and Move the Auto Switch Auto switch mounting screw (M3 x 0.5 x 6L) 1. Slide the auto switch mounting nut inserted into the mounting rail and set it at the auto switch mounting position. 2. Fit the convex part of auto switch mounting arm into the concave part of auto switch mounting rail. Then, slide the switch over the nut.

Note Bracket A ZS-50-A Interchangeable with ISE70 With 2 mounting screws (M4 x 6L) Bracket B ZS-50-B With 2 mounting screws (M4 x 6L) Lead wire with M12 connector: Straight ZS-31-B Lead wire length: 5 m Lead wire with M12 connector: Right-angled ZS-31-C Lead wire length: 5 m 6

Order a stainless steel screw set (BBA1) separately, and select and use the M4 x 6L stainless steel set screws included in the BBA1. CNA CNS CLS CLQ RLQ Besides the models listed in How to Order, the following auto switches are applicable. For detailed specifications, refer to pages 1719 to 1827.

/Symmetric Type 94 Air Slide Table Series MXQ Dimensions MXQ 6L/Symmetric Type 95 Series MXQ Air Slide Table Dimensions MXQ 8 96 Air Slide Table Series MXQ Dimensions MXQ 8 97 Series MXQ Air Slide Table Dimensions MXQ 8L/Symmetric Type 98 Air Slide Table Series MXQ Dimensions MXQ 8L/Symmetric Type 99 Series MXQ Air Slide Table Dimensions MXQ 12 100 Air Slide Table Series MXQ Dimensions

T 4 6 3 l b s ( 2 1 k 9 ) P T 0 216 in (5 5mm) O T 0 039 in (1mm) T T 0 256 in (6 5mm) 0 216 in. (5 5mm) 0 039 in (1mm) .75 PSIG (5 Kg7cm2) A B c D E F G H J K A B c D E F G H J 2.81 171 5) 1.95 i4e.5) 0.96 '24.5\o.87 t22l 0.06 (1.5) 0.12 (3) 1 . 5 7 (40) 0.96 (24.5) 1.20 :30.5) 0.24 (61 f3(t 5l o.24 /61 Millimeters in Parentheses f4q 5l 1.20 fi5) 0.12 /3) 1.54 lAt\ 1.28 '"2 5l 0.96 'tL 6l

/min (ANR) (Supply pressure: 0.6MPa) 6l/min (ANR) (Supply pressure: 0.6MPa) Maximum flow rate 24VDC 10%, 12 to 15VDC Voltage Current consumption Power supply Power supply voltage 24VDC type: 0.12A or less Power supply voltage 12 to 15VDC type: 0.18A or less Voltage type 0 to 5VDC, 0 to 10VDC Input signal Current type 4 to 20mADC, 0 to 20mADC Voltage type Approx. 10k Input impedance Current

LC6D-507AD-Q (Refer to page 306 for details.) 0.05mm Holding plate: MB1 (1 pc.), Phillips countersunk head screw: M3 x 6l (1 pc.) Phillips binding head screw: M3 x 4l (2 pcs.), Toothed lock washer M3 (2 pcs.) Binding band: T18S (1 pc.)

Applicable driver Holding plate: MB1(1 pc.), Phillips countersunk head screw M3 x 6l (1 pc.) Phillips binding head screw: M3 x 4l (2 pcs.), Toothed lock washer M3 (2 pcs.) Binding band: T18S (1 pc.) CE marking accessories Note 1) Since vibration may increase with low speed operation, use 6mm/s or more for 6mm lead, and 12mm/s or more for 12mm lead as a guide for speed.

Instead, order a separate stainless steel mounting screw kit, and use it after selecting the M4 x 6L stainless steel set screw included in BBA1. CH2F BAF-32 BAF-04 BAF-05 BAF-06 BAF-08 BAF-10 Note 1) Auto switch models D-G39, K39, A3, and A44 cannot be mounted on CH2E, F, and H32 bore sized cylinders.

M4 x 0.7 x 8L 2 D-A9 D-M9 BA-01, BA-02, BA-32, BA-04 BA-05, BA-06, BA-08, BA-10 BA2-020, BA2-025 BA2-032, BA2-040 BA5-050, BHN2-025, BSG1-032 BH2-040, BH2-050 BH2-080, BH2-100 BAF-32, BAF-04, BAF-05 BAF-06, BAF-08, BAF-10 Note 3) When using D-M9A(V), order stainless mounting screw kit BBA1 instead of the iron auto switch mounting brackets (BA7, BS5-) in the table above, and use the M4 x 6L

M plug connector, Without lead wire and light and surge voltage suppressor U side D side Port size (Body ported only) Station1 2 3 4 5 VQD1151-5L M5 thread M5 VQD1000-10A-5 2B 4A 3R 1P 2B 4A VV4QD15-05M5 1.13-8 Series VQD1000 Manifold Option Blank Plate Assembly/Body Ported VVQD1000-10A-2 SY Blank plate assembly includes 2 screws and 1 gasket.

Please contact us for the latest version.sales@ocaire.com, VQD1151 NO SIZE RATING, VALVE, VQD1151 VALVE, SOL 4/5-PORT, 2D, VQD1151 NO SIZE RATING, 0.22046 lb

Fluid: Air/inert gas , Operating pressure range: 0MPa/10Torr (Vacuum) - 0.7MPa (7.1kgf/cm 2 ) , Effective area (Cv factor): Standard type 0.9mm 2 (0.05); high flow type 1.5mm 2 (0.08) , Coil rated voltage: 12, 24VDC , Response time: ON: 4ms; OFF: 2ms , Ambient/fluid temp: -10 to 50C, VQD1151 NO SIZE RATING, VALVE, VQD1151 VALVE, SOL 4/5-PORT, 2D, VQD1151 NO SIZE RATING, 0.11098 lb

Fluid: Air/inert gas , Operating pressure range: 0MPa/10Torr (Vacuum) - 0.7MPa (7.1kgf/cm 2 ) , Effective area (Cv factor): Standard type 0.9mm 2 (0.05); high flow type 1.5mm 2 (0.08) , Coil rated voltage: 12, 24VDC , Response time: ON: 4ms; OFF: 2ms , Ambient/fluid temp: -10 to 50C, VQD1151 NO SIZE RATING, VALVE, VQD1151 VALVE, SOL 4/5-PORT, 2D, VQD1151 NO SIZE RATING, 0.22046 lb

Fluid: Air/inert gas , Operating pressure range: 0MPa/10Torr (Vacuum) - 0.7MPa (7.1kgf/cm 2 ) , Effective area (Cv factor): Standard type 0.9mm 2 (0.05); high flow type 1.5mm 2 (0.08) , Coil rated voltage: 12, 24VDC , Response time: ON: 4ms; OFF: 2ms , Ambient/fluid temp: -10 to 50C, VQD1151 OTHER SIZE RATING, VALVE, VQD1151 VALVE, SOL 4/5-PORT, 1D, VQD1151 OTHER SIZE RATING, 0.16534

Please contact us for the latest version.sales@ocaire.com, VQD1151 NO SIZE RATING, VALVE, VQD1151 VALVE, SOL 4/5-PORT, 2D, VQD1151 NO SIZE RATING, 0.11023 lb

Fluid: Air/inert gas , Operating pressure range: 0MPa/10Torr (Vacuum) - 0.7MPa (7.1kgf/cm 2 ) , Effective area (Cv factor): Standard type 0.9mm 2 (0.05); high flow type 1.5mm 2 (0.08) , Coil rated voltage: 12, 24VDC , Response time: ON: 4ms; OFF: 2ms , Ambient/fluid temp: -10 to 50C, VQD1151 OTHER SIZE RATING, VALVE, VQD1151 VALVE, SOL 4/5-PORT, 15, VQD1151 OTHER SIZE RATING, 0.06827

Fluid: Air/inert gas , Operating pressure range: 0MPa/10Torr (Vacuum) - 0.7MPa (7.1kgf/cm 2 ) , Effective area (Cv factor): Standard type 0.9mm 2 (0.05); high flow type 1.5mm 2 (0.08) , Coil rated voltage: 12, 24VDC , Response time: ON: 4ms; OFF: 2ms , Ambient/fluid temp: -10 to 50C, VQD1151 NO SIZE RATING, VALVE, VQD1151 VALVE, SOL 4/5-PORT, 25, VQD1151 NO SIZE RATING, 0.15156 lb