Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, Port Size: N7 (1/4" One-touch Fitting), Model: PR (Single Unit Type), Option: None, CE Compliant: Q (CE Marked)

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: One-Touch Plumbing, Port Size: -, Connecting Tube Diameter: Ø4, Pressure Rating(MPa): 0.1 to 0.7, Driving

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: M, Port Size: M5, Connecting Tube Diameter: -, Pressure Rating(MPa): 0.1 to 0.7, Driving Type: Pilot Type

Function: Standard (0.35W DC, AC), Coil Voltage: 24VDC, Lead Wire: L Plug Connector w/Lead Wire 0.3m, Manual Override: Non-locking Push Style, Port Size: 1/8" One-touch Fitting, Model: Single Unit Type, Option: None, CE Compliant: CE Marked

Function: Standard (0.35W DC, AC), Coil Voltage: 24VDC, Lead Wire: L Plug Connector w/Lead Wire 0.3m, Manual Override: Non-locking Push Style, Port Size: 5/32" One-touch Fitting, Model: Single Unit Type, Option: None, CE Compliant: CE Marked

Function: Standard (0.35W DC, AC), Coil Voltage: 24VDC, Lead Wire: L Plug Connector w/Lead Wire 0.3m, Manual Override: Non-locking Push Style, Port Size: 1/4" One-touch Fitting, Model: Single Unit Type, Option: None, CE Compliant: CE Marked

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

0.4

w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2

0.4

w e q w VQC1100 VQC1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Stations 3 2 1 D D D D How to Order Valve 10-SV 1 1 0 0 F 5 Note) q w r e t y u i Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors q Series r Back pressure check valve Note) Available with manifold block for station additions.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

This is a legacy product, and replaced byVQZ115-5L1-N7-PR

Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, Port Size: C3 (ø3.2 One-touch Fitting)

Function: Standard (0.35W DC, AC), Coil Voltage: 24VDC, Lead Wire: L Plug Connector w/Lead Wire 0.3m, Manual Override: Non-locking Push Style, Port Size: ø3.2 One-touch Fitting, Model: -, Option: -, CE Compliant: -

Table of Contents

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SQ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 SQ2000 Applicable tubing O.D. (mm) VQ4 SQ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 Built-in silencer direct exhaust (-S) SSQ1000-SE SSQ2000-SE 3.2 4 6 8 Part numbers above are for a set of ten elements.

2

M Q Q Note) D is maximum diameter.

Table of Contents

6 q !4 @1 w @4 !0 y !3 !5 @3 !0 !

Function: Standard (0.35W DC, AC), Coil Voltage: 3 (110VAC 50/60HZ), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, Port Size: C3 (ø3.2 One-touch Fitting), Model: PR (Single Unit Type)