Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector), Manual Override: Non-locking Push Style, Port Size: C3 (ø3.2 One-touch Fitting)

Function: Standard (0.35W DC, AC), Coil Voltage: 24VDC, Lead Wire: M Plug w/o Connector, Manual Override: Non-locking Push Style, Port Size: ø3.2 One-touch Fitting, Model: -, Option: -, CE Compliant: -

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail mount type [-D] and connector top entry [-JU].

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

0.4

w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2

0.4

w e q w VQC1100 VQC1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q e w q r r Note) 3 position pressure center 3 position exhaust center 3 position closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Stations 3 2 1 D D D D How to Order Valve 10-SV 1 1 0 0 F 5 Note) q w r e t y u i Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors q Series r Back pressure check valve Note) Available with manifold block for station additions.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

Table of Contents

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SQ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 SQ2000 Applicable tubing O.D. (mm) VQ4 SQ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 Built-in silencer direct exhaust (-S) SSQ1000-SE SSQ2000-SE 3.2 4 6 8 Part numbers above are for a set of ten elements.

2

M Q Q Note) D is maximum diameter.

Table of Contents

6 q !4 @1 w @4 !0 y !3 !5 @3 !0 !

Function: Standard (0.35W DC, AC), Coil Voltage: 3 (110VAC 50/60HZ), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, Port Size: C3 (ø3.2 One-touch Fitting), Model: PR (Single Unit Type)

Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: LO (L Plug w/o Connector), Manual Override: Non-locking Push Style, Port Size: C3 (ø3.2 One-touch Fitting), Model: PR (Single Unit Type)

Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, Port Size: C3 (ø3.2 One-touch Fitting), Model: PR (Single Unit Type)

Function: Standard (0.35W DC, AC), Coil Voltage: 1 (100VAC 50/60HZ), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, Port Size: C3 (ø3.2 One-touch Fitting), Model: PR (Single Unit Type)

Function: Standard (0.35W DC, AC), Coil Voltage: 6 (12VDC), Lead Wire: G (Grommet w/Lead Wire 0.3m), Manual Override: B (Locking Slotted Style), Port Size: C3 (ø3.2 One-touch Fitting), Model: PR (Single Unit Type)

Function: Standard (0.35W DC, AC), Coil Voltage: 110VAC 50/60HZ, Lead Wire: L Plug Connector w/Lead Wire 0.3m, Manual Override: Non-locking Push Style, Port Size: ø3.2 One-touch Fitting, Model: Single Unit Type, Option: -, CE Compliant: -