Series CE1

(Shield) 4.4-8 Stroke Reading Cylinder Series CE1 Construction 12, 20 32 @7 @4@8 @0 oi @3!0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !

Stroke Reading Cylinder and Counter

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

Magnetically Coupled Rodless Cylinder

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

8 w !8 w @1 !4 !3 @1 !4 !3 !8 q !6 !5 y e o r !0 !6 !5 y e o i r q !9 r u e y o i !0 i t !2 q !1 @0 !7 t !2 u !1 !7 !0 t !2 !7 !1 !5 !6 Component Parts Description Note Description No. Material Material Note No.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

8 !3 !4 @1 w !8 w !8 w !6 !5 y e o r q !0 !6 !5 y e o i r !9 r u e y o i q t !2 q !1 @0 !7 t !2 u !1 !7 !0 i !2 !7 !1 !5 !6 !0 t Component Parts Description Note Note Description No. Material Material No. U seal Body A NBR PBT q !2 Elbow body Cassette POM, Stainless steel PBT w !3 Seal Handle NBR PBT e !4 O-ring Body B NBR Stainless steel 303 r !

Shock Absorbers and Rate Controls

Pqrt Number lllodel (Ref) (A (8 (D Weigftt (g) OE[,4 0.11\4 -, OEN4 1.25|V] HP 110tvl S( l0r| M98921lil 0tlil0.llr(B) 19.0 N/A 14.3 i l S([tl2rl 1930289i71 OUT,I5M{B] 19.0 N/A 16.0 t4 S(ill4x1.5 93028 /l 0tLl.?5M(81 25.4 /A 19.0 S(ltl | 6x 1.5 M99018199 orM.35M(B) 25.4 l.r/a 19.0 t 8 SC 20xl.5 M930282171 0[li{.5i,1(B} 38.0N/A 25.4 63 S(l{2Ix3 1t930?83171 OEM].OM(B} 44.5 r{/a 38.0 ?

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS-FG AS-FG N AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

Symbol: 2-Position, Solenoid: Single, Voltage: 100V AC, Option: Indicator Light w/Surge Voltage Suppressor, Port Size: Side Piping 1/2, Thread: NPTF, Connector: -, Q: -

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 1 (100V AC), Option: Z (Indicator Light w/Surge Voltage Suppressor), Port Size: A04 (Side Piping 1/2), Thread: T (NPTF)

Ionizer

Air purge: Yes (0.1 MPa) 8 90 Discharge time from 1000 V to 100 V 7 60 6 Catalog specification value: 30 V Discharge time (s) Offset voltage (V) 30 5 0 4 Without sensor 3 30 2 With feedback sensor 60 1 90 0 100 200 300 400 500 0 0 100 200 300 400 500 Installation height of feedback sensor (mm) Installation height of feedback sensor (mm) Ionizer 600 mm Feedback sensor Installation height of

Thermo-con/Rack Mount Type

Circulating fluid inlet Rc3/8 Label Circulating fluid outlet Rc3/8 Facility water inlet Rc3/8 1.

1

SY Saves and . space energy EX600 New New SY3000 SY5000 SY7000 VM XT34 10 mm 15 mm 18 mm 2, 3.2, 4, 6, 8 fittings are connectable. Type M10/M11 manifold At 300 mm/s 4, 6, 8 fittings are connectable. 32 At 300 mm/s Existing 6, 8, 10, 12 fittings are connectable.

Electric Actuator/Slider Type

9 q r !5 y i !8 o !6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

0.4

13 to 24 stations/Double wiring P/S kits for 2 to 24 stations/Single wiring L0 kit : Stations (1 to 8) L1 kit : Stations (1 to 8) L2 kit : Stations (1 to 8) !

CG5-S

Series CG5-S Construction With rubber bumper 80, 100 80, 100 e t q o i r y t !

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

V7 S B 3 M2 LEFB 32 q w e r y t u i o !

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Secondary Batteries

(mm) Bracket assembly no. 1 4 6 1(P) 2(A) 4 3 8 8 1 8 90-VHK-B1A 6 8 6 1 4 90-VHK-B1A 8 6 3 8 90-VHK-B1A 8 11 Air Cylinder: Standard Type Double Acting, Single Rod 10, 16 90-CDJ2 Series How to Order Built-in Magnet Cylinder Model Bore size Suffix the symbol -B (Band mounting style) to the end of part number for cylinder with auto switch. 10 16 10 mm 16 mm 90-CDJ2B16-60-B Example Band