Prevents Micro-Bubbles

A (OUT) port A A LLH2A-03-02-C 1 set 1 set Manifold base part no. Non-locking Locking LVH20A-02-C 2 sets 2 sets Valve part no. (stations 1 & 2) LVH20AL-02-C 1 set 1 set Valve part no.

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLA 2 A 05 02 C LVN Body class TL/TIL Material Symbol 2 3 4 5 Body class 2 3 4 5 Thread type Manifold PFA Symbol C LQ3 Symbol Nil N Thread type Rc NPT Base type Port size (port P) A Stacking type Symbol 02 03 04 06 Body class 2 3 4 5 Port size 1/4 3/8 1/2 3/4 Manifold stations 02 2 stations 05 5 stations How to Order Valve LVA 2 0 02 C A Option Body

ITV

Made RP13A-12RB-13PA (71) 8.5 (14.3) 20 (14.3) 141 12 11 ARJ 141 12 9 Digital pressure display Digital pressure display AR425 to 935 M5 x 0.8 Solenoid valve EXH M5 x 0.8 Solenoid valve EXH Solenoid valve EXH Solenoid valve EXH ARX AMR 22 44 22 44 EXH (3) EXH (3) ARM OUT SUP OUT SUP ARP 15.5 15.5 IR CC-Link/ITV30-CC DeviceNet/ITV30-DE IN M12 x 1 Communication cable connection thread (Plug

LEC-OM071xx

8.29.1 ID Information Area.8-141 8.29.2 Common Parameter Area.8-142 8.29.3 Adjustment Operation Area.8-143 9.

A

42 58 45 125 141 42 1-1/4-12 58 45 M30x1.5 140 141 42 58 40 140 141 42 1-1/4-12 58 45 M36x1.5 160 155 47 64 50 160 155 47 1-3/8-12 64 50 Note) Dimensions are the same for Standard and Switch Capable D I M E N S I O N S ( M M) LARGE BORE STANDARD DOUBLE ACTING DOUBLE ROD SERIES (N)CQ2W Bore B CQ2 NCQ2 D E F NCQ2 i K L M N OB Q RB S Stroke (mm) CQ2 J CQ2 NCQ2 RA U Orifice A CQ2 Size C C H

Free Mount Cylinder Series CU

The maximum speed will be 141 mm/s. 50 32 25 20 10 5 16 Load mass (kg) 10 (2.5) 6 [Double acting (D), Single acting, Spring return (S)] 6 [Single acting, Spring extend (T)] 1 0.5 0.1 0.05 0.01 50 100 300 200 (141) 500 Maximum speed (mm/s) 2. Rod end allowable lateral load Make sure that the lateral load that is applied to the rod end will be no more than the values shown in the tables.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

-12 SV 400 SYJ 200 70% 50% 10% SZ 0 MB 80 800 VP4 600 S0700 AS5000-02 AS420-02 400 VQ 200 VQ4 0 SV400 AN300 -KM12 T1209 VQ5 800 MB 100 VQC 600 AS5000-02 AS420-02 400 VQZ 200 SQ 0 VFS CS1 125 800 VFR 600 VQ7 AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Applicable related components For details

AC Servo Motor Driver (Pulse input type/Positioning type ）

COMMUNICATION FUNCTION 141 to 1440 14.

AC Servo Motor Driver (Network card type ）

PB _ _ ] 02: [Pr. PC _ _ ] 03: [Pr. PD _ _ ] 04: [Pr. PE _ _ ] 05: [Pr. PF _ _ ] 06: Parameter for manufacturer setting 07: Parameter for manufacturer setting 08: Parameter for manufacturer setting 09: Parameter for manufacturer setting 0A: Parameter for manufacturer setting 0B: [Pr. PL _ _ ] 0C: [Pr. PT _ _ ] 0E: [Pr.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

(Max. 20 stations) SUP/EXH block assembly mounting position Valve stations Series 3 5 7 02 2 stations SY3000 SY5000 SY7000 20 20 stations Symbol Mounting position U side D side Both sides Special specifications Applicable stations U D B M 2 to 10 stations 2 to 20 stations In case of special specifications, indicate separately on a manifold specification sheet.

V

2 0.17 3 Water VX2330 0.7 0.45 0.45 0.7 VX2122-02 3 0.33 6 VX2340 1 0.8 0.7 1 VX2-02 3 0.33 6 Oil VX2250 1.6 1.2 1 VX2322-02 3 0.33 6 VX2260 VX070-029 0.3 0.2 0.2 0.3 1/4 VX2132-02 4.5 0.61 11 Air VX2350 0.45 0.3 0.3 0.45 (8A) VX2232-02 4.5 0.61 11 3 5 VX2360 0.8 0.6 0.6 0.8 VX2332-02 4.5 0.61 11 0.25 0.15 0.15 0.25 VX2242-02 6 1.05 19 0.45 0.35 0.35 0.45 VX2342-02 6 1.05 19 1 0.8 0.7

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

N11T) (02T) 2-M2.5 x 0.45 Thread length 6 13 9 31.5 24.5 16.5 3 2.5 4 36 23.4 Mounting holes 9 6.5 6.5 47.5 10.5 Foot bracket 49.7 15.4 16.7 PE port P 1 3 R 1.5 A 1/8 NPTF R port 1/4 NPTF P port 23 Die cast hole For manifold gasket positioning L type plug connector (L): VQZ3 2(R)L -N7T, N9T, N11T, 02T DIN connector (Y): VQZ3 2(R)Y -N7T, N9T, N11T, 02T 88.5 300 (Lead wire length) Indicator

Series SV

-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions

ZP

Material ZQ Series ZPR Without Buffer ZPR U N 02 04 A5 ZF ZP Mounting thread (Refer to Table (2) for applications.)

VFS

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

Proposals for Energy Saving

06 VM230-02-06S Polyacetal roller Hard steel roller Cross roller plunger VM230-02-07 VM230-02-07S Toggle lever VM230-02-08 VM-30AR Red VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y Push button (Mushroom) VM-30AB Black VM-30AG Green VM-30AY Yellow VM-32AR Red VM230-02-32R VM230-02-32B VM230-02-32G VM230-02-32Y Push button (Extended) VM-32AB Black VM-32AG Green VM-32AY Yellow A set of

TABLE OF CONTENTS

SERIES 15 FLOW CHARTS 400 400 1/32 1/32 3/64 3/64 1/16 1/16 3/32 3/32 1/8 1/8 ORIFICE-INCH ORIFICE-INCH 100 100 50 50 PRESSURE PRESSURE DROP ROP PSI PSI 10 10 5 01 01 02 02 05 05 1 2 5 WATER FLOW-GPM SERIES 50 FLOW CHARTS COAST PNEUMATICS 8055 E.

CATALOG VC10

PSI PSI 10 10 5 01 01 02 02 05 05 1 2 5 WATER FLOW-GPM SERIES 58 FLOW CHARTS 97 SOLENOID VALVES . . .

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

R2 P Manual override 8.5 34 63.8 13.8 (Light/surge voltage suppressor) 1/4, 1/8 (P, A, B port) 57.5 [64.5] + 42.1 25.5 20 12 22 22 11.5 18 1/4 (R1, R2 port) 31.5 34 63 L plug connector (L): 10-SYJ7 43-L3 4 5 01 02 M plug connector (M): 10-SYJ7 43-M3 4 5 01 02 DIN terminal (D, Y): 10-SYJ7 43D Y3 4 5 01 02 M8 connector (WO): 10-SYJ7 43-WO3 4 5 01 02 Applicable cable O.D. 3.5 to 7 141.8 [146.2

53

HRZ (Refer to the specifications on pages 138, 139 and the dimensions on page 141 for details.)