Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 02, Type: 1 (Common Exhaust), Thread: 00N (NPT)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 03, Type: 1 (Common Exhaust), Thread: 00N (NPT)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 04, Type: 1 (Common Exhaust), Thread: 00N (NPT)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 08, Type: 1 (Common Exhaust), Thread: 00N (NPT)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 05, Type: 1 (Common Exhaust), Thread: 00N (NPT)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 06, Type: 1 (Common Exhaust), Thread: 00N (NPT)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 10, Type: 1 (Common Exhaust), Thread: 00N (NPT)

Series: VFA3000, Manifold: VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4, Stations: 02, Type: Common Exhaust, Thread: NPT

Series: VFA3000, Manifold: VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4, Stations: 03, Type: Common Exhaust, Thread: NPT

Series: VFA3000, Manifold: VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4, Stations: 04, Type: Common Exhaust, Thread: NPT

Series: VFA3000, Manifold: VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4, Stations: 08, Type: Common Exhaust, Thread: NPT

Series: VFA3000, Manifold: VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4, Stations: 05, Type: Common Exhaust, Thread: NPT

Series: VFA3000, Manifold: VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4, Stations: 06, Type: Common Exhaust, Thread: NPT

Series: VFA3000, Manifold: VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4, Stations: 10, Type: Common Exhaust, Thread: NPT

Table of Contents

101 80 60 40 201 OUT 16 8 151 136 121 106 91 76 60 45 30 151 IN Bore size (mm) Mounting bracket part no.

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y A Connection thread 10 83 49 23 Width across flats 12 20 121 59 51 30 131 69 40 167 79 77 50 177 89 10 13 38 22 D C B 2.5 6 M10 x 1 14 3 10 83.5 49.5 23 20 121.5 59.5 51 30 131.5 69.5 40 167.5 79.5 77 50 177.5 89.5 Width across flats 7 16 38.5 22.5 N4 N6 U4 U6 A10 10 87 53 23 20 125 63 51 30 135 73 40 171 83 77 50 181 93 E2

Air Slide Table

30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height

MGP

20 30 40 50 51 100 200 10 10 20 30 40 50 51 100 200 Stroke (mm) Stroke (mm) 7 l = 50mm V = 400mm/s 8 l = 100mm V = 400mm/s 50 50 80 80 80 80 40 40 30 30 20 20 50 50 50 50 10 10 50 20 30 40 51 100 200 10 10 50 20 30 40 51 100 200 47 Series MGP Compact Guide Cylinder: Heavy Duty Guide Rod Type Operating Range when Used as Stopper 2000 l: Approx. 50mm l: Approx. 50mm MGPS80 1000 m m Weight

Electric Actuators

C 30 D Refer to page 300 for mounting.

MGP

pressure (MPa) Bore size (mm) Piston area (mm2) Operating direction 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGP 113 102 90 79 68 57 45 34 23 113 OUT 6 12 85 77 68 60 51 43 34 26 17 85 IN MGQ 201 181 161 141 121 101 80 60 40 201 OUT 8 16 151 136 121 106 91 76 60 45 30 151 IN MGG 314 283 251 220 188 157 126 94 63 314 OUT 10 20 MGC 236 212 189 165 142 118 94 71 47 236 IN 491 442 393 344 295 246