VQZ1000/2000/3000

.) 2-PE port 3 4 5 3 4 5 L plug connector (L): VQZ1 50 1(R)-L-01 M plug connector (M): VQZ1 50 1(R)-M-01 (Lead wire length) 54 <59> 300 Cross section 0.23 mm2 Cover diameter 1.5 Indicator light 119 300 131 55 (Lead wire length) 61 Indicator light 47.5 <52.5> R1 R2 R1 R2 P P Cover diameter 1.5 Cross section 0.23 mm2 < >: AC < >: AC 2-7-41 Base Mounted 42 42 Series VQZ1000/2000/3000 Dimensions

Table of Contents

Octagon Port size C B T-interface Center of F .R.L. body D A (mm) C 12 D 14 E 8 B 19 A 11 Port size M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 1/4 3/8 3/8 1/2 Model Y110-M5 Y210-01 Y210-02 Y310-01 Y310-02 Y410-02 Y410-03 Y510-02 Y510-03 Y610-03 Y610-04 Applicable model AC10, AC10B AC20, AC20B AC20C AC25, AC25B AC25C, AC30 AC30B, AC30C AC40, AC40B AC40C 32 28 19 42 15 39 30 19 53 15 44 36 24 62 19 AC40

AC Servo Motor Driver (Pulse input type/Positioning type ）

EA] automatically. 12 11 12.

Metal Seal/Rubber Seal Series VQ Body Ported

Series VQ1000 Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-76 P. 2-4-78 P. 2-4-80 P kit 2-4-4 Manifold Variations C S L Port size kit kit SUP EXH port Cylinder port Lead wire Serial transmission unit VQC P

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" M5 x 0.8 18.3 23.1 12 12.7 7 13.5 AS121F-U10/32-07 AS221F-01-04 9.3 27.5 20.4 4 1/4" 10-32UNF 14.3 17 AS221F-01-01 AS221F-01-06 27.5 27.5 6 20.4 11.6 20.4 36.1 32.1 27.1 13.5 31.1 9.3 1/8" 14.2 12 (12.7) 1/8 16 12.7 AS221F-01-03 AS221F-01-08 32.4 8 20.4 15.2 18.5 19 27.5 25.3 17 9.3 5/32" 12 (12.7) AS221F-01-05 AS221F-01-10 14.2 14.3 40.2 10 23.1 18.5 21 15 21 30.2 36.1 31.1 27.1 33.1 17

Valve Single Unit

12 stations SX3000 SX5000 M5 Note) For SS5X3: 4 to 12 stations. 01 1 8 SS5X3-41P-06-C6 1 set (Type 41P , 6-station manifold base part no.)

0.55

02 A B 1/8, 1/4 2(A) port 19.5 12 40.5 2 x 4.2 (For mounting) 11.2 30 18.5 1/8, 1/4 3(R) port 1/8 12(PA) port 2A NO 35 43 NC 12 12 3R 1P NC (1/8) 12(PA) port 12 6.7 58.2 18.5 65.2 60 59 24 X 12 M5 x 0.8 (Breathing hole) 19.5 39 1/8, 1/4 1(P) port For vacuum/VPA344V-1l 01 02 A B 1/8, 1/4 2(A) port 19.5 12 40.5 2 x 4.2 (For mounting) 18.5 1/8, 1/4 3(R) port 11.2 30 2A NO 35 43 NC 12 3R 1P

Valve Single Unit

12 stations SX3000 SX5000 M5 Note) For SS5X3: 4 to 12 stations. 01 1 8 SS5X3-41P-06-C6 1 set (Type 41P , 6-station manifold base part no.)

Table of Contents

-M2.5 x 41L Mounting thread 25 2-M2.5 x 41L Mounting thread 25 31 31 9 600 (3000) 9 600 (3000) 42 13 40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 16-6-12 7 Compact Pressure Switch Series ZSE2/ISE2 01 T1 Dimensions: ISE2Grommet type: ISE2-15 01 T1 01 T1 Connector type: ISE2-15C Pressure setting trimmer Pressure setting trimmer L H SET

KR

(mm) (1) L D Applicable tubing Nylon Urethane KGR04-08 KGR04-06 1.8 2.0 3.3 3 2.5 3 4.7 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 37 37 39.5 42 41 42 44.5 50.5 50.5 10.4 16 5.6 4 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 12.8 17 6 18.5 Applicable fitting size d 13.1 10.4 15.2 20 4.0 4.6 33 8 15.2 20 18.5 26.1

Modular Design with Uniform Body Style

42 AC20-D E310T-D 12 53 53 AC30-D E410T-D 15 71 71 AC40-D B C A Caution on Mounting Pipe threads are not provided on the face which connects with the other components.

F

19.7 8 14 KQK08-U02 14 15.2 12 20.5 22 35 18.5 19.7 8 38 KQK08-U03 17 15.2 12 20.5 23 36 18.5 19.7 10 18 KQK10-U01 17 18.5 17 24 22 38 21 30.9 10 14 KQK10-U02 17 18.5 17 24 23.5 40.5 21 30.9 10 38 KQK10-U03 17 18.5 17 24 24 41 21 30.9 10 12 KQK10-U04 22 18.5 17 24 27 42 21 30.9 12 14 KQK12-U02 17 20.9 17 25 24 42 22 44.5 12 38 KQK12-U03 17 20.9 17 25 24.5 42.5 22 44.5 12 12 KQK12-U04 22 20.9

Table of Contents

Back port (Refer to P . 8-12-3.)

Table of Contents

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

Rubber seal 5 Port Solenoid Valve Series SYJ7000

[131.8] 1/4, 1/8 (P, A, B port) (Light/surge voltage suppressor) 80 [87] 57.5 [64.5] + 42.1 36.5 25.5 20 12 22 22 11.5 34 18 43.6 1/4 (R1, R2 port) 31.5 63 L plug connector (L): SYJ7 40-L3 4 5 01 02 M plug connector (M): SYJ7 40-M3 4 5 01 02 DIN terminal (D): SYJ7 40-D3 4 5 01 02 M8 connector (W0): SYJ7 40-W03 4 5 01 02 Applicable cable O.D. 3.5 to 7 141.8 [146.2] Approx. 300 (Lead wire

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

(12, 14 port) 10.5 (2, 4 port) VS4 85.5 72.5 VQ7 10.5 PE port 29 14 SMC EVS M5-2 port 12, 14 port 1/8, 1/4-2 port 2, 4 port 1/8, 1/4-2 port 3, 5 port 21 21 VFN 1/8, 1/4 1 port EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151 166.5 75.5 75.5 27.5 (14 port) 27.5 (12 port) 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 10.5 (4 port) 10.5 (2 port) 14 12 2 4 12 14 4 2 12 12 26 35 45 26 35

AC Servo Motor Driver (Network card type ）

1 12.

Compact Manifold Regulator Series ARM5

Handle Position ARJ Symbol Position Handle position Handle position Handle position Front Top Bottom AR425 to 935 56 A B C Top Front Bottom 84 84 42 70 70 AMR 26 (Max. 28) P 12 U S SMC SMC H 12 SMC L O C K ARM SMC 28.5 51.5 6 51.5 ARP 80 15 13 OUT IN 3 28 IR 13 15 OUT IN 13 OUT IN 3 3 IRV 3. IN/OUT Fitting Type 2.

0.4

F Manifold mounting AXT100 03 kit Nil E DIN rail mounting style Direct mounting style Wiring Stations Note) Note) S D Single wiring Double wiring SSQ2000 PR 3 C10 01 For 1 station P PL26: 01 to 12 (P kit, 26P) PL20: 01 to 09 (P kit, 20P) JL20: 01 to 08 (J kit, 20P) Port size kit 24 For 12 stations Option C8 C10 N9 N11 One-touch fitting for 8 One-touch fitting

VZ5000

Conditions Body ported Tube bore x Length Speed controller Silencer Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 Series MB 6 x 1 m AS2301F-06 AN110-01 VZ5120-01 3-3-55 Series VZ5000 Construction 2 position single 2 position double De-energized De-energized 3 position closed center/exhaust center/pressure center 3 position closed center De-energized De-energized 3