gas, Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (Cv): 2 position metal seal 14.4 (0.8); 2 position rubber seal 16.2 (0.9) 3 position metal seal 12.6 (0.7); 3 position rubber seal 14.4 (0.8), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: metal seal 29 or less; rubber seal 34 or less, TIE ROD, VV5Q21

Please contact us for the latest version.sales@ocaire.com, VV5Q21-04C4M1-DW, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING 2.83546 lb, 2.83546 lb

inert gas, Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (Cv): 2 position metal seal 14.4 (0.8); 2 position rubber seal 16.2 (0.9) 3 position metal seal 12.6 (0.7); 3 position rubber seal 14.4 (0.8), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: metal seal 29 or less; rubber seal 34 or less TIE ROD, VV5Q21

inert gas, Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (Cv): 2 position metal seal 14.4 (0.8); 2 position rubber seal 16.2 (0.9) 3 position metal seal 12.6 (0.7); 3 position rubber seal 14.4 (0.8), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: metal seal 29 or less; rubber seal 34 or less TIE ROD, VV5Q21

inert gas, Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (Cv): 2 position metal seal 14.4 (0.8); 2 position rubber seal 16.2 (0.9) 3 position metal seal 12.6 (0.7); 3 position rubber seal 14.4 (0.8), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: metal seal 29 or less; rubber seal 34 or less TIE ROD, VV5Q21

inert gas, Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (Cv): 2 position metal seal 14.4 (0.8); 2 position rubber seal 16.2 (0.9) 3 position metal seal 12.6 (0.7); 3 position rubber seal 14.4 (0.8), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: metal seal 29 or less; rubber seal 34 or less TIE ROD, VV5Q21

inert gas, Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (Cv): 2 position metal seal 14.4 (0.8); 2 position rubber seal 16.2 (0.9) 3 position metal seal 12.6 (0.7); 3 position rubber seal 14.4 (0.8), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: metal seal 29 or less; rubber seal 34 or less TIE ROD, VV5Q21

inert gas, Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (Cv): 2 position metal seal 14.4 (0.8); 2 position rubber seal 16.2 (0.9) 3 position metal seal 12.6 (0.7); 3 position rubber seal 14.4 (0.8), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: metal seal 29 or less; rubber seal 34 or less TIE ROD, VV5Q21

inert gas, Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (Cv): 2 position metal seal 14.4 (0.8); 2 position rubber seal 16.2 (0.9) 3 position metal seal 12.6 (0.7); 3 position rubber seal 14.4 (0.8), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: metal seal 29 or less; rubber seal 34 or less TIE ROD, VV5Q21

Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (Cv): 2 position metal seal 14.4 (0.8); 2 position rubber seal 16.2 (0.9) 3 position metal seal 12.6 (0.7); 3 position rubber seal 14.4 (0.8), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: metal seal 29 or less; rubber seal 34 or less TIE ROD EXTENSION, VV5Q21

inert gas, Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (Cv): 2 position metal seal 14.4 (0.8); 2 position rubber seal 16.2 (0.9) 3 position metal seal 12.6 (0.7); 3 position rubber seal 14.4 (0.8), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: metal seal 29 or less; rubber seal 34 or less TIE ROD, VV5Q21

High Vacuum Angle Valve

CYV Chemraz VMQ FKM for Plasma ULTIC ARMOR Example) XLCV-16-M9NA-1G-XAN1A UA4640 Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Flow Rate Characteristics JSX Series G Grommet GS Grommet with PCB DN DIN terminal without connector WN M12 connector/ Without connector cable Recognized Series/Valve type Body material Seal material Orifice diameter/Port size Thread type Rated voltage Electrical entry Option JSX11 S N 101 R 1 G1 * F 201 N 2 GS E F 3 DN 4 WN 5 6 7 8 B J JSX11 Table of UL-compliant Products JSXD Series

Aluminum High Vacuum Angle Valve

CYV Chemraz Example) XLCV-16-M9NA-1G-XAN1A VMQ FKM for Plasma ULTIC ARMOR Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

High Vacuum Angle Valve, XL Series

Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

XL

Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

High Vacuum Angle Valve

Example) XLAV-16L-2M9NA-1G-XAN1A *1 Produced by Mitsubishi Cable Industries, Ltd. * With solenoid valve: Option specifications/Combinations This model has indicator, auto switch, and K (DN) flange options, but hightemperature/heater options are not available. * Solenoid valves XLAV-16, 25, 40, 50: SYJ319, XLAV-63, 80: SYJ519 Example) SYJ319-1GS, etc.

XM, XY

), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMD Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 25, 40, 50, 63, 80 63, 80 40 (070), 63 (114) XYD V V V V V XMD V V V V V Size 25 40 50 63 80 XYD Nil D KF (NW) K (DN) 25, 40, 50, 63, 80 63, 80 3.

Stations: 8 Stations, Port Size: 1/4" One-touch Fitting, Cable Length: w/o Cable 20 Pin, Option 1: DIN Rail Mounting, Option 2: Name Plate, CE Compliant: -