DeviceNet-E

I n t he com m uni cat i on cabl e( 5 pi ns) i s connect ed t o t he connect or f or t he pow er suppl y cabl e( 4 pi ns) by m i st ake, t he i nt ernal subst rat e can break. Pay at t ent i on f or connect i ng t he cabl e. The ri ght angl e cabl e connect or does not rot at e. D o not rot at e i t .

Multi-Axis Step Motor Controller

2 i MS, NS Communication status LED Displays the status of the EtherNet/IPTM communication t o ENC z Encoder connector (16 pins) Axis 1: Connect the actuator cable. !0 MOT z Motor power connector (6 pins) !8 @1 !1 ENC x Encoder connector (16 pins) Axis 2: Connect the actuator cable. !2 MOT x Motor power connector (6 pins) !9 @0 !3 !4 y !

EX600-WEN_WSV.eng

Wireless communication connection status PB72, 02231, Espoo, Finland W-NS Restorable error is detected. (LED flashes when more than one diagnostic information item is detected.)

MXU

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 52.5 53 41.5 14 14 10 57.5 58 46.5 14 19 14 62.5 63 51.5 24 25 18 67.5 68 56.5 24 30 24 75.5 76 64.5 34 40 32 79.5 80 68.5 34 45 35 8-3-7 8 Series MXU Dimensions

-fl Seies

St a nd a rd Spe cifi ca t io ns Fluid V9L9P",3!t9 lMin. operating pressurellq ?sr_(9q9q!

MU

MM NC 7.5Depth4.5 9Depth5.5 10.5Depth6.5 13.5Depth8.5 17Depth10.5 NS 43 45 44 54 53 Model MUB25 MUB32 MUB40 MUB50 MUB63 KA 10 12 14 18 18 N 14 15.5 16 21.5 21.5 ND M5 X 0.8 M6 X 1 M8 X 1.25 M10 X 1.5 NE 4.3 5.1 6.9 8.7 10.5 S 55 58 60 74 75 ZZ 69 72 75 92 96 M10 X 1.25 M8 X 1.25Depth13 M12 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M8 X 1.25Depth13 M10 X 1.5Depth15 M10 X 1.5Depth15 M12 X 1.75 2.4

MXU

34 45 35 8-3-7 8 Series MXU Dimensions: MXU16 (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 65.5 66 52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34 35 30 75.5 76 62 34 35 30 85.5 86 72 40 45 40 90.5 91 77 40 50 45 8-3-8 9 Compact Slide Series MXU Construction MXU6 (6) MXU10 (10) MX MTS MY CY MG CX MXU16 (16) D-X With auto switch 20Data Component Parts No. q Note Hard anodized No. !

e

humidity range Storage temperature range Storage humidity range Withstand voltage Insulation resistance Noise resistance 35 to 85%RH (No condensation) 10 to 60C (No condensation and freezing) 35 to 85%RH (No condensation) Between all of external terminals and the case: 500 VAC for 1 minute Between all of external terminals and the case: 50 M(500 VDC) 1000 Vp-p Pulse width 1 s, Rise time 1 ns

EX260-SDN_eng

MS status Description NS status Installation Green On Green On On-line state, The device has connections in the established state.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

(de-energized) 980 m/s2 in X, Y, Z directions 3 times each (de-energized) 500 Vp-p, Pulse width 1 s, Rise time 1 ns Connection Material Weight Power supply / Output connection: 8P connector, Sensor connection: 4P connector (e-con) Housing: PBT, Display: PET, Backside rubber: CR 60 g (Except for any accessories that are shipped together.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

St a nd a rd Spe cifi ca t io ns Fluid V9L9P",3!t9 lMin. operating pressurellq ?sr_(9q9q!

Wireless System

No wireless slaves connected (Non-restorable error in wireless communication) 4 W-NS Red/Green Wireless communication connection is under construction. (Pairing) Orange LED is ON.

Stations: 5 Stations, Port Size: C6 (ø6 One-touch Fitting), SI Unit: ZENN (EtherNet/IP, -COM), Number of Input Blocks: 5 (Input Block 5 pcs.), Input Block: 2 (M12, 4 Inputs), Input Block COM: N [NPN (-)], Option 1: N (Name Plate), Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 11 Stations, Port Size: C4 (ø4 One-touch Fitting), S Kit: SNA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 3 Stations, Port Size: C6 (ø6 One-touch Fitting), S Kit: SNB (PROFIBUS DP - 16 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 6 Stations, Port Size: N7 (ø1/4" One-touch Fitting), S Kit: SDA (EtherCAT - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 12 Stations, Port Size: C4 (ø4 One-touch Fitting), S Kit: SDA (EtherCAT - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 10 Stations, Port Size: C4 (ø4 One-touch Fitting), S Kit: SNA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 4 Stations, Port Size: C4 (ø4 One-touch Fitting), S Kit: SDA (EtherCAT - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 02 Stations, Port Size: N7 (ø1/4"), Cable Length: 1 [Lead Wire (25 Cores) 1.5 m Lead Wire], Option 1: N (Name Plate), Option 2: S (Built-in Silencer, Direct Exhaust)