10

Body material: AIuminum, C37, Stainless steel Body material: Resin q q w w e e r r t t y y IN OUT IN OUT u u Component Parts Component Parts No. Description No.

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

Refrigerated Air Dryer

Trace the arrow mark , starting from point A at a pressure dew point of 10C to obtain the intersection B on the pressure characteristic line for 0.7 MPa. Trace the arrow mark , starting from point B to obtain the intersection C at the dew point under atmospheric pressure.

1.1

[Dustproof filter set] q This dustproof filter is secured with hook-and-loop tape.

Direct Operated

In the case of liquid: P Q = 1.9 x 106Av (9) G Q : Flow rate [l/min] Av : Flow coefficient [m2] P : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 8.3 x 106Av P(P2 + 0.1) (10) Q : Flow rate [m3/s] Av : Flow coefficient [m2] P : Pressure difference [Pa] P1 : Relative density [MPa]: P = P1 P2 P2 : Relative density [MPa] 28 Solenoid Valve

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Base material: Aluminum Fluid: Air VXE2 VXED2 VXEZ2 Common SUP Individual SUP u u w w t e t e y r q y r o o q y i y i IN OUT OUT port IN port Base material: Brass (C37), Stainless steel Fluid: Water/Oil Common SUP u w t e y r o q y OUT i IN port Component Parts Material No.

MNB

9i @2 q r @8#9 $0 $2 w $3 #8 @9 A C B !3 !4 #4 $1 e$8 o $7 !1@1 !6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

Non-contact Gripper

e w A A-A e r q w Component Parts No.

Profile Design ISO/VDMA Air Cylinder Series CP95

A Q value of approximately 620 Nl/min is obtained. 1500 2000 1500 2000 4.The 620 Nl/min.theoretical value is multiplied by 1.4 Q = 620 Nl/min. 1.4 Q = 870 Nl/min. 160 1000 1000 Maximum air consumption Q [Nl/min.]

ChemicalThermo-con

Heat generation amount Q : Unknown : 1.0C (1.0 K) : 20C (293.15 K) : 21C (294.15 K) : 7 L/min :Water : Density : 1 x 103 kg/m3 Circulating fluid temperature difference T (= T2 T1) Circulating fluid outlet temperature T1 Circulating fluid inlet temperature T2 Circulating fluid flow rate L Circulating fluid : Specific heat C: 4.2 x 103 J/(kgK) T1: Outlet temperature Q = T x L x x C 60 x 1000

Clamp Cylinder with Lock

1 q 40 Extension locking (F) @7 #3 @6 @9 @8 #5 r #6 #8 !6 !5 !2 !4 !3 !0 @2 !9 @0 #1 !8 #0 u #4 #2 y #9 #7 !1 o i w $0 $1 @4 @3 @5 @1 !7 e q t 40 Description Component Parts No. No.

Made to Order

CA2 series GB Stroke A Stroke B (mm) Q S ZZ GB Bore size 40 50 63 80 100 29 53 167 269 ZZ + Stroke (A + B) S + Stroke (A + B) Q 33 59 179 295 33 61 195 311 41 73 231 373 41 79 251 395 L CBA2 series B port D port C port A port (mm) L Q S ZZ GC Bore size (mm) 40 50 63 80 100 42 12 66 180 282 Q GC Stroke B Stroke A 48 14 74 194 310 48 14 76 210 326 S + Stroke (A + B) 58 16 90 248 390 ZZ + Stroke

Cylinder with Lock

Refer to page 41 for how to return to the locked state. 10 MWB Series Construction io w er uy q !3 !4 !2 !8!5!6 !0!1 !7 @1@0 @2 @6 @3 @5@8 @4@9 #5 #7 #9 #8#6#4 #0#1 $1 $0 t !9 #3 #2 @7 Component Parts Component Parts No. Description Material Qty.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

The controller is sold as single unit after the compatible actuator is set. q Check the actuator label for model number. This matches the controller. q * Refer to the operation manual for using the products.

ISO Cylinder

Symbol 1 Heat Resistant Cylinder (10 to 150C) -XB6 Air cylinder which changed the seal material and grease, so that it could be used even at higher temperature up to 150 from 10C.

7

9 t q @1 w e @0!4 @3 y !6 o u !7 @2 CK1C (Clevis width 12.5) @4 i !2 !0 !1 !3 !5 Component Parts MK No.

MB1

1 Parts list No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

Air Slide Table Series MXP

5 i q w !0 !3 o r !4 u Component Parts Component Parts Note No. Description Note No.

Secondary Batteries

Auto switch mounting brackets are not required. w q w e q Note 1) When a compact auto switch is mounted on 3 sides (A, B, and C above) other than the port side of each cylinder series with 32 to 50, auto switch mounting brackets above are required. Order them separately from cylinders.