Body Size: 2, Pilot Type: Internal Pilot, Stations: 7 Stations, Port Size: 1/4, Thread: NPTF

Body Size: 2, Pilot Type: Internal Pilot, Stations: 8 Stations, Port Size: 1/4, Thread: NPT

Body Size: 2, Pilot Type: Internal Pilot, Stations: 8 Stations, Port Size: 1/4, Thread: NPTF

Body Size: 2, Pilot Type: Internal Pilot, Stations: 5 Stations, Port Size: 1/4, Thread: NPTF

Body Size: 2, Pilot Type: Internal Pilot, Stations: 2 Stations, Port Size: 1/4, Thread: G

Body Size: 2, Pilot Type: Internal Pilot, Stations: 7 Stations, Port Size: 1/4, Thread: NPT

Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Supply Side Connection Type: [NPT] NPT, Supply Side, Connection Diameter: 1/4, Control Side Connection Type: [NPT] NPT, Control Side, Connection Diameter: 1/4, Size of Body: 2, Number Of Circuits: Double, Pilot Method: Internal pilot, Specification: For VY120$For VEX110$For VEX120$For VEX130$For VEX150$For VEX170$For

Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Supply Side Connection Type: [NPT] NPT, Supply Side, Connection Diameter: 1/4, Control Side Connection Type: [NPT] NPT, Control Side, Connection Diameter: 1/4, Size of Body: 2, Number Of Circuits: 4 stations, Pilot Method: Internal pilot, Specification: For VY120$For VEX110$For VEX120$For VEX130$For VEX150$For VEX170

Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Supply Side Connection Type: [NPT] NPT, Supply Side, Connection Diameter: 1/4, Control Side Connection Type: [NPT] NPT, Control Side, Connection Diameter: 1/4, Size of Body: 2, Number Of Circuits: 5 stations, Pilot Method: Internal pilot, Specification: For VY120$For VEX110$For VEX120$For VEX130$For VEX150$For VEX170

Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Supply Side Connection Type: [NPT] NPT, Supply Side, Connection Diameter: 1/4, Control Side Connection Type: [NPT] NPT, Control Side, Connection Diameter: 1/4, Size of Body: 2, Number Of Circuits: 6 stations, Pilot Method: Internal pilot, Specification: For VY120$For VEX110$For VEX120$For VEX130$For VEX150$For VEX170

1

1 !2 !3 SY 3 5 C6 1 0 3 1 SY EX600 Top ported VM !

Table of Contents

8, 1/4 VQ7 ( ): Rc 1/8 EVS L plug connector 2 position double: VZS3250-L(Z)-01 02 3 position closed center: VZS3350-L(Z)-01 02 3 position exhaust center: VZS3450-L(Z)-01 02 3 position pressure center: VZS3550-L(Z)-01 02 K plug connector 2 position double: VZS3250-KZ-01 02 3 position closed center: VZS3350-KZ-01 02 3 position exhaust center: VZS3450-KZ-01 02 3 position pressure center: VZS3550

Table of Contents

Metric size Inch size 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 06 08 10 12 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Type Port size 3 Universal Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2

2

Model Port size Seal method Metric size Inch size Elbow type Universal type 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 M5 x 0.8 Gasket seal Note 3) AS121F-U10/32AS131F-U10/32 10-32UNF Note 3) AS221F-01 AS231F-01 1/8 Note 3) AS221F-02 AS231F-02 1/4 Note 3) Note 3) R NPT Note 1) Sealant AS321F-02 AS331F-02 1/4 AS321F-03 AS331F-03 3/8 AS421F-04 AS431F

AC

02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%

CATALOG

-02 1/4 60 48 36 54 Y41-02 1/4 14 39 24 Y44-03 3/8 60 48 36 54 Y41-03 3/8 14 39 24 Y54-03 3/8 72 62 40 62 Y51-02 1/4 14 24 41 Y54-04 1/2 72 62 40 62 Y52-03 3/8 14 24 41 Y61-03 3/8 15 30 50.5 Y61-04 1/2 15 30 50.5 Courtesy of Steven Engineering, Inc. !

Micro Mechanical Valve Series VM1000

OFF 45 ON Max. 6 38 24.5 Symbol 3 port (A) 2 (A) 2 1.5 3 1.5 28 82 (110) 12 12 1 (P) R port (5 port only) 5 port (A) 2 (A) 2 12 12 1 (P) 3 (R) 3 (R) 32 16 40 R port (5 port only) 3 x 1/4 53.2 25 25 * 0.5 MPa supply 63.5 F .O.F .* 40 N T.T. 45 Foot pedal VM220-02-40A VM230-02-40A 3 x 6.5 mounting hole Symbol 2 port 54 71 (A) 2 152 12 10 159 1 (P) 177 3 port (A) 2 1/4 2(A) T.T. 12 10 1 (P)

Table of Contents

(Port size) 1 4 1 4 3 8 1 2 3 8 1 2 AC Normally Open (N.O.) Orifice symbol (diameter) Solenoid valve (Port size) DC 1 (2 mm) 2 (3 mm) 3 (4.5 mm) 4 (6 mm) VX21 VX22 VX23 Model 01 ( ) 02 ( ) 1 8 1 4 02 ( ) 03 ( ) 02 ( ) 03 ( ) Port no. (Port size) 1 4 1 4 Table (4) Bracket Part No. 3 8 3 8 Model Part no.

AS

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard Universal type 3/8 standard 1/2 standard Type M5 Port size Elbow Universal 2 3 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 01 02 03 04 Applicable tubing O.D.

VM

-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust