1

35 + 25 (n 2) (n = 2, 3, 4, 5) CJ2 D-A9lV 5 10 35 10 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 25 (n 2) (n = 2, 3, 4, 5) CM2 Band mounting CG1 D-H7l/H7lW D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 22.5 (n 2) (n = 2, 3, 4, 5) MB D-C7l D-C80 10 15 50 15 + 40(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 20 (n 2) (n = 2, 3, 4, 5) CA2 D-H7C D-C73C D-C80C 10 15 65 15 + 50(n 2)

2

Connection thread Metric 2, 3.2, 4, 6, 8 M3 x 0.5, M5 x 0.8, M6 x 1.0 Metric 3.2, 4, 6, 8, 10, 12, 16 M5 x 0.8 R, Rc, G1/8, 1/4, 3/8, 1/2 10, 12, 16 R, Rc1/8, 1/4, 3/8, 1/2 Inch 1/8", 5/32", 1/4", 5/16" 3/8", 1/2" 10-32UNF NPT1/8, 1/4, 3/8, 1/2 1/8", 5/32", 3/16", 1/4" 10-32UNF 5/16", 3/8", 1/2" NPT1/16, 1/8, 1/4, 3/8, 1/2 Inch 1/8", 3/16", 1/4" 5/16", 3/8", 1/2" M5 x 0.8 R, Rc1/8, 1/4, 3

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2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

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2 !3 !4 !5 !6 !7 !8 !

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Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

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2, !3, !4, !5.

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 39.3 40.1 A 4 A 4 63.3 79.8 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-Plug [1 (P), 3/5 (R) port] 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-One-touch fitting [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting [4 (A), 2 (B) port] Applicable

Air Slide Table

M9NV M9N IC circuit 3-wire (NPN) Solid state auto switch 5 V, 12 V 3-wire (PNP) M9PV M9P 2-wire 12 V M9BV M9B 3-wire (NPN) 5 V, 12 V M9NWV M9NW IC circuit 3-wire (PNP) M9PWV M9PW 2-wire 12 V M9BWV M9BW Diagnostic indication (2-color indicator) Relay, PLC Grommet Yes 24 V 3-wire (NPN) 5 V, 12 V M9NAV1 M9NA1 IC circuit 3-wire (PNP) M9PAV1 M9PA1 2-wire 12 V M9BAV1 M9BA1 Water resistant (2-color

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-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in connection (Mounting hole) Model A 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 70.5 30.5 18 12

ZP

31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model Model Model ZP2-3507W ZP2-4010W ZP2-5010W ZP2-6010W ZP2-4020W ZP2-5020W ZP2-6020W ZP2-8020W ZP2-4030W ZP2-5030W ZP2-6030W ZP2-8030W 2 x 1.5 0.5 0.5 0.5 10 2 x 2.5 11 2.5 0.8 0.8 Adapter Mounting Dimensions If an adapter will be made by

ZP

31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model Model Model ZP2-3507W ZP2-4010W ZP2-5010W ZP2-6010W ZP2-4020W ZP2-5020W ZP2-6020W ZP2-8020W ZP2-4030W ZP2-5030W ZP2-6030W ZP2-8030W 2 x 1.5 0.5 0.5 0.5 10 2 x 2.5 11 2.5 0.8 0.8 Adapter Mounting Dimensions If an adapter will be made by

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0 @2 o !2 w i @5 !4 e !7 !1 @4 !5 !6 r t u q @3 !3 @0 !9 !

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

each unit (When the power supply is applied). 5 Reserved 6 System error occurred. 7 Hardware error occurred. 0 There is an error in unit 0. 1 There is an error in unit 1. 2 There is an error in unit 2. 3 There is an error in unit 3. 2 4 There is an error in unit 4. 5 There is an error in unit 5. 6 There is an error in unit 6. 7 There is an error in unit 7. 0 There is an error in unit 8.

SQ1000/2000

D side 1 2 3 4 12 13 14 15 16 17 18 19 20 21 22 23 24 11 10 9 8 7 6 5 Stations Description/Type 4 2 Single 1 5 3 Metal 4 2 Rubber 4 2 Double (latching) 1 5 3 1 5 3 Metal 4 2 Rubber 4 2 Double (double solenoid) 1 5 3 1 5 3 4 2 Closed center 1 5 3 4 2 Valves Options Cylinder port sizes Exhaust center 1 5 3 4 2 Pressure center 1 5 3 4 2 Dual 3 port valve (A) 1 5 3 N.C.

Electric Actuator/Slider Type

5 y i !8 o !6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

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Refer to page 2 and 8. Refer to page 5 and 8. 4 Model determination Refer to page 2. Refer to page 5. 5 Selecting accessories sold separately.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Grommet (G) With External Pilot Specifications (Pitch) P=24 22.3 24.3 18.3 11 3/5 R 3/5 R 18.8 18.8 18 4 A 4 A 4 A 4 A 4 A 3/5 R 3/5 R 4 A 4 A 4 A 4 A 4 A 39.3 39.3 40.1 63.3 79.8 1 P 1 P 2 B 2 B 2 B 2 B 2 B : 12 : 10, 3/8" Applicable tubing O.D.: 8, 5/16" [4(A), 2(B) port] One-touch fitting [1(P), 3/5(R) port] Plug 1 P 2 B P 1 2 B 2 B 2 B 2 B Applicable tubing O.D.: 12, 3/8" [1(P), 3/5(R

CY1

2 @7 #2 r @8 u o y t @1 @2 @5 @4 @3 CY1HT32 @6 Material Note Parts list Material Note Parts list Qty. 1 2 1 2 2 1 5 5 4 4 1 2 2 1 2 2 2 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Qty. 2 2 2 2 1 4 2(4) 2 4 2 2 4(2) 1 2 4 2 Description Body Plate Cylinder tube Piston Piston nut Shaft Piston side yoke External slider side yoke Magnet A Magnet B External slider tube Spacer Space ring Slide

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4 P. 17-5-117 Elbow LQ2L 5 VXA 2 VN 3 Female LVC 4 P. 17-5-118 5 LVA 2 LVH 3 Male LVD 4 P. 17-5-119 Run tee LQ2R 5 LVQ 2 LQ 3 Female LVN 4 P. 17-5-120 5 TI/ TIL 2 PA 3 Male PAX 4 P. 17-5-121 Branch tee LQ2B 5 PB 2 3 Female 4 P. 17-5-122 5 2 3 Union elbow LQ2E 4 P. 17-5-123 5 2 3 Union tee LQ2T 4 P. 17-5-123 5 Note) Basic size With reducer 17-5-95 24 Series LQ 1 2, LVN, TL/TIL Port size Tubing

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2 4 2 1 1 1 5 3 3 5 3 5 Regulating port B Regulating port P Regulating port A Caution Part No.