1 Drain q r e w t i u y o !0 !
R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no. Body size Port size Part no.
Note 2) Use a bushing (part no: 131368) when connecting the R 1/8 pressure gauge to the R 1/16 gauge port. Note 3) Except for AR10. Accessory part no.
exhaust cleaners AMC610-10 (Connecting port size R 1), AMC810-14 (Connecting port size R 1 1/2) (2) SY Note 1) With multi-connector, or with D-sub connector: 8 stations max.
10 -04 R 1/2 R 3/8 -03 <R type> KGU12-02 R 1/4 R 1/2 -04 12 -03 R 3/8 R 1/4 KGT12-02 -04 R 1/2 12 R 3/8 -03 Male Delta KGD R 1/2 -04 R 3/8 KGT16-03 16 Applicable tubing O.D.
SYJ SZ Body type Plug-in type VVFS5000-R-04-1 Non plug-in type VVFS5000-R-04-2 Part no. VP4 For details, refer to page 1308.
10 -04 R 1/2 R 3/8 -03 <R type> KGU12-02 R 1/4 R 1/2 -04 12 -03 R 3/8 R 1/4 KGT12-02 -04 R 1/2 12 R 3/8 -03 Male Delta KGD R 1/2 -04 R 3/8 KGT16-03 16 Applicable tubing O.D.
E O U T S I D E D I A M E T E R Metric (mm) 06 6 08 8 10 10 12 12 Imperial (inch) 07 1/4 09 5/16 11 3/8 13 1/2 3 Universal T Y P E W I T H O N E T O U C H F I T T I N G S P O R T S I Z E Symbol Cylinder Side Pilot Port 01 R(PT)1/8 M5x0.8 02 R(PT)1/4 Rc(PT)1/8 03 R(PT)3/8 Rc(PT)1/8 04 R(PT)1/2 Rc(PT)1/4 F02 R(PT)1/4 G(PF)1/8 F03 R(PT)3/8 G(PF)1/8 F04 R(PT)1/2 G(PF)1/4 N01 NPT1/8 10
Color 3.2 M5 X 0.8 M6 X 1.0 R(PT) , Rc(PT) R(PT) , Rc(PT) R(PT) , Rc(PT) R(PT) , Rc(PT) M5 M6 01 02 03 04 00 04 06 08 10 12 16 99 23 04 06 1 8 1 4 3 8 1 2 4 6 8 10 12 16 4 Symbol 2 Body White Black Release button Light gray Blue 1 8 1 8 Thread Tube (Rod) 1 4 1 4 08 10 12 16 3 8 1 2 3 8 1 2 Same dia. tube Different dia. tube (Reducer) 6 8 10 12 16 Same dia. rod Model Male connector Male branch
J Drain guide 1/4 Note 4) AFM30, 40 Nil Rc AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right to left AFM20 to 40 N Note 1) NPT D Float type auto drain (N.O.)
ZX1-R1-1 ZX1-R1-3 ZX1-R16 4 pcs. (Ordering example) ZZX106-R 1 pc. (Manifold base) ZX100-K15LZ-EC 5 pcs. (Vacuum single unit) ZX-BM1 1 pc.
Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.
Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !
1 (Individual EXH spacer) VVFS3000-R-03-2 1 Note 1) Appropriate silencer for EA, EB port: AN403-04 (O.D. 27).
Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.
Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.
Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.
Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.
0.05~0.83MPa P R E S S U R E 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 14 1 1/2 20 2 T H R E A D Rc(PT)* Remove (N) when ordering F F(PF) N NPT Courtesy of Steven Engineering, Inc. !
Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 40.1 39.3 18.8 18 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 39.3 63.3 79.8 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-Plug 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 [1 (P), 3/5 (R) port] 2-One-touch fitting One-touch fitting 2n1-One-touch fitting [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 [PE: