2

(mm) Connection thread Rc Model T (M) Weight (g) NylonUrethane 3.2 1/4 KQ2E23-02l M12 x 1 17 14 28.7 14.3 13 13.3 3.4 2.9 2.5 31.2 Applicable tubing Mounting plate thickness 7 mm or less 4 1/8 KQ2E04-01l M12 x 1 14 14 24.4 10 13 13.3 5.6 4 3 21.2 1/4 KQ2E04-02l M12 x 1 17 14 29 14.6 13 13.3 5.6 4 3 30.9 H1 H2 T 6 1/8 KQ2E06-01l M14 x 1 17 17 23.6 9.2 15 13.3 13.1 10.4 4.5 28.9 1/4 KQ2E06-

Table of Contents

AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350-06 AMD450-06 15 2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22 3.0 HAA37-14 HAW37-14 AT22C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 27 3.5 HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37 5.0 HAW55-20 AT37C-14 AFF37B-14 IDF37C1-3 AM650-14 AMD650-14

AC Servo Motor Driver (Pulse input type/Positioning type ）

. 14-9 14.3.4 Checksum . 14-9 14.3.5 Time-out processing . 14-9 14.3.6 Retry processing . 14-10 14.3.7 Initialization . 14-10 14.3.8 Communication procedure example . 14-11 14.4 Command and data No. list . 14-12 14.4.1 Reading command . 14-12 14.4.2 Writing commands . 14-18 14.5 Detailed explanations of commands . 14-20 14.5.1 Data processing . 14-20 14.5.2 Status display mode . 14-21 14.5.3

AC Servo Motor Driver (Network card type ）

If the voltage drop (maximum of 5.2 V) interferes with the relay operation, apply high voltage (maximum of 26.4 V) from external source. 13 13 14. APPLICATION OF FUNCTIONS 14. APPLICATION OF FUNCTIONS .2 14.1 Infinite feed function (setting degree) .2 14 1 14. APPLICATION OF FUNCTIONS 14.

AC Servo Motor Driver

For LECSB-S5 LECSB-S7 LECSB-S8 14 5 14.

LEC-OM02704CN

145 14.3.2 146 14.3.3 147 14.3.4 147 14.3.5 147 14.3.6 148 14.3.7 148 14.3.8 149 14.4 14-10 14.4.1 14-10 14.4.2 14-15 14.5 14-18 14.5.1 14-18 14.5.2 14-20 14.5.3 14-21 14.5.4 (DIO) 14-24 14.5.5 ON/OFF 14-29 14.5.6 (DIO) 14-31 14.5.7 1ON/OFF() 14-32 14.5.8 14-33 14.5.9 14-40 14.5.10 14-41 14.5.11 14-42 14.5.12 14-48 14.5.13 14-49 15 15115-112

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Red 6 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 L dimension 26 2 1 25 17.6 19.9 22.1 24.4 26.6 28.9 31.1 33.4 35.6 Weight (g) 37.9 10 11 12 13 14 15 16 17 18 19 No.

•

." ~ ' G 1J 2O 8 3 19 19 25 ' 45 14 3 3.5 24 15 1.7 I ZPT20~ 20 23 8 12 4 40 ZPT02U 2 2.6 1.2 ZPT04U ' 4 . .. a:.e 1.6 ZPT06U 6 7 08 '9 ' 12 ZPT2Sg . 25 28 I 14 3 .8 4 25 , 45 , ''24 '' . '5 : .

LEC-OM02904

LE--LE-CSM-AWG14 14 .

OMU0023

Step Request data Response data Operation details 01 10 0600 000A Alarm history command to clear alarm 14 0 0 0 0 1 01 10 0600 000A history sent. (0 to 10 entries) 0 0 0 0 0 0 01 10 060A 000A Alarm history command to clear alarm 14 0 0 0 2 01 10 060A 000A history sent. (11 to 20 entries) 0 0 0 0 0 0 0 67 - Caution Ensure the alarm history is cleared only after taking corrective action in

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

HRX-OM-Q033

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

HRX-OM-S010

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

HRX-OM-R028

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. drop 4 High circulating fluid return temp. 5 High circulating

HRX-OM-M091

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. 4 High circulating fluid return temp. 5 High circulating

IDUS/IDFS

Note 2) Refer to page 14-18-9 for further information of options. Note 3) Combination of L and M is not available. 14-18-6 7 The models IDF1E to 11E and IDU3E to 6E have been revised. For details, refer to catalog no. ES30-8A. Similar updating for other IDF/IDU models is scheduled to follow shortly.

OMS0020

Sends a monitor command to acquire the INP signal 14 :01_MO :01MOOK information. Acquires the information repeatedly until the received information shows that the INP is "1". 15 Repeat No. 14-15 (INP = 1 indicates that the target location has been reached.)

EXxx-OMY0004

Product Summary . 14 3.1. Features . 14 3.2. Structure . 15 3.3. Safe digital inputs and clock outputs UT1 and UT2 . 16 3.4. Safe power supply (outputs) . 20 4. General Specifications . 21 5. Power Supply Concept . 22 5.1. Power distribution . 22 5.2. Under-voltage detection . 23 6. Valve Manifold . 24 7. Installation . 25 7.1. Mounting . 25 7.2. Wiring . 27 8. Commissioning . 33 8.1.

Vacuum

Rod end nut Seal washe. r'ratanalr CorB sht Rolld sle6l Seal-NBF '142 lnder 1 4 Qoriac flTre 14 14 hltn.lal k C1\ | 2o3 Port valves for vacuum use . . . . . .14 Series KJ, Series I Tl KQ, rV-3, M5. . . . 14 14 tTV0090,tTV2090 ...tso 143 Vacuum Regulator series lRVl 000/2000/3000 Standard Specifications Model rRvlooo I rRvzno .ii I :lRv3qqot ,,l Regulaiing pressure range Nole 1 -100 to -1.3kPa

EXxx-OMY0006CN

X PROFINET FW 24 H watch dog FW EX##-OMY0004 1 No.EX##-OMY0006CN . 1 . 2 2. . 10 2.1. . 10 2.2. . 11 2.3. . 12 2.4. . 12 2.5. . 13 2.6. . 13 3. . 14 3.1. . 14 3.2. . 15 3.3. ()UT1/UT2 . 16 3.4. . 20 4. . 21 5. . 22 5.1. . 22 5.2. . 23 6. . 24 7. . 25 7.1. . 25 7.2. . 27 8. . 33 8.1. . 33 8.2. . 36 9. . 44 9.1. IO . 44 9.2. . 48 10.