Title not found

and he bonom ported elbow is BN tr. aa block COM out lor l/O unit 1 to8 (16) Se al kit for Rmote l/o Nole 1) P Kt orderrheble assembly separale y for lhe Iype 20P Note2)NumbeB inside ( I indi.ale the mdimlm number oi solenoios for mEd singre and double winng The max mum numberol slat ons is delerm ned by lhe tolalnumber oJ solenoids.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

N1: 1/8" N3: 5/32" N7: 1/4" N5T: 10-32UNF NM: Mixed Top ported elbows are LN and bottom ported elbows are BN. 2.

CL

S + Stroke ZZ + Stroke With rod boot l h + l ZZ + l + Stroke Bore size (mm) Stroke range A B1 BC BN BZ C D E GA GB GC GD GK GL GQ GR I J K KA MM NA AL 20 25 32 40 26 31 38 47 4 7 7 8 4 7 7 8 5.5 9 9 11 3.5 4 4 4 54 62 62 67 19 20 21 23 12 12 11 12 85 95 95 103 12 14 18 25 14 16.5 20 26 57.5 69 69 76 91 101 102 111 38 45 45 52 13 17 17 19 24 29 36 44 18 22 22 30 M8 x 1.25 M10 x 1.25 M10 x

KT10

Code Material Viton (Standard) Polyurethane Buna-N Ethylene propylene No code UE BN EP Relieving Relieving Code Self Relieving (Standard) Non relieving 1 0 Main valve seat material Material Ports Material Vespel (Standard) PEEK Code Pressure gauge unit 4) Body material Code Brass 300 SS series 316 SS Material Code S No code PK B C S Ports Code Unit psig/bar MPa B V C V No code MPA 4P 4PN

Series AP3100

Indicator Switch (Option) Specification Wiring Diagram ISH NPN 3.8 to 30 VDC Max. 0.4 VDC Max. 11 mA Max. 20 mA AWG 24 3 m Blue (BL), Brown (BN), Black (BK) Code Output type Power supply voltage Output voltage Supply current Output current BN + BL Indicator switch Load BK Lead wire Cable length Color (Lead wire) Cable 1082 Diaphragm Valve for Ultra High Purity Manually operated type (For

VQC

Note 2) Symbols for inch sizes are as follows: N3: 5/32" N7: 1/4" N9: 5/16" NM: Mixed The top ported elbow is LN and the bottom ported elbow is BN. Kit designation/Electrical entry/Cable length (Refer to page 2-2-16 for detailed information on kits.) SI unit COM. Input block COM.

Air Cylinder RSQ Series Stopper Cylinder

Series RSo Thread mountingi both ends tapped dN lhrough hole O thread 2-6.5 Bore size d32, d4O, 050/RSnQ$2, ,10, 50 ' Umercions clher rha' r ihe above ae lhe sme as lhose dl rhe basic lype la1 the bn). 4-pN lhrough Widlh across llals: K .l9ro!1E!

FSQ seies

Series RSo Thread mountingi both ends tapped dN lhrough hole O thread 2-6.5 Bore size d32, d4O, 050/RSnQ$2, ,10, 50 ' Umercions clher rha' r ihe above ae lhe sme as lhose dl rhe basic lype la1 the bn). 4-pN lhrough Widlh across llals: K .l9ro!1E!

Title not found

and the bottom Porled e bow is BN !

Title not found

lhe speciiicalron sheet n the case olCN4 and Ll,/l Aslnldace 8inr8ou1 31 slave mode2 soaledcommon As-lntedace4in/4oul31 savnode2 soatedcommon ASnleiace 8in18oul31 s av mode 1 so ated common AS-ilerlace4in,4oul3l savemode 1 soatedcommon Note 2l Symbos for nch szes are 1 to 12 (24) N3 o52 Ng osrt6 1 to 8 (16) The top porled e bow rs LNfand the botiom porled e bow is BN

2

77.6 80.2 102 77.6 104 102 77.6 104 80.2 Attachment Model K S V KS KV KSV SV A1 A2 A1 A1 A2 A1 A2 A1 A2 A3 A1 A2 A3 A1 A2 AC10A-A AC20A-A 41.6 43.2 41.6 41.6 43.2 41.6 57 41.6 43.2 43.2 41.6 57 43.2 41.6 57 AC30A-A 55.1 57.2 55.1 55.1 57.2 55.1 74 55.1 57.2 57.2 55.1 74 57.2 55.1 74 AC40A-A 72.6 75.2 72.6 72.6 75.2 72.6 95 72.6 75.2 75.2 72.6 95 75.2 72.6 95 AC40A-06-A 77.6 77.6 80.2 77.6

Table of Contents

FB B Over 100 st 130 130 145 145 50 st or less 93 93 104 104 22 22 23 23 71.5 78 83 88 32 40 50 63 Specifications Applicable series Bearing type MGPM Slide bearing MGPL Ball bushing bearing 12, 16, 20, 25, 32 40, 50, 63, 80, 100 Bore size (mm) Other dimensions are the same as standard products. Specifications and dimensions other than above are the same as the standard, basic style.

Electric Actuators

Page 101 Clean room specification . 104 Dust seal specification . 110 TSUBAKI CABLEVEYOR specification . 122 Construction . 134 Mounting . 140 Non-standard Motor Mounting Dimensions . 143 Deflection Data . 145 LJ1H/High Rigidity Guide .

Table of Contents

Specifications. 99 100 104 106 109 109 110 111 113 113 114 114 115 115 116 116 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 117 117 118 118 119 119 120 120 121 121 122 122 123 125 126 127 127 128 128 129 130 131 131 132 133 135 135 136 137 138 138 139 140 141 141

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Station n Station 1 Connector polarity indicator Applicable connector: 26 pins MIL (Conforming to MIL-C-83503) (mm) 12 234.5 226.5 L1 L2 11 217 209 10 199.5 191.5 9 182 174 8 164.5 156.5 7 147 139 6 129.5 121.5 3 77 69 112 104

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Mass (g) Valve model Type of actuation Valve model Type of actuation W M8 W M8 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (kdm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L/M plug L/M plug 4, 2 (A, B) 4, 2 (A, B) 1, 5, 3 1, 5, 3 DIN terminal (sbar)) Cv b C (kdm3/ (sbar) ) Cv b C (dm3/ (P, EA, EB) (P, EA, EB) connector 57 82 connector 108 133 connector 51 53 68 74 connector 101 104

Table of Contents

MTS 105 Particle concentration (particles/m3) MY Special cylinder tube 104 Class M3.5 [Class 100] CY A special cylinder tube is employed using extruded aluminum material. Even long strokes are not subject to deflection because of direct attachment to the cylinder body, and non-contact construction is achieved through combination with a linear guide.

Made to Order

Double acting Double acting Linear guide type Linear guide type w-2 From P. 432 w-2 From P. 520 w-1 From P. 1208 w-1 From P. 1302 w-1 From P. 1324 w-1 From P. 1388 MGP MGQ 10 mm increments for 10 Mechanically jointed rodless cylinder MY High rigidity/Linear guide type Linear guide type Magnetically coupled rodless cylinder Linear guide type w-1 From P. 1528 CY1 w-3 From P. 75 w-3 From P. 104

Table of Contents

20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104

LX

Stroke + 124 Stroke + 141 Motor unit 4.5 4H9 4H9 3 6 38 34 Section C detail (Scale: 5/1) Stroke + 104 Stroke + 121 12 7.5 4-M6 x 1 4H9 E 1 5.4 8.4 4-9.5 4-5.6 50 4.5 Section C 4-M6 x 1 9 43 5.5 D 30 Cross section BB Refer to page 300 for mounting.