VQZ1000/2000/3000

01 F 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) None Nil DIN rail mounting style (For manifold) IN side port size OUT side port size D 01 02 C6 C8 One-touch fitting for 6 One-touch fitting for 8 Rc 1/8 Rc 1/4 One-touch fitting for 6 One-touch fitting for 8 01 02 C6 C8 Rc 1/8 Rc 1/4 F With bracket N Name plate Note) When two or more symbols are specified

Modular F.R.L. Unit

F E E F B C Cross interface E: 4-Rc E A F: Without thread D Model Port size A B C D Applicable model Y14-M5 M5 23 16 14 25 AC10 Y24-01 1/8 40 40 22 40 AC20 Y24-02 1/4 Y34-01 1/8 49 43 28 48 AC25, AC30 Y34-02 1/4 Y44-02 1/4 60 48 36 54 AC40 Y44-03 3/8 Cautions in Mounting When mounting a cross interface directly on the IN side of the lubricator, be sure to use a series AKM check valve between

Modular F.R.L. Unit

Port size F.R.L. body center E F F E E B C E: 4-Rc F: Without thread A D E Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Applicable models AC10, AC10A, AC10B Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 C 14 A 23 B 16 D 25 Cross interface AC20, AC20A, AC20B AC20C, AC20D AC25, AC25B, AC25C AC30, AC30A, AC30B AC30C, AC30D AC40, AC40A, AC40B AC40C, AC40D 22 40 40 40 28

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

SY

Grommet (G), (H): SY3240(R)-01 Scale: 35% G H With interface regulator 141 15 68.5 [75] 65.6 68 32.5 24.5 With plug (12.5) (37) 41 L type plug connector (L): SY3240(R)-L-01 M type plug connector (M): SY3240(R)-M-01 Grommet .

SQ1000/2000

8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting Option Wiring Note) Stations S D Single wiring Double wiring Note) PL26: 01 to 24 (P kit, 26P) PL20: 01 to 18 (P kit, 20P) JL20: 01 to 16 (J kit, 20P) 01 1 station 24 24 stations Centralized exhaust For external pilot For direct exhaust outlet with built-in silencer Nil R S (For F kit) SSQ1000 4

Air Fittings & Tubing

F (inch) Part No.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Refer to page 6-5-33.

Speed Controller with One-touch Fitting

Note 2) G thread is not available. 564 Speed Controller with One-touch Fitting Face seal AS Series Elbow Universal Brass Electroless nickel plated How to Order * Only G thread AS-F AS-F TMH ASD Type AS Thread type 2 Elbow 3 Universal G G AS-FE 2 2 0 F G A 1 AS 01 06 G thread KE AS-FG P F A 1 AS 2 0 2 01 06 R, NPT thread AS-FP AS-FM Body size Made to Order For details, refer to page 571. 2

Table of Contents

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

Modular F.R.L. Unit

E F F E E B C Cross interface E: 4-Rc F: Without thread A D E Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Applicable model AC10 Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 C 14 D 25 B 16 A 23 AC20 22 40 40 40 AC25, AC30 28 48 43 49 AC40 Cautions in Mounting 36 54 48 60 62 When mounting a cross interface directly on the IN side of the lubricator, be sure to use a

7ND9071en

Code D33 SST Sensor Dual Module Code D44 Namur Sensor Dual Module Code I02 P+F NJ2-12GK-SN Code I09 P+F NCB2-12GM35-N0 Code I32 Omron E2E-X2Y1 Code I41 P+F NJ4-12GK-SN Code I45 P+F NJ3-18GK-S1N Code I56 IFC 2002-ARKG/UP Code K05 Omron D2VW-5 Code K06 Omron D2VW-01 Code B06 Omron D2VW-01 (ND9100F/P, ND9200F/P and ND9300F/P only) 2.5 Recycling and disposal WARNING (ND9000, ND7000): During automatic

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

01 F R2 R2 R2 R2 Option IN side port size OUT side port size None With bracket DIN rail mounted (for manifold) With name plate F 01 02 C6 C8 Rc(PT)1/8 Rc(PT)1/4 One-touch fitting for 6 One-touch fitting for 8 Rc(PT)1/8 Rc(PT)1/4 One-touch fitting for 6 One-touch fitting for 8 01 02 C6 C8 D N Drop prevention Stop in the middle Note)When specifying more than one symbol, indicate them alphabetically

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Valve Note) For common exhaust type for main and pilot valve, model number will be VF113c, VF123c. 3-4-5 6 Series VF1000 How to Order Port size (P, A, B) Thread type Only when 01 (1/8) M5 01 M5 x 0.8 Nil F N T Rc G NPT NPTF 1 8 EA, EB port: M5 x 0.8 Option F With bracket Body ported VF1 1 2 1 L 01 0 Not installed when delivered Manifold VF1 1 3 0 1 L 01 Port size (A, B) Body option Type

Smooth Cylinder/Low Speed Cylinder

Without auto switch With auto switch Stroke range (mm) Bore size (mm) C D E I H J K L M Q 11.5 A A B F 5.5 B F Q P M5 x 0.8 P 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 33 7.5 10.5 13 16 45 60 1/8 M8 x 1.25 4.5 14 7 34 10.5 1/8 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 46.5 39.5 8 11 13 16 52 69 1/8 M8 x 1.25 5 14 7 40 8 11 1/8 50 48.5 40.5 10.5 10.5 15 20

3 Port Air Operated Valve Series SYJA300 1

VZA412 01 P VZA414 01 1P Thread type Nil Rc NPTF, NPT G T F VV3ZA2 031 01 50 VZA200 01 S Thread type Thread type Nil Nil Rc NPTF, NPT G Rc NPTF, NPT G T F T F 5-5-3 4 Series VZA200/400 Dimensions Body ported: VZA42-P-01 Pilot port 2-3.4 Mounting hole M5 x 0.8 2-3.4 mounting hole Courtesy of Steven Engineering, Inc.-230

Series VQ Metal Seal/Rubber Seal Body Ported

Specifications Positive COM AXT661-14A-F Single (2 wire) VQ4 Negative COM AXT661-14AN-F Positive COM AXT661-13A-F VQZ Double (latching) (3 wire) Negative COM AXT661-13AN-F VQD Note) Lead wire length: 300mm Note) The parts numbers above are applicable to VQ0/1000 (2 to 16 stations) and 13 14 VQ2000 (2 to 10 stations). VQ2000 (11 to 16 stations) uses AXT661 A (N)F425. VZS VFS 3.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

-01 AS2201FG-02, AS2211FG-02 AS2301FG-02, AS2311FG-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 AS-F 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 TMH 400 200 06, 07 02 01, 23 ASD 300 50 03, 04 100 200 AS 01, 23 100 AS-FE 0 0 0 KE 5 0 10

Modular F.R.L. Units

Optional specifications Model AW20(K)-B AW30(K)-B AW40(K)-B AW40(K)-06-B AW60(K)-B Bracket assembly *1 AW23P-270AS AR33P-270AS AR43P-270AS AW62P-270AS Set nut AR23P-260S AR33P-260S AR43P-260S *2 Round type *3 Standard G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G36-4-01 G46-4-01 Round type *3 (with color zone) Standard G36-10-01-L G46-10-01-L 0.02 to 0.2 MPa setting G36-4-01-L G46-4-01-L

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-D ZS-33-F D NPN Analog 4 to 20 mA E PNP Analog 1 to 5 V Analog 0 to 10 V*3 + ZS-33-D F PNP Analog 4 to 20 mA *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.