This is a legacy product, and replaced byVM430-N01-34B VALVE, MECH L 1/8 NPT (BLACK). VALVE. VM BODY PT 1/8NPT (F). .36740 lb.

1

M5 x 0.8 NN MM C D B 0 0.3 B 0 0.3 A F NA H Z + Stroke S + Stroke NB F For details of the mounting nut, refer to page 376.

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Cylinder

Bore6:CO.5 ~ .+~ MM 4>1O, 1S:Cl n\ ~I +I." ~\ 10>1 f!-f.F F ", "I , H I' f.'5., I1tJ F E Rod end without ~ H S R thread , I Z oG H K l MM 1 s I z..q sst I lost IS" , 5" 16!J. IS'" IN 1 5" lOst ~ 15s1 ' A ... B C E F 15 12 ' 27 31 7 16.5 22.5 29 19 14 4.2 M5 x O.8 i M22 x 1.5 I 20 23.5 29.5 36 5 , 37.5 43.5 50 ' 6 'a~e size ' .rom) .

Speed Controller with

-11 AS4002F-11 AS4002F-13 AS-31B AS-32B AS-33B AS-34B AS-35B AS-34B 38 62 72 90 104 114 135 140 78 111 119 147 179 191 236 277 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 AS-33B AS-36B AS-32B AS-37B AS-38B M3 4 M3 4 AS-34B AS-36B AS-35B AS-37B AS-32B AS-34B AS-36B AS-38B AS-41B AS-42B AS-44B AS-45B M4 4 M4 4 AS-45B AS-42B AS-44B AS-47B AS-46B Precautions when options are ordered Threaded studs for

฀AS

AS4002F-11 AS4002F-13 AS-31B AS-32B AS-33B AS-34B AS-35B AS-34B 38 62 72 90 104 114 135 140 78 111 119 147 179 191 236 277 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 AS-33B AS-36B AS-32B AS-37B AS-38B M3 4 M3 4 AS-34B AS-36B AS-35B AS-37B AS-32B AS-34B AS-36B AS-38B AS-41B AS-42B AS-44B AS-45B M4 4 M4 4 AS-45B AS-42B AS-44B AS-47B AS-46B Precautionswhenoptionsareordered ThreadedstudsformanifoldarenotincludedwhenL-bracketandDINrailmountingbracketareordered.Pleaseorderthemaccordingtothenumberofstations

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

25

type F Seal material of the liquid contact parts is changed to SF7000 (Perfluoropolyether rubber).

Process Pump

bracket type With bracket which can be mounted to the back of the previous type With bracket which can be mounted to the foot at the back of the previous type Symbol Type Rc NPT G Nil N F With bracket which can be mounted to the back of the previous type: C With bracket which can be mounted to the foot at the back of the previous type: F 56 2 x M4 x 0.7 2 x 4.5 84 72 45 7 48.5 41 5 Process

Precision Regulator

Pressure gauge is shipped together, but not assembled. 811 IR1000/2000/3000 Series How to Order IR 2 0 0 02 0 Precision regulator Thread type Body size Nil N Note 2) Rc NPT Suffix 1 1 2 3 IR1000 series IR2000 series IR3000 series Nil G F For high temp. environments (5 to 100C) For low temp. environments (30 to 60C) T Note 4) Semi-standard Type of setting L Note 5), 6) 0 1 Note 1) Basic

Body Option: Standard, Style: Selector (2 Position), Suffix: Push Button Selector Color Black

Body Option: External Pilot, Style: Selector (2 Position), Suffix: Push Button Selector Color Black

Pipe Port Type: G, Rod Arm Type: -, Mounting Method: Side, Plunger Type: -, Body Shape: Block Vertical Type, Number of Ports: 3-Port, Push Button Type: -, Plumbing Type & Direction: Direct Side, Number of Switching Positions: -, Switching Operation: Selecting Knob, Nominal Designation of Piping Thread: 1/8, Valve Flow Coefficient (Cv)(mm2): 5.36, Made to order specifications: None, Suffix

Pipe Port Type: G, Rod Arm Type: -, Mounting Method: Side, Plunger Type: -, Body Shape: Block Vertical Type, Number of Ports: 5-Port, Push Button Type: -, Plumbing Type & Direction: Direct Side, Number of Switching Positions: -, Switching Operation: Selecting Knob, Nominal Designation of Piping Thread: 1/8, Valve Flow Coefficient (Cv)(mm2): 10.71, Body options: Standard, Bracket option: None

Thread: F [G(PF)], Actuator Type: 34 [Selector (2 Position)], Suffix: B (Push Button Selector Color Black)

Body Option: 0 (Standard), Thread: F (PF), Style: 34 [Selector (2 Position)], Suffix: B (Push Button Selector Color Black)

Body Option: 1 (External Pilot), Thread: F (PF), Style: 34 [Selector (2 Position)], Suffix: B (Push Button Selector Color Black)

Body Option: External Pilot, Thread: PF, Style: 34 [Selector (2 Position)], Suffix: Push Button Selector Color Black, Accessory: -

Number of Ports: 3 Port, Piping Direct., Plunger Length: Side Ported Long, Actuator Type: 34 [Selector (2 Position)], Suffix: Push Button Selector Color Black