XM, XY Stainless Steel High Vacuum Angle/In-line Valve XM, XY Series Angle type/ XM Series XY Series In-line type XY Series XM Series XLA XL XLQ Body material: SCS13 (conforms to Stainless steel 304) A precision casting, unified composition prevents accumulation of gas. The XM series is interchangeable with the XL series, aluminum high vacuum angle valve.
MHSH(J)3-32DA,B M30.5 0.6 6 40DA,B M50.8 2.8 10 50DA,B M61 4.8 12 63DA,B M81.25 12 16 80DA,B M101.5 24 20 A J/ / 8 MHS2 Nm mm MHS2-16D M40.7 2.1 8 20D M40.7 2.1 8 25D M40.7 2.1 8 32D M50.8 4.3 10 40D M61 7.3 12 50D M61 7.3 12 63D M61 7.3 12 MHS3 Nm mm MHS3-16D M30.5 0.66 4.5 20D M30.5 0.88 6 25D M40.7 1.6 6 32D M40.7 1.6 6 40D M50.8 3.2 7.5 50D M50.8 4.3 10 63D M61 5.4 9 80D M61 7.3 12 100D
0) XLA Pilot port S (for initial exhaust valve) Magnet (Option) XL Pilot port M (for main exhaust valve) Bellows holder (Material: Stainless steel 304) !
An auto switch cannot be retrofitted when a magnet is not mounted on the piston part (e.g., XLA-40-2 and XLA-40H5-2).
1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
Single vane Double vane 90, 100D 270S 180S 90S 1) e ot e g 1 n N 8 a 0 4 e g r + 2 n 7 a 4 n + 0 r + o n 0 5 0 4 N 0 ti o 0 9 ot a N ti 0 e t a e ot 0 1) o g t 1 e n e o R ) a 1 0 ot R r ) N 1 n o e 4 ti 0 + a g 0 t o n 9 R ra e n g n io ra (90) (90) at n io Chamfer ot Plate Plate Plate at R ot R Plate (45) Chamfer Chamfer Note 2) Chamfer (45) B port A port B port A port B port A port
Rod extended when energized Rod retracted when energized -X Manual Operation Ex.) 40D-A3C-4 80 D-A3C-8 50D-A3C-5 100D-A3C-10 63D-A3C-6 20Using a screwdriver or its equivalent, push the center of the rubber plug on the head of the solenoid cap of the solenoid valve. (It is not necessary to remove the rubber plug.)
Rod extended when energized Rod retracted when energized -X Manual Operation Ex.) 40D-A3C-4 80 D-A3C-8 50D-A3C-5 100D-A3C-10 63D-A3C-6 20Using a screwdriver or its equivalent, push the center of the rubber plug on the head of the solenoid cap of the solenoid valve. (It is not necessary to remove the rubber plug.)
(Example) 40D-A3C-4 50D-A3C-5 63D-A3C-6 80D-A3C-8 100D-A3C-10 When other brackets are ordered separately, order by the above part numbers. Stainless steel mounting screw kit A set of stainless steel mounting screws (with set screws) described below is available and can be used as required by the operating environment.
Example) 40D-A3C-4, 50D-A3C-5, 63D-A3C-6, 80D-A3C-8, 100D-A3C-10 To order the mounting brackets separately, use the part number shown above.
XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 1.59111 lb
Please contact us for the latest version.sales@ocaire.com XLA HIGH VACUUM VALVE. BONNEY ASSY XLA-63D-M9//. VACUUM SERIES. XLA NO SIZE RATING. 5.51155 lb. 21.
Please contact us for the latest version.sales@ocaire.com XLA HIGH VACUUM VALVE. XLA NO SIZE RATING. VACUUM SERIES. XLA NO SIZE RATING. 21.
Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 21, XLA NO SIZE RATING, 0.0242 lb
Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 6.94455 lb
Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 3.21874 lb
Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 2.87308 lb
Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 4.21082 lb
VACUUM VALVE, 21, XLA NO SIZE RATING, .00000 lb
XLA NO SIZE RATING, .00000 lb