Aluminum, High Vacuum Angle Valve, HIGH VACUUM VALVE, 0.28 lb

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

AC

control 0.05 to supply pressure Bracket Pressure gauge Silencer M5 to 2 1.15-1 E-P HYREG Series VY1 0.05 to 0.57 Pressure gauge 1.15-18 3/8 , 1/2 Cylinder acceleration/ deceleration control Applied pressure control 4 port E-P HYREG Series VY3 0.2 to 0.7 Auto balancing 1.15-29 1/4 Balance controller VY511, VYU5 1.5-2 Miniature Regulator ARJ1020F Standard Specifications Compact and lightweight (16g

ARJ1020F

Miniature Regulator ARJ1020F Standard Specifications Compact and lightweight (16g) Low cracking pressure 0.02MPa Standard model equipped with backflow function ARJ1020F Model M5 (Male thread) IN side Port size 6 4 OUT side (Applicable tube O.D.)

Options include bracket, pressure gauge, and manifold base (depending on model).Miniature regulator, ARJ1020, Compact and lightweight (16g), Low cracking pressure 0.02MPa, Standard model equipped with backflow function, Standard with built-in One-touch fittings, REGULATOR, MINI PT M5X6MM TUBE, AIRLINE EQUIPMENT, ARJ MINATURE REGULATOR, AA, ARJ M5 MODULAR (PT), .03847 lb

Options include bracket, pressure gauge, and manifold base (depending on model).Miniature regulator, ARJ1020, Compact and lightweight (16g), Low cracking pressure 0.02MPa, Standard model equipped with backflow function, Standard with built-in One-touch fittings, REGULATOR, MINI, AIRLINE EQUIPMENT, ARJ MINATURE REGULATOR, AA, ARJ M5 MODULAR (PT), .03584 lb

Options include bracket, pressure gauge, and manifold base (depending on model).Miniature regulator, ARJ1020, Compact and lightweight (16g), Low cracking pressure 0.02MPa, Standard model equipped with backflow function, Standard with built-in One-touch fittings, REGULATOR, MINI PT M5X4MM TUBE, AIRLINE EQUIPMENT, ARJ MINATURE REGULATOR, AA, ARJ M5 MODULAR (PT), .03481 lb

Options include bracket, pressure gauge, and manifold base (depending on model).Miniature regulator, ARJ1020, Compact and lightweight (16g), Low cracking pressure 0.02MPa, Standard model equipped with backflow function, Standard with built-in One-touch fittings, REGULATOR, MINI, AIRLINE EQUIPMENT, ARJ MINATURE REGULATOR, AA, ARJ M5 MODULAR (PT), .04202 lb

Options include bracket, pressure gauge, and manifold base (depending on model).Miniature regulator, ARJ1020, Compact and lightweight (16g), Low cracking pressure 0.02MPa, Standard model equipped with backflow function, Standard with built-in One-touch fittings, REGULATOR, MINIATURE, AIRLINE EQUIPMENT, ARJ MINATURE REGULATOR, AA, ARJ M5 MODULAR (PT), .03567 lb

FGX-OM-R008

30 65 130 200 Filtration Note 3) 0.01m (Filtration efficiency 99.99%) Noise level Note 3) 30dB(A) Operating temperature 5 to 45oC Maximum operating pressure Note 4) 0.1MPa Body PBT, Polyolefin, Polyurethane PP*, stainless steel*, EPDM (with fluorine coating)* Material Note 5) Gasket NBR, Stainless steel Male thread type 1 7 12 17 Plug-in type 3 6 11 16 Mass (g) One-touch fitting 5.5g 8g 16g

Miniature regulator, ARJ1020; Compact and lightweight (16g); Low cracking pressure 0.02MPa; Standard model equipped with backflow function; Standard with built-in One-touch fittings

Miniature regulator, ARJ1020; Compact and lightweight (16g); Low cracking pressure 0.02MPa; Standard model equipped with backflow function; Standard with built-in One-touch fittings

High Vacuum Angle Valve

Heater: Indicator: 418 B XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

Aluminum High Vacuum Angle Valve

Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

2

Inverter Type Circulating Fluid Temperature Controller Thermo-chiller Small Basic Type Peltier-Type Chiller Thermo-con/ Rack Mount Type Air-cooled Series HRSH Series HRSE Series HECR P .934 P .970 P .990 High Vacuum Equipment Pneumatic Instrumentation Equipment Aluminum High Vacuum Angle Valve Normal Close High Vacuum Solenoid Valve Pneumatic Instrumentation Equipment Series XSA P .1034 Series XLA

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

XLA- ∗ -F7NJ ∗ - ∗ Series

-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 9 XL*-OML0013-B 5.

XL-OMV0005

Symbol Standard Nil Optional Refer to XLA/XLC-16-2 16 Table 3 XLA/XLC-25-2 25 XLA/XLC-40-2 40 XLA/XLC-50-2 50 XLA/XLC-63-2 63 XLA/XLC-80-2 80 Note 1) Bellows assembly contains the valve seal 1.

High Vacuum L Type Valve

-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.