Valve Type: Angle Type, 2 Stage Control, Single Acting, Bellows, O-ring Seal, Flange Size: 25, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: -, Auto Switch: M9N--Solid State, Gen.
Valve Type: In-line Type, 2 State Control, Single Acting, Bellows, O-ring Seal, Flange Size: 25, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: -, Auto Switch: M9N--Solid State, Gen.
Valve Type: In-line Type, Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: -, Auto Switch: M9N--Solid State, Gen.
Valve Type: In-line Type, Double Acting, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: -, Auto Switch: M9N--Solid State, Gen.
1 Cable 0.3 mm2 x 25 cores O.D. 1.4 Lead wire color Dot marking Terminal no.
An auto switch cannot be retrofitted when a magnet is not mounted on the piston part (e.g., XLA-40-2 and XLA-40H5-2).
1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
Please contact us for the latest version.sales@ocaire.com, EXTERNAL O RING FOR XLAQ-25, VACUUM SERIES, XLA NO SIZE RATING, 2.05326 lb
Please contact us for the latest version.sales@ocaire.com, EXTERNAL O-RING FOR XLAQ-25, VACUUM SERIES, XLA NO SIZE RATING, 2.05326 lb
Please contact us for the latest version.sales@ocaire.com, EXTERNAL O-RING FOR XLAQ-25, VACUUM SERIES, XLA NO SIZE RATING, 2.05326 lb
Yes, for flange sizes 25, 40, and 50, it is available as a special order.
The auto switch is a heat-resistant type auto switch. Contact SMC for other flange sizes.
Please contact us for the latest version.sales@ocaire.com, BODY FOR XLA-25, HIGH VACUUM VALVE
Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std.
- Raw Material, Seal Material: R2 [CHEMRAZ® (SS630)], Seal Replacement: Valve Seal, Exterior Seal; In Addition for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA
Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std.
Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface; Std.
Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std.
Internal - Oxalic Acid Anodized, Seal Material: -, Seal Replacement: -, Flange Size Specification: Required for XLA
Acid Anodized, Seal Material: R1 [CHEMRAZ® (SS592)], Seal Replacement: Valve Seal, Exterior Seal; In Addition for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA
Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9P--Solid State, Gen.