smcmaintenancepartslist

Recommended length Part No. st + 118 0 2 st + 145 0 2 st + 174 0 2 st + 221 0 2 st + 272 0 2 st + 305 0 2 st + 352 0 2 st + 106 0 2 st + 125 0 2 st + 146 0 2 st + 189 0 2 st + 236 0 2 st + 270 0 2 st + 316 0 2 MY3A16-16B-st MY3A20-16B-st MY3A25-16B-st MY3A32-16B-st MY3A40-16B-st MY3A50-16B-st MY3A63-16B-st MY3B16-16B-st MY3B20-16B-st MY3B25-16B-st MY3B32-16B-st MY3B40-16B-st MY3B50-16B-st

Smooth Cylinder/Low Speed Cylinder

(n=2, 3, 4, 5) (n-2) 2 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) D-M9V 5 35 20 (n=2, 3, 4, 5) (n-2) 2 25 + 35 (n-2) 15 + 35 (n=2, 4, 6) Note 3) D-A9V 5 25 15 (n=2, 3, 4, 5) (n-2) 2 D-M9WV D-M9AV 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) 10 35 20 (n=2, 3, 4, 5) (n-2) 2 50 + 45 (n-2) D-C7 D-C80 15 + 45 (n=2, 4, 6) Note 3) 10 50 15 (n=2, 3, 4, 5) D-H7 D-H7W D-H7NF (n-2) 2 60 + 45 (n-2) 15 +

CA2

2) n = 2, 4, 6, 8 80 + 35(n2) n = 2, 4, 6, 8 90 + 35(n2) n = 2, 4, 6, 8 55 + 50(n 2) n = 2, 3, 4 75 + 50(n 2) n = 2, 4, 6, 8 80 + 50(n 2) n = 2, 4, 6, 8 90 + 50(n 2) n = 2, 4, 6, 8 Different sides D-A44C With n Same side 10 75 80 90 1 2 (Different sides and same side) With 1 85 90 95 105 15 80 D-Z7/Z80 D-Y59/Y7P D-Y7W 15 + 40 (n 2) 2 n = 2, 4, 6, 8 80 + 40 (n 4) 2 n = 4, 8, 12, 16

Air Cylinder

) (n = 2, 4, 6, 8) 1 10 75 80 90 Different surfaces 20 55 75 80 90 Same surface 20 + 35 (n 2) 75 + 35 (n 2) 80 + 35 (n 2) 90 + 35 (n 2) Different surfaces D-A44C (n = 2, 3, 4) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) O 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n 2) 90 + 50 (n 2) Same surface (n = 2, 3, 4) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) 1 10 75 80 90 2 (Different

CL

1/2 8 11 11 13 16 With rod boot CLAL40SCLA40, #2 (#1+#2+#11) CLAL50SCLA50, #2 (#1+#2+#11) CLAL63SCLA63, #2 (#1+#2+#11) CLAL80SCLA80, #2 (#1+#2+#11) CLAL100SCLA100, #2 (#1+#2+#11) Without rod boot Bore (mm) l 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke Y h 59 66 66 80 81 f 11.2 11.2 11.2 12.5 14.0 e 43 52 52 65 65 ZZ 244 266 290 339 358 H 51 58 58 71 72 ZZ 252 274 298 348 367 40

Combination Cylinder

Same side Same side 110C K Heat resistant tarpaulin D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 15 50+45(n2) 50 10 Max. ambient temperature for rod boot n2 2 15+45( ) (n=2, 4, 6) 15 60+45(n2) 60 10 n2 2 15+50( ) (n=2, 4, 6) 15 65 10 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 20 65 10 n2 2 D-B5 D-B6 15+50( ) (n=2, 4, 6) 15 75 10 75+55(n2) n2 2 20+50( ) (n=2, 4, 6) D-B59W 20 75

CV/MVGQ

n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 90 + 50 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 Different sides CE2 D-A44 n Same side ML2B 10 20 100 75 80 90 100 100 100 100 100 100 1 Different sides C J G5-S 2 Same side D-A3C D-G39C D-K39C 20 + 35 (n 2) n = 2, 3, 4 100 + 35 (n 2) n = 2

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

M5 x 0.8 (Relief port) 2 x 2 x 6.5 counterbore M4 x 0.7 effective depth 8 (Piping port) 2 x 2 x M4 x 0.7 effective depth 7 Note 2) 38 2 x 3.5 through 8 29 20 0.5 Flat washer 6 10 4 4 20 27 + Stroke 3.5 29 30.5 + Stroke 20 2 x 2 x 9 counterbore M5 x 0.8 effective depth 7 18 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 5.5 2 x 2 x M6 x 1.0 effective depth 10 Note 3) 2 x 5.4 through

I

from the VY Valve. 02 14 2.0 3 03 38 3.3 body Ported Type 04 12 3.9 Terminal Designations are as follows: 04 12 7.2 5 06 34 8.9 1 = 24v Power Supply 2 = Control Signal 3 = Common Negative for both power and signal. 10 1 10 5% 2% + -2% 7 10 1 114 17 12 114 18 9 14 112 2 33 20 2 37 Courtesy of Steven Engineering, Inc. !

High Vacuum Angle Valve

0.28 5 XLA-25-2 50 121 0.47 14 B XLA-40-2 65 171 1.1 45 XLA-50-2 70 185 1.8 80 XLA-63-2 88 212 3.1 160 A XLA-80-2 90 257 5.1 200 *1 The same for all series Minimal outgassing Low outgassing makes it possible to use a lower capacity pump and also shorten exhaust time.

Aluminum High Vacuum Angle Valve

Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

2

(See Fig. 2.)

XL

Indicator: 6 High Vacuum Angle Valve Series XLA, XLAV Dimensions (mm) 1in = 25.4mm (b) XLA/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) Heater (optional) H B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 E Note 1) B 103 113 158 170 196 235 A 40 50 65 70 88 90 Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 12 11 11

High Vacuum Angle Valve

0.28 5 XLA-25-2 50 121 0.47 14 B XLA-40-2 65 171 1.1 45 XLA-50-2 70 185 1.8 80 XLA-63-2 88 212 3.1 160 A XLA-80-2 90 257 5.1 200 *1 The same for all series Minimal outgassing Low outgassing makes it possible to use a lower capacity pump and also shorten exhaust time.

High Vacuum Angle Valve, XL Series

Indicator: 6 High Vacuum Angle Valve Series XLA, XLAV Dimensions (mm) 1in = 25.4mm (b) XLA/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) Heater (optional) H B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 E Note 1) B 103 113 158 170 196 235 A 40 50 65 70 88 90 Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 12 11 11

Flange Size: 25, Flange Type: KF(NW), Port Direction: L (w/o Indicator, Rear Flange Surface)

Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

XLA- ∗ -F7NJ ∗ - ∗ Series

) C D J 4 C E E Body (Material: A6063) (KF flange) (K flange) Fd fn Heater (Option) Auto switch (Option) G H B A A Unit: mm Model n Fd XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200

XLA Series

(KF flange) Fd Fn Heater (option) Auto switch (option) H G B A A Unit: mm Model A B C D E Fn Fd G H XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 10 XL*-OMI0009-E

High Vacuum L Type Valve

30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.