Compact and Lightweight

AS-25L ZH13/15DA Applicable thread size: M4 AS-30L ZH18/20DA Applicable thread size: M4 L-bracket wDIN Rail Mounting Bracket1 Part no. Applicable model Note Quantity AS-10D ZH05/07/10DA Applicable thread size: M3 1 pc. AS-25D ZH13/15DA Applicable thread size: M4 AS-30D ZH18/20DA Applicable thread size: M4 1 DIN rail is not included. It should be provided by the customer.

1

9 45 18 38 10 65 150 3 x 16l 32 9 45 38 18 10 65 152 4 x 24l 40 12 50 38 55 13 83 200 Series CA2 (CBA2, CV3, CVS1) Hole: NDH10 Shaft: NDd9 Spring pin ZZ + Stroke H10 d9 NZ ND L1 RR1 H ZZ PY PX NX Bore size (mm) Spring pin +0.070 0 +0.070 0 +0.070 0 +0.070 0 +0.084 0 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.065 0.117 +0.3 +0.1 16 4 x 24l 40 12 13 51 192 84 11 38 55 +0.3 +0.1 4 x 25l

MLU

D2) Screw a manual unlocking bolt (a conventional bolt of 25, 32: M3 x 0.5 x 25l or more, 40, 50: M4 x 0.7 x 35l or more) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (rod side) to unlock. 2) Screw a manual unlocking bolt (a conventional bolt of 25, 32: M3 x 0.5 x 25l or more, 40, 50: M4 x 0.7 x 35l or more) into the lock ring threads

Speed Controller with

Applicable series AS-12L AS-10L AS-20L AS-25L AS-30L AS-40L AS-10D AS-20D AS-25D AS-30D AS-40D AS1002F-02 AS1002F AS2002F AS2052F AS3002F AS4002F AS1002F AS2002F AS2052F AS3002F AS4002F DIN rail mounting bracket L-bracket Prepare DIN rail by user. Bracket for AS1002F-02 is not available.

Speed Controller with

Applicable model AS-10L AS1002Fm AS-20L AS2002Fm AS-25L AS2052Fm AS-30L AS3002Fm AS-40L AS4002Fm Part no.

MHC2

MHQ MHL2 MHC2-25l MHR MHK MHS MHC2 MHT2 MHY2 MHW2 MRHQ Auto switch Note) When signal acting type is used, one side port is bleed port and adjusting needle for finger speed is not attached. When auto switch is used, through hole mounting type is not available.

Series MXQ Air Slide Table

/Symmetric Type 114 Air Slide Table Series MXQ Dimensions MXQ 25L/Symmetric Type 115 Series MXQ Air Slide Table Auto Switch/Proper Mounting Position at Detection of Stroke End 116 Air Slide Table Series MXQ Made To Order 117

High Vacuum Angle Valve

Heater: Indicator: 418 B XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

Aluminum High Vacuum Angle Valve

Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

2

Inverter Type Circulating Fluid Temperature Controller Thermo-chiller Small Basic Type Peltier-Type Chiller Thermo-con/ Rack Mount Type Air-cooled Series HRSH Series HRSE Series HECR P .934 P .970 P .990 High Vacuum Equipment Pneumatic Instrumentation Equipment Aluminum High Vacuum Angle Valve Normal Close High Vacuum Solenoid Valve Pneumatic Instrumentation Equipment Series XSA P .1034 Series XLA

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

High Vacuum L Type Valve

-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF(NW), Port Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Non-standard

Valve Type: XMC (Angle Type, Double Acting, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Port Direction: L (w/o Indicator, Rear Flange Surface; Indicator Std, Rear Flange Surface), Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: , Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (or None in the Case of No Auto Switch), Number: A [2 pcs (Valve

Valve Type: Double Acting, Bellows Seal, Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -, Body Surface

Valve Type: Angle Type, Double Acting, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Port Direction: w/o Indicator, Rear Flange Surface; Indicator Std, Rear Flange Surface, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: -, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (or None in the Case of No Auto Switch), Number: A [2 pcs (Valve Open