XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 21, XLA NO SIZE RATING, 0.0198 lb

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 21, XLA NO SIZE RATING, 0.0198 lb

MXS

2 2 2 2 2 4 4 Refer to "Dimensions" of MXS 12 on p.3.11-17 for one with shock absorber as symmetric.

VACUUM VALVE, 21, XLA NO SIZE RATING, .00000 lb

XLA NO SIZE RATING, .00000 lb

This is a legacy product, and replaced byXLA-50GH4-2, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING

This is a legacy product, and replaced byXLA-50H5-2, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 4.25529 lb

Process Valve: 2 Port Valve For Flow Control VNB Series

consult with SMC. 2 15A 1 2 15 14 3 20 16 20A 3 4 25 4 25A 1 Nil: Non-locking push type Valve size 5 to 7 32A 22 11 4 5 32 1 B 32F 22 32 28 40 6 28 40 1 4 Flange 11 2 40A Note) Semi-standard 1 2 1 B 40F Flange Electrical entry/With light/surge voltage suppressor 2 50A 33 Symbol Electrical entry Valve size 1 to 4 Valve size 5 to 7 7 50 2B 50F 33 50 Flange G GS E EZ T TZ D DZ Grommet Grommet

Coolant Valve: Air Operated/External Pilot Solenoid VNC Series

. 20 (14) 3 25 (16) 4 1 1 1 4 32 (22) 5 1 B 1 4 Flange 32F Nil: Non-locking push type 40A 1 1 2 Valve size 2 to 9 40 (28) 6 1 B 1 2 Flange 40F 2 50A 50 (33) 7 50F 2B Flange Semi-standard 2 B 1 2 Flange 65F 65 (45) 8 Electrical entry/With light/surge voltage suppressor 3B Valve size 1 Valve size 2 to 9 80F 80 (56) 9 Flange Electrical entry Symbol Values in parentheses are N.C. at 1 MPa.

Option Nil B ∗ None With bracket L With indicator (visual verification of operation) BL ∗ With bracket and indicator (visual verification of operation) 1 1 Port size Rc 1 8 1 4 3 8 3 8 1 2 3 4 1 4 1 1 2 1 1 4 B Flange 1 1 2 B Flange 2B Flange Rc G NPT NPT

Valve size 1: VN1-A16 (with thread) Valve size 2 to 4: VN-16 Valve size Port size Valve type 2 to 4 Port size Rc Orifice dia. (mm) Symbol Symbol Symbol 0 2 4 N.C. N.O. N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 3 25 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 50 7 2B Flange 634

XLGR Series

(Pilot port 2 opens) The valve leaves from the body seat to open by applying pressure to the pilot port 2. (Open pilot port 1) 2. Bypass valve The valve leaves from the body seat to open up to the set value by applying pressure to the pilot port 3. The valve returns to the original position by releasing air pressure of the pilot port 3. 5-2.

Smooth Vent Valve

Description Part no. 1 Bonnet assembly XVD2-02A-30-1 XVD2-02V-30-2 (For VCR) 2 Body assembly XVD2-02S-30-2 (For Swagelok) 3 Exterior seal AS568-024V 526

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, EXTERNAL SEAL, VACUUM SERIES, XLA HIGH VACUUM VALVE, 21, XLA NO SIZE RATING, .00088 lb

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, EXTERNAL SEAL (XLA-40), VACUUM SERIES, XLA NO SIZE RATING, .01980 lb

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, EXTERNAL SEAL, XLAV, VACUUM SERIES, XLA HIGH VACUUM VALVE, 21, XLA NO SIZE RATING, .02840 lb

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, EXTERIOR SEAL FOR XLA-40, VACUUM SERIES, XLA NO SIZE RATING, .01980 lb

Series XLA-2 are high vacuum angle valves for use in industrial applications employing high vacuum and process gases.  Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  XLA-2 valves are single-acting, normally closed, with a bellows seal over the shaft and spring.  

C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 200 VAC (50/60 Hz)2.1 A5 A180/200 W 50/60 Hz220 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?

C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 230 VAC (50/60 Hz)4.8 A10 A385/440 W 50/60 Hz420 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?