Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Right Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator:

CE2

Description Material 40 NLP-40A PDU-16Z PSD-22 x 16 P44 DSM-20 CA40-1606 CA40-1601 P3 50 NLP-50A PDU-20Z PSD-27 x 20 P50 DSM-25 CA63-1608 CA50-1602 P3 63 NLP-63A PDU-20Z PSD-27 x 20 P60 DSM-25 CA63-1608 CA63-1603 P3 100 NLP-100A PDU-30Z PSD-38 x 30 P90 DSM-35 CA100-1610 CA100-1605 P5 Piston seal Rod seal A Rod seal B Brake piston seal Cushion seal Piston gasket Tube gasket Cushion valve seal

Table of Contents

Description Material 40 NLP-40A PDU-16Z PSD-22 x 16 P44 DSM-20 CA40-1606 CA40-1601 P3 50 NLP-50A PDU-20Z PSD-27 x 20 P50 DSM-25 CA63-1608 CA50-1602 P3 63 NLP-63A PDU-20Z PSD-27 x 20 P60 DSM-25 CA63-1608 CA63-1603 P3 100 NLP-100A PDU-30Z PSD-38 x 30 P90 DSM-35 CA100-1610 CA100-1605 P5 Piston seal Rod seal A Rod seal B Brake piston seal Cushion seal Piston gasket Tube gasket Cushion valve seal

Soft Start-up Valve

CAT.ES40-63A AV2000-A/3000-A/4000-A/5000-A Series Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series Improved flow rate characteristics *1: Up to 2.3 times 2(A) C[dm 3/(sbar)]: 9.2 Fill time: Up to 50% shorter (P)1 3(R) *1 For high speed air supply C[dm 3/(sbar)] Body size AV-A Current model Low speed air supply High speed air supply Pressure in the tank New New 20 9.2 4 AV2000-A Current

Size, Body, Valve Type: 63A (Size: 3; Body Mat'l: C37; Port Size: 1/4; Orifice Dia: 5, N.O.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread)

Size, Body, Valve Type: 63A (Size: 3; Body Mat'l: C37; Port Size: 1/4; Orifice Dia: 5, N.O.), Voltage and Electrical Entry: C (110VAC; Grommet w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread)

Size, Body, Valve Type: 63A (Size: 3; Body Mat'l: C37; Port Size: 1/4; Orifice Dia: 5, N.O.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread), Bracket Interchangeable w/Old Type: XB (Yes)

Size, Body, Valve Type: 63A (Size: 3; Body Mat'l: C37; Port Size: 1/4; Orifice Dia: 5, N.O.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2K (24VDC; Conduit Terminal w/Surge Voltage Suppressor & Light), Other Options: Rc, Bracket Interchangeable w/Old Type: XB (Yes)

Size, Body, Valve Type: 63A (Size: 3; Body Mat'l: C37; Port Size: 1/4; Orifice Dia: 5, N.O.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2A (24VDC; DIN Terminal w/Surge Voltage Suppressor & Light), Other Options: B (NPT Thread), Bracket Interchangeable w/Old Type: XB (Yes)

SEAL,NLP-63A,NBR

2

Inverter Type Circulating Fluid Temperature Controller Thermo-chiller Small Basic Type Peltier-Type Chiller Thermo-con/ Rack Mount Type Air-cooled Series HRSH Series HRSE Series HECR P .934 P .970 P .990 High Vacuum Equipment Pneumatic Instrumentation Equipment Aluminum High Vacuum Angle Valve Normal Close High Vacuum Solenoid Valve Pneumatic Instrumentation Equipment Series XSA P .1034 Series XLA

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

High Vacuum L Type Valve

-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

An auto switch cannot be retrofitted when a magnet is not mounted on the piston part (e.g., XLA-40-2 and XLA-40H5-2).

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Please contact us for the latest version.sales@ocaire.com, HIGH VACUUM VALVE, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 6.78855 lb

XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 1.59111 lb