SMC Corporation of America
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0.2% of full span Repeatability Within 0.5% of full span Linearity Within 1% of full span Note 3) Bleed port: 9.5l/min (ANR) or less (supply pressure: 1.0MPa) Exhaust port: 2l/min (ANR) or less (at maximum set pressure) Bleed port: 9.5l/min (ANR) or less (supply pressure: 1.0MPa) Exhaust port: 2l/min (ANR) or less (at maximum set pressure) 4l/min (ANR) or less (supply pressure: 1.0MPa) 3l

hlog l{0, u'lodel) A A, I D t l H K (tR)Otlll l.5ilr I 144 162 5l |il4z x 1.5 t3 38 44 9Z 46 'Jl 32 (1Rl0tl,ll.5lllx2 r95 213 5t M42 x 1.5 t3 38 44 E 59 3l 45 0 tl.5tlx3 246 ?64 5l M4? x 1.5 l3 38 44 143 37 (LR)0Iil2.0llx2 226 243 t3 M64x2 t9 50 57 140 70 48 50 0Ifi2.0Sx4 328 345 1164 x 2 t9 50 57 l9l 96 48 t6 0t 2.0tlxd 456 413 73 M 6 4 x ?

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 piping adapter ZS-46-N1 NPT1/8 piping adapter ZS-46-N2 7

+0.1MPa Note 2) Air is always bleeding to atmosphere Regulating 3000: 0.01~0.2MPa 0.005~0.8MPa 0.01~0.8MPa Pressure 3010: 0.01~0.4MPa Range 3020: 0.01~0.8MPa Sensitivity 0.2% FS Max H O W T O O R D E R P R E C I S I O N R E G U L AT O R S E R I E S IR1/2/3000 Repeatability +0.5% FS Max Air Supply Pressure at 1MPa <9.5l/min (Bleed P) <4l/min <9.5l/min Consumption at 0.7MPa <2l/min (EXH) <3l

+0.1MPa Note 2) Air is always bleeding to atmosphere Regulating 3000: 0.01~0.2MPa 0.005~0.8MPa 0.01~0.8MPa Pressure 3010: 0.01~0.4MPa Range 3020: 0.01~0.8MPa Sensitivity 0.2% FS Max H O W T O O R D E R P R E C I S I O N R E G U L AT O R S E R I E S IR1/2/3000 Repeatability +0.5% FS Max Air Supply Pressure at 1MPa <9.5l/min (Bleed P) <4l/min <9.5l/min Consumption at 0.7MPa <2l/min (EXH) <3l

Response time Liie VOZ]000I0 rns -l VOZ2000 l2 ms 1 200 rfillion VoZsooo ls ms -l cYcres DIN rail mounting 3 Port Solenoid Valve Metal Seal/Rubber Seal 5 Port Solenoid Valve Metal Slsal/Rubber Seal Base Mounted Up to 063 0 . 1 7 0 3 3 0.39 0 4 5 o.3l 0 r 0 0 4 5 0.56 N C Vdlve Base Mounted N C .

Series XLAV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases.  Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  XLAV valves are single-acting, normally closed, with a bellows seal over the shaft and spring.  

Series XLAV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases.  Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  XLAV valves are single-acting, normally closed, with a bellows seal over the shaft and spring.  

standard stroke Slide bearing, Ball bushing bearing Refer to the SMC Clean Series catalog for dimensions. 8-28-22 22 Series CXSJ Dual Rod Cylinder: Compact Type Dimensions: 6 Standard Piping 4-M3 x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 MX 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 MTS 20.5 5.5 MY Stroke 42 + Stroke CY 5.5 4.5 13.4 32 + Stroke MG 5 + Stroke 12 2.75 11 1.2 M3 x 0.5 x 3l

Bolt holder (movable) Approx. 0.5 or less 77 Dual rod cylinder/Compact type CXSJ 2122CXSJ/ 1112Dimensions / 6 10 9+ST 4-M3 x 0.5 thread depth 3.5 8 2.7 6.7 2-M3 x 0.5 thread depth 3 (Piping port) Steel ball 4.5 15 M3 x 0.5 thread depth 3.5 Vacuum suction port 24.5 25 Note) 11-, 22: Vacuum suction port 12-, 21: Relief port ST 13.4 47+ST 11 1.2 37+ST 5.5 4.5 10+ST 3.8 3.8 11 2.75 M3 x 0.5 x 3L

Applicable crimp-style terminal 1.25Y-3L, 1.25-3.5S, 1.25-4M CC RB J D-X 20Data 10-20-69 70 Technical Data 2: How to Mount and Move the Auto Switch Mounting Bracket Band Mounting Style Caution Reed switchD-C73, D-C76, D-C80, D-C73C, D-C80C Solid state switchD-H7A1, D-H7A2, D-H7B, D-H7BAL D-H7C, D-H7NF, D-H7NW, D-H7PW, D-H7BW 1.

Applicable crimp-style terminal 1.25Y-3L, 1.25-3.5S, 1.25-4M Data 6-16-63 64 Technical Data 2: How to Mount and Move the Auto Switch Mounting Bracket Band Mounting Style Caution Reed switchD-C73, D-C76, D-C80, D-C73C, D-C80C Solid state switchD-H7A1, D-H7A2, D-H7B, D-H7BAL D-H7C, D-H7NF, D-H7NW, D-H7PW, D-H7BW 1.

Applicable crimp-style terminal 1.25Y-3L, 1.25-3.5S, 1.25-4M 7-9-39 40 Technical Data 2: How to Mount and Move the Auto Switch Mounting Bracket Band Mounting Style Caution Reed switchD-C73, D-C76, D-C80, D-C73C, D-C80C Solid state switchD-H7A1, D-H7A2, D-H7B, D-H7BAL D-H7C, D-H7NF, D-H7NW, D-H7PW, D-H7BW 1.

Applicable crimp-style terminal 1.25Y-3L, 1.25-3.5S, 1.25-4M 8-30-55 56 Technical Data 2: How to Mount and Move the Auto Switch Mounting Bracket Band Mounting Style Caution Reed switchD-C73, D-C76, D-C80, D-C73C, D-C80C Solid state switchD-H7A1, D-H7A2, D-H7B, D-H7BAL D-H7C, D-H7NF, D-H7NW, D-H7PW, D-H7BW 1.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M3 x 0.5 x 3l (Hexagon socket head set screw) M8 x 1.25 x 7.5l (Bolt holder) CX 0.5 D-X 25 0.2 25 0.2 5.3 5.3 16 32 31 20Data 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through M2.5 x 0.45 x 6l (Hexagon

The manual lever (1.6 x 35l, tip part: M1.6 x 0.35 x 3l) is included with the cylinder. If additional manual levers are required, use the following part number to place an order: CXS06-48BK2777 (for all series). 8-29-19 20 Series CXS Construction: Slide Bearing CXSM6 q e r u !

Applicable crimp-style terminal 1.25Y-3L, 1.25-3.5S, 1.25-4M 9-15-69 70 Technical Data 2: How to Mount and Move the Auto Switch Mounting Bracket Band Mounting Style Caution Reed switchD-C73, D-C76, D-C80, D-C73C, D-C80C Solid state switchD-H7A1, D-H7A2, D-H7B, D-H7BAL D-H7C, D-H7NF, D-H7NW, D-H7PW, D-H7BW 1.

Applicable crimp-style terminal 1.25Y-3L, 1.25-3.5S, 1.25-4M 8-30-55 56 Technical Data 2: How to Mount and Move the Auto Switch Mounting Bracket Band Mounting Style Caution Reed switchD-C73, D-C76, D-C80, D-C73C, D-C80C Solid state switchD-H7A1, D-H7A2, D-H7B, D-H7BAL D-H7C, D-H7NF, D-H7NW, D-H7PW, D-H7BW 1.

Applicable crimp-style terminal 1.25Y-3L, 1.25-3.5S, 1.25-4M 8-30-55 56 Technical Data 2: How to Mount and Move the Auto Switch Mounting Bracket Band Mounting Style Caution Reed switchD-C73, D-C76, D-C80, D-C73C, D-C80C Solid state switchD-H7A1, D-H7A2, D-H7B, D-H7BAL D-H7C, D-H7NF, D-H7NW, D-H7PW, D-H7BW 1.

Applicable crimp-style terminal 1.25Y-3L, 1.25-3.5S, 1.25-4M 8-30-55 56 Technical Data 2: How to Mount and Move the Auto Switch Mounting Bracket Band Mounting Style Caution Reed switchD-C73, D-C76, D-C80, D-C73C, D-C80C Solid state switchD-H7A1, D-H7A2, D-H7B, D-H7BAL D-H7C, D-H7NF, D-H7NW, D-H7PW, D-H7BW 1.