Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Bore size (mm) 23 25 26 27 28 Retaining plate gasket Wiper ring Rod seal Piston seal Valve seal Tube gasket NLP-125A CS1Q125A-PS SFR-36K 125 P7 C120 G55 PNY-36 NLP-140A CS1Q140A-PS SFR-36K 140 P7 C135 G55 PNY-36 NLP-160A CS1Q160A-PS SFR-40K 160 P7 C155 G55 PNY-40 6-9-6 7 Air Cylinder: With Auto Switch Double Acting, Single Rod Series CDS1 125, 140, 160, 180, 200 How to Order CJ1 CDS1 L 300

Table of Contents

EVS Applicable terminal: 1.25-3.5M, 1.25Y-3L, 1.25-3M Although A, B+ and B marks are indicated on the terminal block, VFR5000 can be used as either +COM or COM.

VFR

EVS Applicable terminal: 1.25-3.5M, 1.25Y-3L, 1.25-3M Although A, B+ and B marks are indicated on the terminal block, VFR5000 can be used as either +COM or COM.

VFS

VS4 Terminal block marking AC and 100 VDC or more Applicable terminal: VFS3000: 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S VFS4000: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M VFS5000: 1.25-4, 1.25-4M VFS6000: 1.25-3.5M, 1.25Y-3L, 1.25-3M There is no polarity. Tightening torque for terminal: 0.6 Nm Non plug-in type (With terminal) Remove cover (1), over terminal block (2) attached to the inside of body.

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 110 VAC, 50/60 Hz, Electrical Entry: L Type Plug Connector, Surge Suppressor

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 110 VAC, 50/60 Hz, Electrical Entry: L Type Plug Connector, Surge Suppressor

High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

Aluminum High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

XL

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

High Vacuum Angle Valve, XL Series

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

Table of Contents

The manual lever (1.6 x 35l, tip part: M1.6 x 0.35 x 3l) is included with the cylinder. If additional manual levers are required, use the following part number to place an order: CXS06-48BK2777 (for all series). 8-29-19 20 Series CXS Construction: Slide Bearing CXSM6 q e r u !

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

. *2 Fixed unit: kPa, MPa y Option 2 t Option 1 r Piping specification Symbol Description Nil None Symbol Description Nil Without lead wire Symbol Description M5 female thread ZS-46-A1 ZS-46-3L M5 Lead wire with connector (3-core, 2 m lead wire) A1 Bracket A (Vertical mounting) Piping port L Without waterproof cover R1/8 ZS-46-A2 01 * For the lead wire with M12 connector, refer to p. 38.

Title not found

(800) 526-7661 Parallel Run LTees 3/8 7/16 1/4 5/16 5/16 1/4 5/16 1/4 8 T1-L1-1 T4-L4-4 T3-L3-3 T2-L2-2 Parallel Run Reducing LTees 3/8 5/16 5/16 5/16 3/4 15/16 5/16 5/16 5/16 5/16 5/16 5/16 1/4 1/4 MEM 27/32 5/8 5/8 3/4 9 RT3-2L-2 RT3-2L-3 RT4-3L-4 RT1-3L-1 RT3-1L-1 RT2-3L-2 1 11/16 Crosses 1/2 15/16 5/16 5/16 11/16 15/16 MEM 1/4 27/32 1 1 33/64 5/8 15/16 3/8 11/16 1 1/8 1/4 5/8 27/32

XLAQ/XLDQ

Chemraz Example) XLDQ-40K-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 The material for the sliding parts of the S valve is FKM.

Soft Start-up Valve

Using a regulator in the outlet side When mounting a regulator in the outlet side (A port side), use a residual pressure relief regulator (AR25K to 40K) or a check type regulator. With a standard regulator (AR10 to 60), the outlet side pressure may not be released when this valve is exhausted. 4.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Note 2) For the 10-/21-AR20-B only, the position of the pressure gauge is above the center of the piping. 1077 A 1021-ARK-B Regulator with Backflow Function Dimensions AR20K-B to 40K-06-B 10212 x P1 (Port size) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R.

Series 10-, 21- AW-B Filter Regulator

Fittings & Tubing Air Cylinders Rotary Actuators F Y R Applicable tubing 6/4 W C Q V BB IN OUT OUT K H IN Z P2 Plate thickness 10-/21-AW20K-B: Max. 3.5 (Pressure gauge port size) Pressure gauge (Option) 2 x P1 (Port size) B Hexagon width across flats 14 Clearance for maintenance G Drain 1/8 CC A AW30K-B to 40K-06-B 1021J J D M S N T Bracket (Option) U F Panel fitting dimension R Applicable