Valve Type: Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: G [Grommet

Valve Type: Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 1 pc, Valve Closed, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Bore size (mm) 23 25 26 27 28 Retaining plate gasket Wiper ring Rod seal Piston seal Valve seal Tube gasket NLP-125A CS1Q125A-PS SFR-36K 125 P7 C120 G55 PNY-36 NLP-140A CS1Q140A-PS SFR-36K 140 P7 C135 G55 PNY-36 NLP-160A CS1Q160A-PS SFR-40K 160 P7 C155 G55 PNY-40 6-9-6 7 Air Cylinder: With Auto Switch Double Acting, Single Rod Series CDS1 125, 140, 160, 180, 200 How to Order CJ1 CDS1 L 300

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iable x43O'X440 .ot avai able wirh AW10 and AW20 NoreJ AWl0 @mes wth a rrack llow medranEm 6 a sla.dad lealure f the set pressure E below o 15MPa back iow may nol occur When a back f,tu m6hmm is requred wrlh a set p$ure or e$ thm 0l5l Pa Optional specif ications NPT AW10 AW20 (K) to 40 Nole 1) Dra n glide s NPT 1i4 (appr @ble to AVJ3oK and 40K), an'i lhe exhaust portlofauto d@ n cmes w lh

High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

Aluminum High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

XL

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

High Vacuum Angle Valve, XL Series

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

XLAQ/XLDQ

Chemraz Example) XLDQ-40K-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 The material for the sliding parts of the S valve is FKM.

Soft Start-up Valve

Using a regulator in the outlet side When mounting a regulator in the outlet side (A port side), use a residual pressure relief regulator (AR25K to 40K) or a check type regulator. With a standard regulator (AR10 to 60), the outlet side pressure may not be released when this valve is exhausted. 4.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Note 2) For the 10-/21-AR20-B only, the position of the pressure gauge is above the center of the piping. 1077 A 1021-ARK-B Regulator with Backflow Function Dimensions AR20K-B to 40K-06-B 10212 x P1 (Port size) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R.

Series 10-, 21- AW-B Filter Regulator

Fittings & Tubing Air Cylinders Rotary Actuators F Y R Applicable tubing 6/4 W C Q V BB IN OUT OUT K H IN Z P2 Plate thickness 10-/21-AW20K-B: Max. 3.5 (Pressure gauge port size) Pressure gauge (Option) 2 x P1 (Port size) B Hexagon width across flats 14 Clearance for maintenance G Drain 1/8 CC A AW30K-B to 40K-06-B 1021J J D M S N T Bracket (Option) U F Panel fitting dimension R Applicable

l

Material Note No. 125 140 160 Description Mat'l CG1 CG1 Wiper ring Cushion seal Black coated Black coated Hard anodized Hard chrome plated Chromated Hard chrome plated Black coated Rod cover Head cover Rolled steel plate Rolled steel plate Aluminum alloy SFR-36K DSM-50S PNY-36 NLP-125A P7 C120 SFR-36K DSM-50S PNY-36 NLP-140A P7 C135 G25 G55 N-12.5-1.5 SFR-40K DSM-50S PNY-40 NLP-160A P7 C155

Regulator AW10-A to AW40-A· P. 259 Filter Regulator AW20-B to AW60-B· P. 259 Filter Regulator With Backflow Function AW20K-B to AW60K-B· P. 260 Mist Separator Regulator AWM20 to AWM40· P. 260 Micro Mist Separator Regulator AWD20 to AWD40· P. 262 Filter Regulator With Built-in Pressure Gauge AWG20/30/40· P. 263 Filter Regulator With Built-in Pressure Gauge With Backflow Function, AWG20K/30K/40K

.· Type with the backflow function (ARP20K/30K/40K) can be installed between solenoid valves and cylinders.· Specifications with a backflow function feature an inbuilt mechanism for quickly and reliable exhausting the air-pressure at the outlet side.

SMC's ARG20K, 30K, 40K Regulator With Built-In Pressure Gauge With Backflow Function.Features · Improved visibility of the pressure gauge at various mounting locations.· Built-in function to reliably exhaust air pressure from the outlet side to the inlet side.

Size, Body, Valve Type: 40K (Size: 1; Body Mat'l: Resin; Port Size ø6 One-touch Fitting; Orifice Dia: 5, N.O.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor)

Size, Body, Valve Type: 40K (Size: 1; Body Mat'l: Resin; Port Size ø6 One-touch Fitting; Orifice Dia: 5, N.O.), Voltage and Electrical Entry: Q (200VAC; Conduit Terminal w/Surge Voltage Suppressor)

Size, Body, Valve Type: 40K (Size: 1; Body Mat'l: Resin; Port Size ø6 One-touch Fitting; Orifice Dia: 5, N.O.), Voltage and Electrical Entry: F (24VDC; Grommet w/Surge Voltage Suppressor)