Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface), Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: G [Grommet (Lead Wire

High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

Aluminum High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

XL

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

High Vacuum Angle Valve, XL Series

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3140-5G 3 sets (Single solenoid part no.) SY5140-5G 2 sets (Single solenoid part no.)

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

-60-04U 1 set (Type 60, 4-station manifold base part no.) 10-SY3260-5G-C6 2 sets (Double solenoid part no.) 10-SY3160-5G-M5 2 sets (Single solenoid part no.)

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 1 pc, Valve Closed, Voltage: 24 VDC, Electrical Entry: G [Grommet

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: C (1 pc, Valve Closed), Voltage: 5 (24 VDC), Electrical

SX

SX3240-5G 2 sets (Double solenoid part no.) SX3140-5G 2 sets (Single solenoid part no.) SY3000-26-9A 1 set (Blanking plate assembly part no.) One-touch fitting for 1/4" N7 One-touch fitting for 5/16" N9 SX5000 Type 42 (Common external pilot type) The asterisk denotes the symbol for assembly.

SY

SY3140-5G . 2 sets (Single solenoid part no.) SY3240-5G . 2 sets (Double solenoid part no.)

XLAQ/XLDQ

Chemraz Example) XLDQ-40K-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 The material for the sliding parts of the S valve is FKM.

Soft Start-up Valve

Using a regulator in the outlet side When mounting a regulator in the outlet side (A port side), use a residual pressure relief regulator (AR25K to 40K) or a check type regulator. With a standard regulator (AR10 to 60), the outlet side pressure may not be released when this valve is exhausted. 4.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Note 2) For the 10-/21-AR20-B only, the position of the pressure gauge is above the center of the piping. 1077 A 1021-ARK-B Regulator with Backflow Function Dimensions AR20K-B to 40K-06-B 10212 x P1 (Port size) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R.

Series 10-, 21- AW-B Filter Regulator

Fittings & Tubing Air Cylinders Rotary Actuators F Y R Applicable tubing 6/4 W C Q V BB IN OUT OUT K H IN Z P2 Plate thickness 10-/21-AW20K-B: Max. 3.5 (Pressure gauge port size) Pressure gauge (Option) 2 x P1 (Port size) B Hexagon width across flats 14 Clearance for maintenance G Drain 1/8 CC A AW30K-B to 40K-06-B 1021J J D M S N T Bracket (Option) U F Panel fitting dimension R Applicable

l

Material Note No. 125 140 160 Description Mat'l CG1 CG1 Wiper ring Cushion seal Black coated Black coated Hard anodized Hard chrome plated Chromated Hard chrome plated Black coated Rod cover Head cover Rolled steel plate Rolled steel plate Aluminum alloy SFR-36K DSM-50S PNY-36 NLP-125A P7 C120 SFR-36K DSM-50S PNY-36 NLP-140A P7 C135 G25 G55 N-12.5-1.5 SFR-40K DSM-50S PNY-40 NLP-160A P7 C155

Regulator AW10-A to AW40-A· P. 259 Filter Regulator AW20-B to AW60-B· P. 259 Filter Regulator With Backflow Function AW20K-B to AW60K-B· P. 260 Mist Separator Regulator AWM20 to AWM40· P. 260 Micro Mist Separator Regulator AWD20 to AWD40· P. 262 Filter Regulator With Built-in Pressure Gauge AWG20/30/40· P. 263 Filter Regulator With Built-in Pressure Gauge With Backflow Function, AWG20K/30K/40K

.· Type with the backflow function (ARP20K/30K/40K) can be installed between solenoid valves and cylinders.· Specifications with a backflow function feature an inbuilt mechanism for quickly and reliable exhausting the air-pressure at the outlet side.