PA3000/5000/PAX1000

(A) 2 N.O. N.C. N.O.

MY1

2 2 2 2 4 Note) Two types of dust seal band are available.

4-channel Flow Monitor ( compatible)

Screw shall be tightened 1/4 to 1/2 turns more after touched correctly.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

AS-14AB 5 147 2 AS-15AB 7 191 2 AS-16AB 9 236 2 AS-17AB AS-25A Threaded stud kit for manifold AS-9AB 1 set (Adapter for manifold mounting is included.) 3 111 2 AS-24AB 3 119 2 AS-19AB 5 179 2 AS-20AB 7 236 2 AS-21AB 9 258 2 AS-22AB 9 277 2 AS-25AB 9 293 2 AS-43B r Threaded stud kit for manifold AS-30A M4 4 M4 4 Adapter for manifold mounting 119 2 AS-45B 179 2 AS-47B 236 2 AS-48B 277 2 e L-bracket

PF2D

1 4 3 2 1 Sensor Sensor PF2D PF2D Load U CH_1OUT2 CH_1OUT2 White White IF Load Load 4 3 2 1 4 3 2 1 Sensor Sensor Sensor Sensor Sensor Sensor CH2_OUT1 CH2_OUT1 Gray Gray Main circuit Main circuit 24 VDC + 24 VDC + Load Load 4 3 2 1 4 3 2 1 CH3_OUT1 CH3_OUT1 Red Red Load Load CH4_OUT1 CH4_OUT1 Green Green 4 3 2 1 4 3 2 1 Load U DC() DC() Blue Blue 389 PF2D Series Functions/PF2D Refer to

Speed Controller with

Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Flow rate 0 5 10 Number of needle rotations Refer to the Web Catalog for details.

Speed Controller with

2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 AS-33B AS-36B AS-32B AS-37B AS-38B M3 4 M3 4 AS-34B AS-36B AS-35B AS-37B AS-32B AS-34B AS-36B AS-38B AS-41B AS-42B AS-44B AS-45B M4 4 M4 4 AS-45B AS-42B AS-44B AS-47B AS-46B Precautions when options are ordered Threaded studs for manifold are not included when L-bracket and DIN rail mounting bracket are ordered.

Speed Controller with One-touch Fittings

Model Metric size Inch size 4 stations 6 stations 8 stations 10 stations pcs. 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 Length 38 62 72 90 104 114 135 140 78 111 119 147 179 191 236 277 Hexagon nut Flat washer pcs. pcs.

Low Maintenance Filter Series FN1

4 4.5 100% 0 2 4 4.5 100% 0 2 4 4.6 102% 0 2 4 4.4 98% 0 2 4 4.5 100% Time it takes to clog the filter (min) The values in percentage indicate the percentage of times when the time it took to clog the filter for the first time is set to 100% Introduce a certain concentration of dust and back-flush the filter when the pressure loss reaches 0.2 MPa.

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge

VQZ1000/2000/3000

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC Circuit with Indicator Light AC circuit DC circuit 1 2 1 2 NL R R LED NL: Neon light R: Resister LED: Emitting diode R: Resister 2-7-33 Base Mounted 34 34 Series VQZ1000/2000/3000 Be sure to read before handling.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

outputs + Analog voltage output*1 S NPN open collector 2 outputs + Analog current output*1 T PNP open collector 2 outputs + Analog voltage output*1 V PNP open collector 2 outputs + Analog current output*1 X NPN open collector 2 outputs + Copy function Y PNP open collector 2 outputs + Copy function Symbol Description Nil Units selection function*1 M SI unit only*2 P Units selection function

Digital Flow Switch

(The SI unit type is provided for use in Japan.) *4 Fixed unit: Instantaneous flow: L/min Accumulated flow: L XY 2 outputs (NPN/PNP switching type) + Copy function Sensor connector C *1 Can switch between 1 to 5 V and 0 to 10 V *2 Can be switched to external input or copy function Option 1 Option 2 Symbol Description Nil Without lead wire Symbol Description Nil None ZS-46-5L ZS-46-A1 A1

ZSE30/ISE30

Note) Fixed unit: For vacuum/Low pressure: kPA For positive pressure: MPa Lead wire with connector Lead wire length: 2 m With mounting screws (M3 x 5L: 2 pcs.) With M3 x 8L (2 pcs.)

MU

2 NBR Bumper !

MU

2 NBR Bumper !

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Note 2) Lead wire entry is inward when the product is shipped. 81 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS6, CXSL6 10-/1122122163.5+ST ST 50+ST 8 5.5 16 2-3.4 through 15+1/2ST M3 x 0.5 x 5L 2.75 19 26.5 counter bore depth 3.3 14 1 OUT 3 3 (Hexagon socket head set screw) 1 3.2 5.6 (16) 280.2 280.2 22.7 35 16 37 6.3 5 6 M2.5 x 0.45 x 6L M3 x 0.5 x 12.5L and M3 x 0.5 (Hexagon

ZSE30/ISE30

Note Lead wire length: 2m With mounting screws (M3 x 5L: 2 pcs.)