Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Valve (Not to be ordered) (Not to be ordered) EXH block base assembly D side U side Valve SUP block plate VVQ1000-16A Block indication label When different pressures are supplied to a manifold, a SUP block plate is used to block the stations under different pressures. U side D side Specify the mounting position by means of the manifold specification sheet.

SX

SX3000-39-2A SX5000-39-16A Series Assembly part no. SX3000-38-2A Port size Port size M5 x 0.8 SX3000 M5 x 0.8 SX3000 SX5000 1 8 Note) The EXH port may be either on the lead wire side or on the end plate side. SX5000-38-16A SX5000 1 8 Note) SUP port may be either on the lead wire side or the end plate side.

SY

SY5000-37-5A Double solenoid/3 position with spacer assembly SY3000-37-6A SY5000-37-6A For DC: 5 01 SY 5 1 20 LO Z For 100VAC 1 01 SY 5 1 20 LOZ For AC: Specification SY3000 Single solenoid SY3000-37-32A Double solenoid/ 3 position SY3000-37-33A SY5000/7000 SY5000-37-15A Series SY5000-37-16A 3 SY3000 SY5000 SY7000 5 7 A port size Single solenoid with spacer assembly SY5000-37-15A SY5000-37

ML2B

6 @1 @2 @3 @4 @5 @6 @7 @9 #0 #1 #2 #3 #5 #6 #7 #8 #9 $0 $1 $4 $5 $6 $7 $8 %0 %1 %3 %4 %5 %6 %7 %8 %9 ^1 ^2 ^3 ^4 ^5 ^6 ^8 Seal belt Dust seal band Scraper Piston seal Cushion seal Tube gasket O-ring O-ring O-ring O-ring O-ring Connector guide O-ring O-ring Special resin MY40-16A-stroke MY32-16A-stroke MY25-16A-stroke Stainless steel NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR MY40-16B-stroke

Table of Contents

6 @1 @2 @3 @4 @5 @6 @7 @9 #0 #1 #2 #3 #5 #6 #7 #8 #9 $0 $1 $4 $5 $6 $7 $8 %0 %1 %3 %4 %5 %6 %7 %8 %9 ^1 ^2 ^3 ^4 ^5 ^6 ^8 Seal belt Dust seal band Scraper Piston seal Cushion seal Tube gasket O-ring O-ring O-ring O-ring O-ring Connector guide O-ring O-ring Special resin MY40-16A-stroke MY32-16A-stroke MY25-16A-stroke Stainless steel NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR MY40-16B-stroke

Compact 5-Port Solenoid Valve

SOL.b SOL.a (+) () 12A Station 12 (+) () 12B SOL.b SOL.a (+) () 13A Station 13 (+) () 13B SOL.b SOL.a (+) () 14A Station 14 (+) () 14B SOL.b SOL.a (+) () 15A Station 15 (+) () 15B SOL.b SOL.a (+) () 16A Station 16 (+) () 16B (+) COM. () () (+) COM.

ML2B

6 @1 @2 @3 @4 @5 @6 @7 @9 #0 #1 #2 #3 #5 #6 #7 #8 #9 $0 $1 $4 $5 $6 $7 $8 %0 %1 %3 %4 %5 %6 %7 %8 %9 ^1 ^2 ^3 ^4 ^5 ^6 ^8 Seal belt Dust seal band Scraper Piston seal Cushion seal Tube gasket O-ring O-ring O-ring O-ring O-ring Connector guide O-ring O-ring Special resin MY40-16A-stroke MY32-16A-stroke MY25-16A-stroke Stainless steel NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR MY40-16B-stroke

VQ4000

Blanking plate assembly VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-1Individual EXH spacer VVQ4000-R-102 03 02 03 Throttle valve spacer VVQ4000-20A-1 SUP stop valve spacer VVQ4000-37A-1 SUP/EXH block plate VVQ4000-16A Interface regulator ARBQ4000-00-1 A B P < EXH blocking plate > < SUP blocking plate > For exhaust cleaner mounting [-C ](1) Release valve spacer VVQ4000-24A-1D (1, 2) Double

5 Port Solenoid Valve, Series VQC

Seal type 3 A B 0 1 Metal seal Rubber seal EAPEB 3-position exhaust center A B 4 P EA EB Note 1) For metal seal type only. 3-position pressure center Note 2) When specifying more than one option, enter symbols in alphabetical order. 5 A B EB P EA Manifold Options Blanking plate with connector VVQ1000-1C(VQC1000 only) SUP block plate VVQ1000-16A VVQ2000-16A Blanking plate assembly VVQ1000-

HIGH VACUUM VALVE, MAG/NO SW, VACUUM SERIES, XMA/XMD/XMH/XMC HIGH VAC VALVE, 1X, XM* OTHER SIZE RATING, 3.52739 lb

HIGH VACUUM VALVE, MAG/NO SW, VACUUM SERIES, XMA/XMD/XMH/XMC HIGH VAC VALVE, 1X, XM* OTHER SIZE RATING, .64443 lb

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 690   Family Description: XMA/XMD/XMH/XMC HIGH VAC VALVE   Class Code: 1X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 690   Family Description: XMA/XMD/XMH/XMC HIGH VAC VALVE   Class Code: 1X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 690   Family Description: XMA/XMD/XMH/XMC HIGH VAC VALVE   Class Code: 1X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 690   Family Description: XMA/XMD/XMH/XMC HIGH VAC VALVE   Class Code: 1X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

HIGH VACUUM VALVE, VACUUM SERIES, XMA/XMD/XMH/XMC HIGH VAC VALVE, 1X, XM* OTHER SIZE RATING, 3.35442 lb

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 690   Family Description: XMA/XMD/XMH/XMC HIGH VAC VALVE   Class Code: 1X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Valve Type: XMA (Angle Type, Normally Closed, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Port Direction: M (w/o Indicator, Right Flange Surface; Indicator Std., Right Flange Surface), Temperature: H0 (5 to 150°C), Suffix: , Auto Switch: w/o Auto Switch & Built-in Magnet, Lead Wire: 0.5m (or None in the Case of No Auto Switch), Number: None (w/o Auto Switch), Seal Material: XN1

Valve Type: XMA (Angle Type, Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Port Direction: M (w/o Indicator, Right Flange Surface; Indicator Std., Right Flange Surface), Temperature: H0 (5 to 150°C), Suffix: , Auto Switch: w/o Auto Switch & Built-in Magnet, Lead Wire: 0.5m (or None in the Case of No Auto Switch), Number: None (w/o Auto Switch), Seal Material: XN1

Valve Type: XMA (Angle Type, Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Port Direction: G (w/Indicator, Rear Flange Surface), Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: , Auto Switch: M9// (w/o Auto Switch w/Built-in Magnet), Lead Wire: 0.5m (or None in the Case of No Auto Switch), Number: None (w/o Auto Switch), Seal Material: XF1 (FKM, Same Specs as