Model: Size 1, Orifice Size: ø2, Fitting Size: 1/4, Fitting Type: Compression Fitting, Voltage: 24 VAC, Electrical Entry: Conduit w/Surge Voltage Suppressor, Special Electrical Entry: 90°, Spacer: w/Spacer

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/4, Fitting Type: Compression Fitting, Voltage: 12 VDC, Electrical Entry: Conduit w/Surge Voltage Suppressor, Special Electrical Entry: None, Spacer: w/Spacer

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/4, Fitting Type: Compression Fitting, Voltage: 12 VDC, Electrical Entry: Grommet, Special Electrical Entry: None, Spacer: w/Spacer

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: B (24 VAC), Electrical Entry: C (Conduit w/Surge Voltage Suppressor), Special Electrical Entry: A (90°), Spacer: A (w/Spacer)

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet), Special Electrical Entry: None, Spacer: A (w/Spacer)

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 6 (12 VDC), Electrical Entry: C (Conduit w/Surge Voltage Suppressor), Special Electrical Entry: None, Spacer: A (w/Spacer)

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 6 (12 VDC), Electrical Entry: G (Grommet), Special Electrical Entry: None, Spacer: A (w/Spacer)

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Compression Fitting, Nominal Designation of Piping Thread: 1/4, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

Table of Contents

MIN. 1 2 Note 1) d Note 2) L3 Note 3) L4 ASR430F-02-06S,-F20 ASR430F-02-08S,-F20 ASR430F-02-10S,-F20 ASR530F-02-06S,-F20 ASR530F-02-08S,-F20 ASR530F-02-10S,-F20 ASR530F-02-12S,-F20 ASR530F-03-06S,-F20 ASR530F-03-08S,-F20 ASR530F-03-10S,-F20 ASR530F-03-12S,-F20 ASR630F-03-10S,-F20 ASR630F-03-12S,-F20 ASR630F-04-10S,-F20 ASR630F-04-12S,-F20 89 111 17 34.9 57.7 6 63.7 21.5 20 17 R1/4 93 114

ASR

(-F20) ASR530F-03-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S(-F20) ASQ530F-02-10S(-F20) ASQ530F-02-12S(-F20) ASQ530F-03-06S(-F20) ASQ530F-03-08S(-F20) ASQ530F-03-10S(-F20) ASQ530F

MHK2

Internal Grip External Grip MHK2-12S MHK2-12C 20 15 Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) 15 10 0.5 MPa 0.5 MPa 10 0.4 MPa 0.4 MPa 5 5 0.3 MPa 0.3 MPa F F 0 0 10 20 30 40 50 10 20 30 40 50 Note) In case of single acting type, the value is for stroke center.

Table of Contents

Internal Grip External Grip MHK2-12C MHK2-12S 20 15 Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) 15 10 0.5 MPa 0.5 MPa 10 0.4 MPa 0.4 MPa 5 5 0.3 MPa 0.3 MPa F F 0 0 10 20 30 40 50 10 20 30 40 50 Note) In case of single acting type, the value is for stroke center.

MHK2

Internal Grip External Grip MHK2-12C MHK2-12S 20 15 Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) 15 10 0.5 MPa 0.5 MPa 10 0.4 MPa 0.4 MPa 5 5 0.3 MPa 0.3 MPa F F 0 0 10 20 30 40 50 10 20 30 40 50 Note) In case of single acting type, the value is for stroke center.

Wedge Cam Operation Provides

distance (mm) (L1) Open distance (mm) (L2) Opening/Closing stroke (mm) (L2_L1) Bore size (mm) Weight (g) Model MHZ2 MHK2-12D 12 External hold: 15 Internal hold: 16 4 9 13 75 MHZJ2 External hold: 31 Internal hold: 36 External hold: 46 Internal hold: 56 External hold: 80 Internal hold: 86 MHK2-16D 16 6 14.6 20.6 113 MHQ Double acting MHK2-20D 20 10 16 26 235 MHL2 MHK2-25D 25 14 19 33 440 MHK2-12S

1

How to Order Manifold Assembly y P, E port entry, SUP/EXH block assembly Internal pilot, Built-in silencer C Note) E Note) Internal pilot External pilot P, E port entry Example (SS5Y3-12S-) U D B G H J U side (2 to 10 stations) D side (2 to 10 stations) 3-position closed center (24 VDC) SY3330-5U1-C6 (1 set) 2-position double (24 VDC) SY3230-5U1-C6 (1 set) Both sides (2 to 24 stations)

Wedge Cam Operation Gripper Series MHK2

Holding Force MHK2-12C MHK2-12S 20 15 Pressure 0.6MPa Pressure 0.6MPa Holding force N Holding force N 15 10 0.5MPa 0.5MPa 10 0.4MPa 0.4MPa F F 5 5 0.3MPa 0.3MPa Note) In case of single acting type, the value is for stroke center. 0 0 10 20 30 40 50 10 20 30 40 50 1N = 0.2248 lbf = 0.102 kgf 1MPa = 145 psi = 10.2 kgf/cm2 Holding point L mm Holding point L mm MHK2-16S MHK2-16C O.

CATALOG

12 R(PT)1/4 17 25.7 20.9 30 91.8 85.8 89.8 83.8 55.6 49.6 39.8 33.8 22 24 74 ASV510F-03-10S 10 R(PT)3/8 17 23.3 18.5 30 90.2 84.2 88.2 82.2 55.6 49.6 41.8 35.5 21 23 73 M3, M5 S 18 12 ASV510F-03-12S 12 R(PT)3/8 17 25.7 20.9 30 91.8 85.8 89.8 83.8 55.6 49.6 41.8 35.5 22 24 78 ASV510F-04-10S 10 R(PT)1/2 22 23.3 18.5 30 90.2 84.2 88.2 82.2 55.6 49.6 45.8 37.6 21 23 95 ASV510F-04-12S 12 R(PT

V

12 R(PT)1/4 17 25.7 20.9 30 91.8 85.8 89.8 83.8 55.6 49.6 39.8 33.8 22 24 74 ASV510F-03-10S 10 R(PT)3/8 17 23.3 18.5 30 90.2 84.2 88.2 82.2 55.6 49.6 41.8 35.5 21 23 73 M3, M5 S 18 12 ASV510F-03-12S 12 R(PT)3/8 17 25.7 20.9 30 91.8 85.8 89.8 83.8 55.6 49.6 41.8 35.5 22 24 78 ASV510F-04-10S 10 R(PT)1/2 22 23.3 18.5 30 90.2 84.2 88.2 82.2 55.6 49.6 45.8 37.6 21 23 95 ASV510F-04-12S 12 R(PT

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

20.9 17 74 25.2 48.3 6 ASD530FG-03-06S 12.8 20.3 18.5 93 28.2 51.3 8 ASD530FG-03-08S 15.2 46.9 41.9 45.4 40.4 23 19.8 19 R 3/8 40 35 14 21 98 32.6 54.1 10 ASD530FG-03-10S 18.5 23.1 22 101 34.4 55.9 12 ASD530FG-03-12S 20.9 21 177 32.6 64.3 10 ASD630FG-04-10S 18.5 64.8 57.3 56.7 49.2 28.6 26.5 25.9 24 R 1/2 49.6 42.1 18.6 22 179 34.4 66.1 12 ASD630FG-04-12S 20.9 Note 1) Reference dimensions

CG5-S

(mm) Connection threads Connection threads Universal type Universal type ASD230FG-M5-04 ASD230FG-M5-06 ASD330FG-01-06S ASD430FG-02-06S ASD530FG-02-06S -03-06S ASD330FG-01-08S ASD430FG-02-08S ASD530FG-02-08S -03-08S ASD430FG-02-10S ASD530FG-02-10S -03-10S ASD630FG-04-10S ASD530FG-02-12S -03-12S ASD630FG-04-12S M5 x 0.8 R 1/4 M5 x 0.8 JIS symbol 10 R 3/8 R 1/8 R 1/2 6 R 1/4 R 1/4 12 R 3/8 R