Model: 2 (Size 2), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Compression Fitting, Nominal Designation of Piping Thread: 1/4, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

SX

SX3140-5G2 sets (Single solenoid part no.) SX3240-5G2 sets (Double solenoid part no.) One-touch fitting for 6 C6 SX3000 Mixed M One-touch fitting for 4 C4 One-touch fitting for 6 C6 One-touch fitting for 8 C8 Mixed M SX5000 The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

FGX-OM-L011

FGX-OM-L011 FGG Series/ (P) 0.02MPa V V () O O 1 (O ) ) 3/8 FGX-OM-L011 FGG Series/ IN/OUT 0.1MPa M12 , INLETOUTLET 67 O V O 40 4/8 FGX-OM-L011 1 1/8 Rc2 Rp1/4 Rp1/4 INLET DRAIN Rp3/4 OUTLET Rc2 1 AG-10S SUS304 JIS B2401-1A-P11 NBR O JIS B2401-4D-P11 FKM M101.5 11 SUS304 M10 SUS304 SUS304 AN-3S SUS316WPA L-27S SUS316 U-8SU-9SU-10S SUS304 SUS304 J-4S SUS316 AL-25S NBR O AL-22S

air-filter-e

.: AL-22S) FGGL 1 O-ring Refer to pages 256 and 257 for the replacement element type. AL-25S AL-22S Case fastening parts V-band coupling (Part no.: CY-27S) CY-27S Note) The quantity used for 1 filter is 1 each of the above O-ring etc.

smcmaintenancepartslist

.: AL-22S) FGGL 1 O-ring Refer to pages 256 and 257 for the replacement element type. Case fastening parts V-band coupling (Part no.: CY-27S) Note) The quantity used for 1 filter is 1 each of the above O-ring etc.

Air Preparation Equipment

.: AL-22S) FGGL 1 O-ring Refer to pages 256 and 257 for the replacement element type. AL-25S AL-22S Case fastening parts V-band coupling (Part no.: CY-27S) CY-27S Note) The quantity used for 1 filter is 1 each of the above O-ring etc.

One-touch Fittings

Gasket for M5 thread: M-5G2 E Bulkhead union v v Bulkhead connector v v A KQ2 H 06 00 1 4, 6 (Oval type release button) Oval type release button KQ2 H 08 00 A 8 to 16 (Round type release button) Port size/Applicable tubing O.D.

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

M5 M-5G2 Gasket material: Stainless steel 316, Special FKM X112 Applicable thread Gasket part no. M5 M-5G3 Suffix -X83 to the end of part number. Example) MS-5AU-4-X83 Spare Parts Description Part no.

V100

(Valve) VZ314R-5G2 pcs. (Valve) DXT200-8-6A1 pc. (Blanking plate assembly) DXT200-8-3A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly.

VZ100/300/500

(Valve) VZ314R-5G2 pcs. (Valve) DXT200-8-6A1 pc. (Blanking plate assembly) DXT200-8-3A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly.

VQ4000

VQ 4 5 G 1 5 0 Enclosure Series Connector kit Nil Dusttight 4 VQ4000 VV5Q45-05C12C1 set VQ4150-5G2 sets VQ4250-5G2 sets VQ4350-5G1 set Manifold base part no. Valve part no. (Stations 1 and 2) Valve part no. (Stations 3 and 4) Valve part no.

Model: Size 1, Orifice Size: ø3, Fitting Size: 1/8, Fitting Type: NPT Female Thread, Voltage: 24 VDC, Electrical Entry: Grommet, Special Electrical Entry: -, Spacer: -

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 1 (1/8), Fitting Type: N (NPT Female Thread), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 1 (1/8), Fitting Type: N (NPT Female Thread), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: [NPT] NPT, Nominal Designation of Piping Thread: 1/8, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Compression Fitting, Nominal Designation of Piping Thread: 1/4, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical