Model: 3 (Size 3), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Model: 3 (Size 3), Orifice Size: 3 (ø4.5), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Model: 3 (Size 3), Orifice Size: 3 (ø4.5), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Model: 3 (Size 3), Orifice Size: 3 (ø4.5), Fitting Size: 3 (3/8), Fitting Type: P (Rc Female Thread), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Model: 3 (Size 3), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: P (Rc Female Thread), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Compression Fitting, Nominal Designation of Piping Thread: 1/4, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Face Seal Fitting, Nominal Designation of Piping Thread: 1/4, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

One-touch Fittings

Gasket for M5 thread: M-5G2 E Bulkhead union v v Bulkhead connector v v A KQ2 H 06 00 1 4, 6 (Oval type release button) Oval type release button KQ2 H 08 00 A 8 to 16 (Round type release button) Port size/Applicable tubing O.D.

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

M5 M-5G2 Gasket material: Stainless steel 316, Special FKM X112 Applicable thread Gasket part no. M5 M-5G3 Suffix -X83 to the end of part number. Example) MS-5AU-4-X83 Spare Parts Description Part no.

V100

(Valve) VZ314R-5G2 pcs. (Valve) DXT200-8-6A1 pc. (Blanking plate assembly) DXT200-8-3A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly.

VZ100/300/500

(Valve) VZ314R-5G2 pcs. (Valve) DXT200-8-6A1 pc. (Blanking plate assembly) DXT200-8-3A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly.

VQ4000

VQ 4 5 G 1 5 0 Enclosure Series Connector kit Nil Dusttight 4 VQ4000 VV5Q45-05C12C1 set VQ4150-5G2 sets VQ4250-5G2 sets VQ4350-5G1 set Manifold base part no. Valve part no. (Stations 1 and 2) Valve part no. (Stations 3 and 4) Valve part no.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

manifold base to allow the external wiring to be piped all together with the 26 pin MIL connector. 1 8 1 4 1 8 1 4 P, EA, EB port 1 4 M5 x 0.8 C4 (4 One-touch fitting) C6 (6 One-touch fitting) Port size C4 (4 One-touch fitting) C6 (6 One-touch fitting) C8 (8 One-touch fitting) A, B port C8 (8 One-touch fitting) C10 (10 One-touch fitting) Manifold base weight W (g) n: Stations W = 19n + 45 W = 43n

8)W = 43n + 77, 1.17579 lb, ModelApplicable valveManifold typeP (SUP)/R (EXH)Valve stations Note)A, B port locationPort sizeManifold base weight W (g) n: StationsP, EA, EB portA, B portSS5X5-20SX5 20Single base/B mountCommon SUP/Common EXH2 to 20 stationsValveRc 1 4Rc 1 8C4 (One-touch fitting ?4)C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?8)W = 43n + 77

8)W = 43n + 77, 1.01409 lb, ModelApplicable valveManifold typeP (SUP)/R (EXH)Valve stations Note)A, B port locationPort sizeManifold base weight W (g) n: StationsP, EA, EB portA, B portSS5X5-20SX5 20Single base/B mountCommon SUP/Common EXH2 to 20 stationsValveRc 1 4Rc 1 8C4 (One-touch fitting ?4)C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?8)W = 43n + 77

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

+ 64 150 193 236 279 322 365 408 451 494 L1 4-1/8 12, 14 port 3 R 65 119 L2 = 43n + 76 162 205 248 291 334 377 420 463 506 L2 54 R 39 21 R2 R1 17 17 6-3/8 1, 3, 5 port 26.5 26.5 3-11-7 8 Series EVS7Dimensions EVS7-8-FG-S-M0 174.5 103 174.5 49 (64) 49(64) 103 71.5 31 (42) 31 (42) 2-8 mounting hole 56 56 1 3 5 16 (20) (2 port) 16 (20) (4 port) 16 (23) (22) 16 (11) 10 12 (16) 62(72) 75(86)

Electric Cylinder & Directional Controller Series LZ
/LC3F

C B A + Stroke Variations Model Max. thrust Max. speed Lead screw Motor Stroke (mm) Mounting bracket Rod end thread Auto switch Slide screw 8 Lead 2 25,40,100,200 LDZB3L 80N 33mm/s Slide screw 8 Lead 6 Slide screw 8 Lead 12 Slide screw 12 Lead 2 Slide screw 12 Lead 6 Slide screw 12 Lead 12 LDZB3M 43N 100mm/s D-M9 DC motor Foot, Front flange, Front trunnion LDZB3H 24N 200mm/s Female thread

SY

One-touch fitting) C8 (8 One-touch fitting) Port size C8 (8 One-touch fitting) C10 (10 One-touch fitting) A, B port P to A/B 3.6 (0.2) A/B to EA/EB 4.14 (0.23) P to A/B 9.18 (0.51) A/B to EA/EB 9.9 (0.55) P to A/B 15.84 (0.88) A/B to EA/EB 14.94 (0.83) Valve effective area Note 2) mm (Cv factor) C6: C8: C10: Manifold base weight W (g) n: Number of stations W = 13n + 35 W = 36n + 64 W = 43n

Speed Controller: Standard Type In-line Type AS Series

Description Material Part no. 5 6 7 8 Note Valve seat U seal O-ring Gasket Brass HNBR NBR NBR/Stainless steel 1429138 142964-3 KA00327 M-5G2 9 x 7 x 1 Note) Construction drawing: AS1000-M5-N In case of AS1000-M5, nipples and gaskets are not attached. 651 AS Series Construction: AS2000/3000 Component Parts No. Description Parts no.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Description Material Part no. 5 6 7 8 Note Valve seat U seal O-ring Gasket Brass HNBR NBR NBR/Stainless steel 1429138 142964-3 KA00327 M-5G2 9 x 7 x 1 Note) Construction drawing: AS1000-M5-N In case of AS1000-M5, nipples and gaskets are not attached. 527 Series AS Construction: AS2000/3000 Component Parts No. Description Parts no.