Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-89 kPa), SUP: F01 (Screw-in G 1/8), VAC: F01 (Screw-in G 1/8)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa), SUP: F01 (Screw-in G 1/8), VAC: F01 (Screw-in G 1/8)

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: L (-48 kPa), SUP: F01 (Screw-in G 1/8), VAC: F01 (Screw-in G 1/8)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: S (-89 kPa), SUP: F01 (Screw-in G 1/8), VAC: F01 (Screw-in G 1/8)

1

Manifold overall length Manifold overall length Approx. 29% reduced SY5000 manifold SY5000 3 stations SY3000 manifold SY3000 4 stations Mixed manifold SY5000 3 stations SY3000 4 stations For serial transmission EX260 A B A B A B A B A B A B A B A B A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 Installation space A A A A A A A A B B B B B B B B 12 B 12 B 12 B 12 B 12 B 12 B 136.7 mm

Vacuum

-Pad ;;rol2 25 40 Flat type I a o o o a o a o o a o o Flat with rblo o a o o a a o eep tvpe lo a o a Bellows | a a a a a a o a a a 132 ZCDUKC Male Cap porting zPf (v&uum pad !

Vacuum

-Pad ;;rol2 25 40 Flat type I a o o o a o a o o a o o Flat with rblo o a o o a a o eep tvpe lo a o a Bellows | a a a a a a o a a a 132 I ZCDUKC Male Cap porting zPf (v&uum pad !

Process Pump

Diaphragm Assembled in a clean room.

EXxx-OMW0014CN

EX245-SPN1A SI FO LED 02dB FO LED 0dB (6.4.5 FO LED) (F01 EX245-SPN1A FO1: ON FO2: OFF 1 2 11 2 3SI EX245-SPN1A 34 No.EX-OMW0014CN-A 6. SI 6.1.

Precision Regulator

Fluororubber is used for rubber seal materials. 80 IR 0 Ozone resistant X170 IR 0 Compatible with modular connection brackets Modular Combination Example Description Applicable model IR100--X170 AF20-A AFM20-A Y200-A Y200T-A IR20--X170 AF30-A AFM30-A Y300-A Y300T-A IR30--X170 AF40-A AFM40-A Y400-A Y400T-A qRegulator wAir filter eMist separator rInterface tInterface with bracket Note 1) The

25

Diaphragm Assembled in a clean room.

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Cylinder

5+ g"'" 116 5:5 M4XO,7 YPOIO , '10 6.S 10 sg04I 16 5.5I M,4 XQ,7 71' 5 a 6.3 7 I 5 a 1 6.3 YP015 I 15 7 12 ~-g.048 19 7 M5XO,a 9 I 6 10 ,7.8 10 7,a ...!:!'.015 l 15 7 12 6 -g~ 19 9 I 6 7 M5 x O.B . ~I ~--~~ K ~~ P~ ' ~k I -TFunnion Pin' . , nue ' :e In .

IR1000/2000/3000

If a directional switching valve (solenoid valve, mechanical valve, etc.) is mounted on the supply side of the regulator and repeatedly switched ON and OFF, wear of the nozzle/flapper section will be accelerated and a discrepancy in the setting value may occur. Therefore, avoid using a directional switching valve on the supply side.

EXxx-OMU0020CN

Y (EX245-DX1)(EX245-DY1) Y 2 PCA-1557785 Y (2M12 M12) A A A . 10-2 Y (PCA-1557785) 64 No.EX-OMU0020CN PCA-1557798 Y (2M8 M12) A . 10-3 Y (PCA-1557798) 65 No.EX-OMU0020CN 10.3.

Regulator Unit Combination: Others, Port Size: Rc1/8, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: -, Residual Pressure Relief 3-Port Connection Valve: None, Set Pressure: -, Pressure Unit: Name plate and pressure gauge unit: MPa, T shape

Regulator Unit Combination: Others, Port Size: Rc1/8, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: -, Residual Pressure Relief 3-Port Connection Valve: None, Set Pressure: -, Pressure Unit: Name plate and pressure gauge unit: MPa, T shape

Regulator Unit Combination: Others, Port Size: G1/4, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: -, Residual Pressure Relief 3-Port Connection Valve: None, Set Pressure: -, Pressure Unit: Name plate and pressure gauge unit: MPa, T shape

Regulator Unit Combination: Others, Port Size: NPT1/8, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No (No Pressure Port Plug), Residual Pressure Relief 3-Port Connection Valve: None, Set Pressure: 0.05 to 0.7 MPa, Pressure Unit: Name

Regulator Unit Combination: Others, Port Size: NPT1/4, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: -, Residual Pressure Relief 3-Port Connection Valve: None, Set Pressure: -, Pressure Unit: Name plate and pressure gauge unit: MPa, T shape