Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY Both of these become slower as the operating pressure is increased. 14 Technical Data 5 He leakage 8 Exhaust time (low/medium vacuum) The time (t) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is t=2.3(V/S)log(P1/P2).
Analog Output Characteristics Hysteresia mode when the values of P1 and P2 are equal or when P1>P2 but within 3 digits, the hysteresis will be automatically set to 3 digits tor the set value ot P1. Window comparator mods The hysteresis is automatically set to 3 digits, so separate P1 trom P2 by 7 digils or more when programming.
Analog Output Characteristics Hysteresia mode when the values of P1 and P2 are equal or when P1>P2 but within 3 digits, the hysteresis will be automatically set to 3 digits tor the set value ot P1. Window comparator mods The hysteresis is automatically set to 3 digits, so separate P1 trom P2 by 7 digils or more when programming.
AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2
Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.
P1+0.1 293 Q=600XC(P1+0.1) 273+t P2+0.1 If > b, a subsonic flow results. P1+0.1 P2+0.1 2 b P1+0.1 293 Q=600XC (P1+0.1) 1 1 b 273+t 103 Series SV EX500 Decentralized Serial Wiring Flow Characteristics of Solenoid Valve Q : Air flow rate [dm3/min(ANR)]. The dm3 (cubic decimeter) in the SI system may be expressed by L(liter). 1dm3=1L.
6.2 1.5 47 or less 6.9 0.17 1.7 Exhaust center 0.28 (0.34) 0 5 VQ44 1 Rubber seal 0.38 50 or less 52 or less 7.0 1.9 52 or less 7.3 0.38 2.0 0 5 VQ45 0 Metal seal 0.18 45 or less 47 or less 6.2 1.6 47 or less 6.4 0.18 1.6 Pressure center 0.28 (0.34) 0 5 VQ45 1 Rubber seal 0.38 50 or less 52 or less 7.0 1.9 52 or less 7.1 0.38 2.0 0 5 VQ46 0 Metal seal 55 or less 57 or les 2.7 57 or les
Flow Rate Characteristics Flow Rate Characteristics VBAT05A 2 1.6 0.1 ARJ 1.4 Outlet pressure (MPa) Outlet pressure (MPa) P1 = 1.0 MPa 1.2 P1 = 0.8 MPa Max. pulsation range (MPa) AR425 to 935 0.08 P1 = 0.75 MPa P1 = 0.7 MPa 1 P1 = 0.6 MPa P1 = 0.5 MPa P1 = 0.5 MPa 1 0.8 P1 = 0.4 MPa 0.06 ARX P1 = 0.3 MPa P1 = P2 0.6 P1 = P2 AMR 0.04 0.4 0.2 ARM 0.02 VBAT05A 0 500 1000 1500 2000 2500 3000
How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures
The required time to increase tank pressure from 0.8MPa to 1.0MPa at 0.5MPa supply pressure is calculated as follows 0.8 0.5 = = 1.6 P2 P1 P2 P1 1.0 0.5 = =2.0 1.0 0.5 = = 2.0 P2 P1 P2 P1 1.5 0.5 = = 3.0 0.8 0.5 = = 1.6 P2 P1 P2 P1 1.0 0.5 = = 2.0 With the pressure increase ratio from 1.6 to 2.0, the time of 6516=49 sec.(t) is given for 10l tank by the graph.
flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.
13.1 . 52 13.2 No. . 52 (1) . 52 [2] . 53 [3] . 54 [4](HOLD) . 54 [5] . 55 [6] . 55 (7) . 56 13.3 . 57 14. 58 14.1 [5m ] . 58 14.2 [820m] . 58 14.3 ()[5m ] . 59 15.4 ()[820m] . 59 14.5 . 60 14.6 . 60 14.7 . 60 -2- 14.8 . 61 15 . 62 15.1 IO . 62 15.2 . 63 16/ . 68 17/ . 69 17.1. . 69 17.2 . 70 17.3. . 71 17.4. . 72 17.5 . 73 17.6. . 73 18 . 74 18.1. / . 74 18.2 . 75 18.3 .
One of the preset pressures P1 through P4 is selected by the ON/OFF combination of S1 and S2.
Flow rate characteristics: C Max. operating frequency SZ 0.8 MPa 0.15 MPa 5 to 50C 0.60 dm3/(sbar) 180 c.p.m SUP side pressure (P1) VF VVQ1000-FPG-02 1 set VQ1000-FPG-C6M5-D 2 pcs.
Dimensions Note) A B 29 33 41 D 67 81 93 C 40 52 63 VQZ1000 VQZ2000 VQZ3000 35 43 52 A Note) For grommet Individual EXH spacer VVQZ1000-R-5-M5 (VQZ1000) VVQZ2000-R-5-01 (VQZ2000) VVQZ3000-R-5-02 (VQZ3000) M5: VQZ1000 Rc 1/8: VQZ2000 Rc 1/4: VQZ3000 Exhaust port can be installed individually by mounting an individual exhaust spacer on to the manifold block.
S1 S2 Preset pressure OFF OFF P1 ON OFF P2 OFF ON P3 ON ON P4 For safety reasons, it is recommended that one of the preset pressures be set to 0MPa. 1.12-16
v=l t P"p1 + 147 Where V = capacity of rceiver Q = compressor outpul (clm) Pa = atmosphric plsssurc P1 = compressor outsul pressure V = (600'14.7y(10O+14.7) =77lf as a minimum number, a prudent suggestion might begin with 120 ft".
v=l t P"p1 + 147 Where V = capacity of rceiver Q = compressor outpul (clm) Pa = atmosphric plsssurc P1 = compressor outsul pressure V = (600'14.7y(10O+14.7) =77lf as a minimum number, a prudent suggestion might begin with 120 ft".
: Not available for SY3000-52-5A) 5 Bushing assembly SY3000-52-5A CE-compliant: SY3000-52-1A 6 VZ1000-11-1Refer to page 186.
100 151 80 82 16.5 28 43 65 105 156 4.5 50 ZPX50HJ50-B01-A18 52 135 186 80 82 16.5 28 43 65 138 191 4.5 50 ZPX50HJ75-B01-A18 52 171 222 80 82 16.5 28 43 65 174 227 4.5 ZPX HJ-B01-A22 (With buffer) 100 125 Hexagon width across flats 30 Hexagon width across flats 17 Width across flats 19 Hexagon width across flats 21 (mm) Model A 100 ZPX100HJ25-B01-A22 D 186 ZPX100HJ50-B01-A22 ZPX100HJ75-B01