C76

, Piston rod (Rubber cushion only) Bore Stroke C With rod boot Wh NCA K KK DC e -X KA 20AM 9 9 Rod cross section f I Data h (mm) BE AM 20 24 C 12 14 D 37.5 46.5 FA 30 35 FB 14 16 K 10 12 KA KK KV 38 50 KW 7 8 TDH9 TW 34.5 42.5 WH 38 45 Eh8 EE G 9 12 H 58 69 HR N 17(19) 22(25) NB 34.5 42.5 S 68 89 XB 47 57 XC ZZ 140 174 SW 17 19 TC M8 x 1 Bore 30 0 0.033 +0.036 0 10 32 40 97 122 M30 x 1.5

C76

H Rail mounting type (A) Band mounting type (B) or non-magnet CP95 ZZ + Stroke NCM C76KE Non-rotating, Piston rod (Rubber cushion only) Bore Stroke C With rod boot Wh NCA K KK DC e -X KA 20AM 9 9 Rod cross section f I Data h (mm) AM 20 24 BE C 12 14 FA 30 35 K 10 12 KK KV 38 50 TDH9 TW 34.5 42.5 D 37.5 46.5 FB 14 16 KA KW 7 8 WH 38 45 EE G 9 12 N 17(19) 22(25) XB 47 57 H 58 69 NB 34.5 42.5

VQZ1000/2000/3000

Tightening torque (Nm) VQZ1000-FB-M VQZ1000-FB-R VQZ2000-FB VQZ3000-FB Metal seal 0.2 to 0.26 VQZ1000 Rubber seal Note) Other 0.25 to 0.35 0.25 to 0.35 VQZ2000 VQZ3000 Note) For the special voltages, please consult with SMC.

MNB

C 4FD K F GF BN 4-J Cushion valve GB MM H1 V Q Fd D Fd D FB FY MM Width across flats ZZ + 2 strokes VA F T N FT FE FX FZ Width across flats Bore size (mm) Effective thread length (mm) Stroke range (mm) A B1 H1 B2 BN BP BQ C D F Fd FD FE FT FX FY FZ FB B 32 40 50 63 80 100 10 14 18 18 22 26 19.5 27 32 32 37 37 to 500 to 500 to 600 to 600 to 750 to 750 22 30 35 35 40 40 17 22 27 27 32 41 6

Rotary Table/

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 100h9 101 102 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 116h9 118h9 119 120 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

Table of Contents

More than 9 stations are for both sides fitting (Type FB).

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

18 36 18.5 10 105 to 200 63 50 to 200 22 30 22 44 37.4 14 205 to 500 505 to 800 Material: Cast iron (Coating) * The A and CL measurements are when the unit is in the Z-phase first detecting position.

Battery-less

20.5 20 8 17 38 23.5 M14 x 1.5 32, 40 22 20.5 25 8 22 42.0 23.5 M14 x 1.5 Refer to the Web Catalog for details on the rod end nut and mounting bracket.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 101 102 100h9 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 119 120 116h9 118h9 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

Hydraulic

22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 17 20 1/4 stroke 80 65 25 to 1800 100 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53 22 122 85 19 15 100 80 25 to 1800 Rod series Tolerance (mm) B-series rod C-series rod Bore size (mm) Bore size (mm) LH LX E E MM A MA D K G H ZZ MM A MA D K G H ZZ 32 32 34 M16 x 1.5 25 22 18 7 14 66 220 -0.025 -0.064 0.15

JIS Standard Hydraulic Cylinder

22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 65 80 25 to 1800 100 39 15 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53 22 122 85 80 100 25 to 1800 Rod series Tolerance (mm) B-series rod C-series rod Bore size (mm) Bore size (mm) LH LX E E MM A MA D K G H ZZ MM A MA D K G H ZZ 32 32 34 M16 x 1.5 25 22 18 7 14 66 220 0.025 0.064 0.15 0.18 40 40 40 36

MLGP

C 0.2 B 0.2 A 0.2 Hexagon socket head mounting screws D Bore size (mm) A (mm) B (mm) C (mm) MGPM MGPL W 20 12 54 14 M5 x 0.8 24 72 25 18 15 M6 x 1.0 64 82 30 B 32 22 18 M8 x 1.25 98 34 78 A A 40 18 22 40 86 M8 x 1.25 106 50 22 110 27 M10 x 1.5 46 130 B W 63 27 22 M10 x 1.5 124 142 58 B: Retraction locking F: Extension locking 80 33 28 M12 x 1.75 180 54 156 100 33 39 62 188 M14 x 2.0 210 23

MLGP

C 0.2 B 0.2 A 0.2 Hexagon socket head mounting screws D Bore size (mm) A (mm) B (mm) C (mm) MGPM MGPL W 20 12 54 14 M5 x 0.8 24 72 25 18 15 M6 x 1.0 64 82 30 B 32 22 18 M8 x 1.25 98 34 78 A A 40 18 22 40 86 M8 x 1.25 106 50 22 110 27 M10 x 1.5 46 130 B W 63 27 22 M10 x 1.5 124 142 58 B: Retraction locking F: Extension locking 80 33 28 M12 x 1.75 180 54 156 100 33 39 62 188 M14 x 2.0 210 23

ZQ-OM01401

ZQ1UA-5L-Q1 K2 Q2 K2 EA EB FA FB EC EE FC FE EA EB FA FB ZQ000UA-5L-PD ZZQ1A-BSB *ZQ3MA-K15L-*ZQ3MA-K25L-K*ZQ3MA-J15L-FVA VB ZQ1UAJ1 5LF ZQ1UAK1 5LZQ1UAK1 5LQ1 K2 Q2 K2 EC EE FC FE EA EB FA FB EA EB FA FB ZQ000UAK1 5LZQ000UAJ1 5LF EC EE FC FE EA EB FA FB *ZQ3MAK1 5L*ZQ3MAK2 5LK*ZQ3MAJ1 5LF 35 - No.ZQ-OM01401-B PD ZZQ1A-BSC *ZQ3MA-K15L---S *ZQ3MA-K25L-K--S PD ZZQ1AROB *ZQ000MA-K15L

MLGP

C0.2 (2) B 0.2 A 0.2 Hexagon socket head cap screw D Bore size (mm) A (mm) B (mm) C (mm) MLGPM MLGPL 54 12 14 72 20 M5 x 0.8 24 64 15 18 82 25 M6 x 1.0 30 78 18 22 98 32 M8 x 1.25 34 86 18 22 106 40 M8 x 1.25 40 110 22 27 130 50 M10 x 1.5 46 124 22 27 142 63 M10 x 1.5 58 156 28 33 180 80 M12 x 1.75 54 188 33 39 210 100 M14 x 2.0 62 9-11-5 5 Series MLGP Specific Product Precautions 3 Be sure

MLGP

C0.2 (2) B 0.2 A 0.2 Hexagon socket head cap screw D Bore size (mm) A (mm) B (mm) C (mm) MLGPM MLGPL 54 12 14 72 20 M5 x 0.8 24 64 15 18 82 25 M6 x 1.0 30 78 18 22 98 32 M8 x 1.25 34 86 18 22 106 40 M8 x 1.25 40 110 22 27 130 50 M10 x 1.5 46 124 22 27 142 63 M10 x 1.5 58 156 28 33 180 80 M12 x 1.75 54 188 33 39 210 100 M14 x 2.0 62 9-11-5 5 Series MLGP Specific Product Precautions 3 Be sure

VZS

More than 9 stations are for both sides fitting (Type FB).

α PneuAlpha HARDWARE MANUAL

K05 Up ( ): scroll to higher number numbered items (keys, FB, Inputs, Outputs, etc.)

Compact Guide Cylinder

40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5 x 0.8 9.5 22 22 12 38 22 75 60 84 12.7 31 M5 x 0.8 7.5 4.5 32 (25 x 2) 5.4 9.5 5 M5 x 0.8 12.5 23 23 16 44 28

MNB

17 28 12 13 14 8.5 13 40 1/8 104 12 Up to 500 35 14 27 14 52 38 8 63 91 14 52.5 30 22 28 16 13 14 10 16.5 50 1/4 120.5 15 Up to 600 40 18 32 14 65 46.5 11 75 104.5 15.5 58.5 35 27 40 20 14 20 12.5 19 63 1/4 134.5 12 Up to 600 45 18 32 22 75 56.5 11 90 119.5 16.5 68 35 27 40 20 14 20 17.5 23 80 1/4 169 18 Up to 750 45 22 37 22 95 72 13 102 150 19 81 40 32 60 25 20 30 22 33 100 1/4 189 20