Nozzle Nominal Size: ø0.7, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: F (Suction Filter), Pressure Sensor Specs: P1 (Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S

Nozzle Nominal Size: ø0.7, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: F (Suction Filter), Pressure Sensor Specs: B (w/o Pressure Sensor), Air Pressure Supply, P Port

Main Body Shape: Unit, Additional Function: Filter, Ultimate Vacuum(kPa): -78, Air Consumption Flow Rate(l/min): 28, Vacuum Port Connecting Port Shape: One-Touch Fitting Elbow, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: One-Touch Fitting Elbow, Air Supply Port One-Touch Fitting Size: Ø4, Application: Individual Item, Operating Pressure Range(MPa): 0.2～0.5, Operating

Main Body Shape: Unit, Additional Function: Filter, Ultimate Vacuum(kPa): -78, Air Consumption Flow Rate(l/min): 28, Vacuum Port Connecting Port Shape: One-Touch Fitting Elbow, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: One-Touch Fitting Elbow, Air Supply Port One-Touch Fitting Size: Ø4, Application: Individual Item, Operating Pressure Range(MPa): 0.2～0.5, Operating

Main Body Shape: Unit, Additional Function: Filter, Ultimate Vacuum(kPa): -78, Air Consumption Flow Rate(l/min): 28, Vacuum Port Connecting Port Shape: One-Touch Fitting Elbow, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: One-Touch Fitting Elbow, Air Supply Port One-Touch Fitting Size: Ø4, Application: Individual Item, Operating Pressure Range(MPa): 0.2～0.5, Operating

Smooth Cylinder/Low Speed Cylinder

75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Mounting bolt part no.

Table of Contents

20 30 25 M10 x 1.25 Up to 700 22 19.5 47 17 32 45.5 10 13 10 45 6 8 37.5 5.5 6.8 28 186 40 55 20 34.5 32 M10 x 1.25 Up to 1000 22 19.5 47 17 32 49.5 12 13 11 45 6 8 46.5 5.5 6.8 28 199 40 55 22 42.5 40 M14 x 1.5 Up to 1000 24 21 54 22 41 55.5 14 16 12.5 50 8 10 56.2 7 7 30 227 55 75 26.5 51 NN P S X Y Z ZZ Bore (mm) Stroke range 20 M20 x 1.5 Up to 700 1/8 146 20 8 21 215 25 M26 x 1.5 Up

Pin Clamp Cylinder Series CKQ/CLKQ

55 7 7 (The mounting side and the port position of CKQSF50 is .)

LEC-OM02704CN

P-D()14.2 2. 14.1 3. 4.8.3 4. 4.10 4 4 4 (3) LECSC-AC100120V ON OFF RA MC MC SK NFB MC CNP1 L1 AC100120V CNP3 (5) U 2 U V 3 L2 V M W 4 N W 1 P1 (1) P2 PE CNP2 P (2) C D (3) CN2 L11 L21 CN6 CN6 DC24V DOCOM EMG (4) DOCOM DICOM (4) ALM RA 1. P1-P2() 2.

Table of Contents

(mm) D1 Note) A Weight (g) 6-applicable tubing D2 P2 L2 L3 M P1 L1 Model L1 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KQ2ZT04-01S 18.5 54.5 50.5 25 31 44 27 33 46 56 54 62 P2 14 KQ2ZT04-02S 10.4 13.4 21 16 13.4 10.4 4 21.5 57.5 51.5 KQ2ZT04-03S 17 23.5 59.5 53.5 L2 P1 P1 D1 KQ2ZT06-01S 18.5 54.5 50.5 14 6 KQ2ZT06-02S 21.5 57.5 51.5 12.8 13.4 22 17 13.4 12.8 KQ2ZT06-03S

LEC-OM02904

AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2

VFS

or less VFS5300 VFS5310 300 1.16 VFS Exhaust center VFS5400 VFS5410 55 or less 1.14 300 VS4 Pressure center VFS5500 55 or less VFS5510 1.14 VQ7 300 EVS Double check VFS5610 60 or less 1.99 180 VFN Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

30 30 Example 2 20 20 P1 = 0.5 MPa P1 = 0.4 MPa Example 1 10 10 P1 = 0.3 MPa P1 = 0.2 MPa 5 4 5 4 P1 = 0.1 MPa 3 3 2 2 1 1 Glossary of Terms 0.002 0.003 0.02 0.03 0.04 0.004 0.001 0.01 0.1 Pressure differential P [MPa] Graph (2) Flow rate characteristics Example 1) Obtain the pressure difference when 15 [L/min] of water runs through a solenoid valve with a Kv = 1.5 [m3/h].

High Vacuum Angle Valve

Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Both of these become slower as the operating pressure is increased. 14 Technical Data 5 He leakage 8 Exhaust time (low/medium vacuum) The time (t) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is t=2.3(V/S)log(P1/P2).

PSE530/200

OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

Stability of suction position,

ZP3EU-F6-TAL16 [Weight: 249 g] M16 x 1.5 Width across flats 22 Width across flats 24 Width across flats 24 Width across flats 22 M16 x 1.5 Rc1/8 Rc1/8 6 6 19 25 55 6 6 19 30 25 55 32 32 30 4 4 11.11) 11.11) 30 30 (Rotating angle) (Rotating angle) Applicable pad part no. ZP3E-125UM ZP3E-100BM 78.6 93.8 Applicable pad part no.

KJ

(mm) D1 Note) A Weight (g) 6-applicable tubing D2 P2 L2 L3 M P1 L1 Model L1 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KQ2ZT04-01S 18.5 54.5 50.5 25 31 44 27 33 46 56 54 62 P2 14 KQ2ZT04-02S 10.4 13.4 21 16 13.4 10.4 4 21.5 57.5 51.5 KQ2ZT04-03S 17 23.5 59.5 53.5 L2 P1 P1 D1 KQ2ZT06-01S 18.5 54.5 50.5 14 6 KQ2ZT06-02S 21.5 57.5 51.5 12.8 13.4 22 17 13.4 12.8 KQ2ZT06-03S

ZP

62.5 10.3 10.9 10.3 10.9 12.3 13.4 12.3 13.4 36.5 44 55 62.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Ejector Valve Unit Series ZYY/ZYX 1

V B A B A P1 Hysteresis setting trimmer 28.1 Pressure setting trimmer 28.5 25 15.8 8 Accessory (packed together) 1. Silencer (AN203-KM81 pc.) 51 26 16 2.