SFOD-OMT0005CN

RLS (3) EMG LK RLS (6) (2) M 24V (1) C 24V 0V (4) DC24V 0V (1)(DC24V) (2)BK RLS (3)BK RLS -26- 6.4 (1)() (3m) SI PWR (3) EMG (2) M 24V (1) C 24V 0V (4) DC24V 0V -27- (2)((1)) DC24V EMG () DC24V 0V Ry Ry: U LK RLS (6) Ry (1 ) (3) EMG (2) M 24V (1) C 24V 0V (4) DC24V 0V LK RLS (6) Ry (2 ) (3) EMG (2) M 24V (1) C 24V 0V (4) DC24V 0V LK RLS (6) Ry (3 ) (3) EMG (2) M

JXCx-OMT0034CN

RLS EMG Ry C 24V 24V M 24V 0V 0V (2 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (3 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (LEC)OFF 23 - 7.CN3 1 1 DA CC-Link A 2 2 DB CC-Link B 3 3 DG CC-Link 4 4 SLD CC-Link 5 5 FG CC-Link CC-Link CC-Link 1105%, 1/2W CC-Link 1305%, 1/2W 24 - 8.CN1IF (CONT) 8.1 (LEC)12 LEC-CG1-1 LEC-CG2-1 LEC-CG2b) M12 4pin b) M12 4pin LEC-CGD LEC-CGD LEC-CGR

JXCx-OMT0032CN

M 24V 0V 0V (2) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (3) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (LEC)OFF 22 - 7.CN3 1 2 3 4 5 TM() 1 VDeviceNet 2 CAN_L CAN(L) 3 SHIELD 4 CAN_H CAN(H) TM() 5 V+ DeviceNet DeviceNet TMCAN_HCAN_L 1201% 1/4W 23 - 8.CN1IF(CONT) 8.1 (LEC)8 LEC-CG1-1LEC-CG2-1 LEC-CG2b) M12 4pin b) M12 4pin LEC-CGD LEC-CGD LEC-CGR c) M12 4pin LEC-CG1b) M12 4pin b) M12 4pin

JXCx-OMT0030CN

RLS EMG Ry C 24V 24V M 24V 0V 0V (2 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (3 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V LECOFF 25 - 7CN3: 1 5 4 3 2 1 2 5 4 3 2 1 9 8 7 6 9 8 7 6 3 RXDTXD-P / 4 5 DGND 6 VP 7 8 RXD/TXD-N / 9 PRODIBUS DP 6GK1 500-0FC106ES7 972-0BA12-0XA0 PROFIBUS DP 26 - 8CN1:IF CONT 81 5 (LEC) LEC-CG1-1 LEC-CG2-1 LEC-CG2b) M12 4pin b) M12 4pin LEC-CGD

JXCx-OMT0028CN

RLS LEC 1 LEC 1 EMG Ry C 24V LEC LEC 24V M 24V 0V 0V BK RLS LEC 2 LEC 1 EMG Ry C 24V LEC LEC 24V M 24V 0V 0V LEC 3 BK RLS LEC 1 EMG Ry C 24V LEC LEC 24V M 24V 0V 0V 30 - GW GW (CN2SW)ON GW (CN2SW)OFF (CN4)EMG+EMGLEC (EMG+,EMG-OPEN) LEC OFF 7.CN1(CONT) 7.1 GW 12 LEC GW CONT (CN1)LEC 5.LEC-CAP-X22 3.

System: Vacuum Pump System, Single Unit, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Vacuum Sensor: Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, Connector: L-type Plug Connector, Lead Wire w/Connector & Lead Wire for Pressure Switch, Vacuum, V Port: Metric Size, ø6 One-touch Fitting, Bracket: B [One Bracket for Mounting Single Unit, (Mounting Screw

System: Vacuum Pump System, Single Unit, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Vacuum Sensor: Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, Connector: L-type Plug Connector, Lead Wire w/Connector & Lead Wire for Pressure Switch, Vacuum, V Port: Metric Size, ø6 One-touch Fitting, Bracket: B [One Bracket for Mounting Single Unit, (Mounting Screw

System: Vacuum Pump System, Single Unit, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Vacuum Sensor: Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, Connector: L-type Plug Connector, Lead Wire w/Connector & Lead Wire for Pressure Switch, Vacuum, V Port: Metric Size, ø6 One-touch Fitting, Bracket: B [One Bracket for Mounting Single Unit, (Mounting Screw

System: P (Vacuum Pump System, Single Unit), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs), Connector: L (L-type Plug Connector, Lead Wire w/Connector & Lead Wire for Pressure Switch), Vacuum, V Port: 06 (Metric Size, ø6 One-touch Fitting), Bracket: B [One Bracket for Mounting

System: P (Vacuum Pump System, Single Unit), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs), Connector: L (L-type Plug Connector, Lead Wire w/Connector & Lead Wire for Pressure Switch), Vacuum, V Port: 06 (Metric Size, ø6 One-touch Fitting), Bracket: B [One Bracket for Mounting

System: P (Vacuum Pump System, Single Unit), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs), Connector: L (L-type Plug Connector, Lead Wire w/Connector & Lead Wire for Pressure Switch), Vacuum, V Port: 06 (Metric Size, ø6 One-touch Fitting), Bracket: B [One Bracket for Mounting

System: P (Vacuum Pump System, Single Unit), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs), Connector: L (L-type Plug Connector, Lead Wire w/Connector & Lead Wire for Pressure Switch), Vacuum, V Port: 06 (Metric Size, ø6 One-touch Fitting), Bracket: w/o Option, Pump System PE

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

SU) S A (mm) A AU AV AW AX AY BA BB Size 1 YA 1 28 2.8 11 8.2 5.5 1.5 35 39.6 2 30 3.6 12.6 9.2 7 2 37 45.1 3 34.5 4.4 15.5 10.5 8 2.5 43 46.7 7 41 4.8 18.4 12.2 10 3 50 59.2 YB effective depth YC (mm) BC BD BE BG BH BI BJ BK D DD DE FA FB FD H J JA JB JC JD JE JF JG Size M4 x 0.7 M4 x 0.7 1 4.5 32 17 11 8.2 30 4.5 5.3 27h9 27.5h9 14H9 4.8 2 3.7 9 3.3 6 3.5 2.2 5.3 4 M4 x 0.7 M4 x 0.7 2 5.5

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

PA (Vacuum port) Basic type 11-MSQBA BK PA Size 1 2 3 7 High precision type 11-MSQAA M3 x 0.5 5.3 M3 x 0.5 7.5 M3 x 0.5 9.5 M5 x 0.8 7 BK Dimensions other than above are identical to the basic type and the high precision type. 11-9-12 13 Rotary Table Series MSQ Rotation Direction and Rotation Angle The rotary table turns in the clockwise direction when the A port is pressurized, and in the

Series AP3100

Indicator Switch (Option) Specification Wiring Diagram ISH NPN 3.8 to 30 VDC Max. 0.4 VDC Max. 11 mA Max. 20 mA AWG 24 3 m Blue (BL), Brown (BN), Black (BK) Code Output type Power supply voltage Output voltage Supply current Output current BN + BL Indicator switch Load BK Lead wire Cable length Color (Lead wire) Cable 1082 Diaphragm Valve for Ultra High Purity Manually operated type (For

IDX-OM-W094

355 126 IDFA70 R1-1/2 342 890 825 176 480 905 68 365 849 390 81 20 IDFA80 R2 438 957 863 169 480 958 219 78 100 11.0 463 916 485 170 IDFA90 13 IDFA80 IDFA90 mm IDFA60 745 957 () () 704 916 () () 355 330 485 463 IDFA70 890 () 849 () 390 365 IDFA60/70/80/90 Series 7-3 IDX-OM-W094 7.4 CM IDFA60/70 OLR AC 230V(50Hz) FM MC PRS PRS2 ILS THR C01 C11 TB IDFA80/90 CN GFCI EDV PE BK

Table of Contents

Dimensions 45 2-6 Driver 149 160 6 A B 130 Driver input/output signal list (CN-1/F connector ) Driver dimensions Signal description Command pulse input Command pulse input Command code input Command code input Deviation counter clear input Deviation counter clear input Brake interlock signal output Pin no. 14 15 16 17 18 32 33 34 35 36 Signal PULS PULS SIGN SIGN CLR CLR BK COIN SG P-IN Signal

Dedicated Controller

Dimensions 45 2-6 Driver 149 160 6 A B 130 Driver input/output signal list (CN-1/F connector ) Driver dimensions Signal description Command pulse input Command pulse input Command code input Command code input Deviation counter clear input Deviation counter clear input Brake interlock signal output Pin no. 14 15 16 17 18 32 33 34 35 36 Signal PULS PULS SIGN SIGN CLR CLR BK COIN SG P-IN Signal

Electric Actuators

LJ1 LG1 LC1 LX LC6D/LC6C Switches 160 6 A B 130 Driver dimensions For LJ1, LG1 Driver input/output signal list (CN-1/F connector ) Signal description Command pulse input Command pulse input Command code input Command code input Deviation counter clear input Deviation counter clear input Brake interlock signal output Pin no. 14 15 16 17 18 32 33 34 35 36 Signal PULS PULS SIGN SIGN CLR CLR BK

Electric Actuator with Integrated Guide

Dimensions 45 2-6 Driver 149 160 6 A B 130 Driver input/output signal list (CN-1/F connector ) Driver dimensions Signal description Command pulse input Command pulse input Command code input Command code input Deviation counter clear input Deviation counter clear input Brake interlock signal output Pin no. 14 15 16 17 18 32 33 34 35 36 Signal PULS PULS SIGN SIGN CLR CLR BK COIN SG P-IN Signal